公开(公告)号：JPS6117050A

公开(公告)日：1986-01-25

申请号：JP6987485

申请日：1985-04-01

Applicant: Tencor Instruments

Inventor： RII KEI GARUBUREISU

IPC: G03C1/00 ,  G01N21/88 ,  G01N21/89 ,  G01N21/892 ,  H01L21/66

公开(公告)号：JPH04260017A

公开(公告)日：1992-09-16

申请号：JP27279091

申请日：1991-10-21

Applicant: TENCOR INSTRUMENTS

Inventor： RII KEI GARUBUREISU

IPC: G02B13/22 ,  G02B26/10

Abstract: PURPOSE: To easily obtain the telecentric scanning system of a flat field at a low cost by permitting an optical element to correct the route of a polarized optical beam to permit the optical beam to scan a target plane in the substantially focus flat field. CONSTITUTION: The additional optical element, that is, a lens 15 has a spherical surface and is the positive meniscus lens placed between the scanning reflecting equipment 11 of the plane and the mirror 13 of a recessed surface in the route of the optical beam 17b. The lens 15 slightly adjusts the optical route so as to permit the reflected beam 17c from the recessed surface mirror 13 to be not only telecentric but also the image on the plane which coincides with the target object surface 19.

公开(公告)号：JPS60142238A

公开(公告)日：1985-07-27

申请号：JP25985684

申请日：1984-12-07

Applicant: TENCOR INSTRUMENTS

Inventor： RII KEI GARUBUREISU

IPC: G01N21/88 ,  G01J1/02 ,  G01N21/84 ,  G01N21/894 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956

公开(公告)号：JPS57165743A

公开(公告)日：1982-10-12

申请号：JP20600781

申请日：1981-12-18

Applicant: TENCOR INSTRUMENTS

Inventor： RII KEI GARUBUREISU

IPC: G01N21/88 ,  G01N21/89 ,  G01N21/892 ,  G01N21/94 ,  G01N21/956