公开(公告)号：EP0790482B1

公开(公告)日：2005-10-26

申请号：EP97300808.9

申请日：1997-02-07

Applicant: TENCOR INSTRUMENTS

Inventor： Samsavar, Amin ,  Wheeler, William R. ,  Eaton, Steven G. ,  Zhuang, Jian-Ping

IPC: G01B7/34 ,  G01N27/00

CPC classification number: G01Q10/04 ,  G01B3/008 ,  G01B7/34 ,  G01Q10/02 ,  G01Q30/02 ,  G01Q70/06 ,  Y10S977/834 ,  Y10S977/849 ,  Y10S977/852 ,  Y10S977/867 ,  Y10S977/868 ,  Y10S977/872 ,  Y10S977/874

公开(公告)号：EP0790482A1

公开(公告)日：1997-08-20

申请号：EP97300808.9

申请日：1997-02-07

Applicant: Tencor Instruments

Inventor： Samsavar, Amin ,  Wheeler, William R. ,  Eaton, Steven G. ,  Zhuang, Jian-Ping

IPC: G01B7/34 ,  G01N27/00

CPC classification number: G01Q10/04 ,  G01B3/008 ,  G01B7/34 ,  G01Q10/02 ,  G01Q30/02 ,  G01Q70/06 ,  Y10S977/834 ,  Y10S977/849 ,  Y10S977/852 ,  Y10S977/867 ,  Y10S977/868 ,  Y10S977/872 ,  Y10S977/874

Abstract: A dual stage scanning instrument includes a sensor 60 for sensing a parameter of a sample 90 and coarse and fine stage 70,80 for causing relative motion between the sensor 60 and the sample 90. The coarse stage 80 has a resolution of about 1 micrometer and the fine stage 70 has a resolution of 1 nanometer or better. The sensor 60 is used to sense the parameter when both stages cause relative motion between the sensor assembly 60 and the sample 80. The sensor 60 may be used to sense height variations of the sample surface as well as thermal variations, electrostatic, magnetic, light reflectivity or light transmission parameters at the same time when height variation is sensed. By performing a long scan at a coarser resolution and short scans at high resolution using the same probe tips at fixed relative positions, data obtained from the long and short scans can be correlated accurately.

Abstract translation: 双级扫描仪器包括用于感测样品90的参数的传感器60以及用于引起传感器60和样品90之间的相对运动的粗细级70,80和粗级70,80。粗级80具有约1微米的分辨率， 细级70具有1纳米或更好的分辨率。 传感器60用于在两个阶段引起传感器组件60和样本80之间的相对运动时感测参数。传感器60可用于感测样品表面的高度变化以及热变化，静电，磁性，光线 同时检测高度变化时的反射率或光透射参数。 通过使用相同的探针尖端在固定的相对位置以较粗分辨率和高分辨率的短扫描进行长扫描，可以准确地相关联从长扫描和短扫描获得的数据。