公开(公告)号：US20040166664A1

公开(公告)日：2004-08-26

申请号：US10788337

申请日：2004-03-01

Applicant: Tokyo Institute of Technology

Inventor： Akira Shimokohbe ,  Seiichi Hata

IPC: H01L021/00 ,  H01L021/84 ,  H01L021/469

CPC classification number: B81C1/00682 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81C2201/0167

Abstract: A thin film made of an amorphous material having a supercooled liquid phase region is formed on a substrate. Then, the thin film is heated to a temperature within the supercooled liquid phase region and is deformed by its weight, mechanical external force, electrostatic external force or the like, thereby to form a thin film-structure. Thereafter, the thin film-structure is cooled down to room temperature, which results in the prevention of the thin film's deformation.

Abstract translation: 在基板上形成由具有过冷液相区域的非晶材料制成的薄膜。 然后，将薄膜加热至过冷液相区域内的温度，并通过其重量，机械外力，静电外力等变形，从而形成薄膜结构。 此后，将薄膜结构冷却至室温，从而防止薄膜的变形。

公开(公告)号：US20040166330A1

公开(公告)日：2004-08-26

申请号：US10788333

申请日：2004-03-01

Applicant: Tokyo Institute of Technology

Inventor： Akira Shimokohbe ,  Seiichi Hata

IPC: C30B019/00

CPC classification number: B81C1/00682 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81C2201/0167

Abstract: A thin film made of an amorphous material having a supercooled liquid phase region is formed on a substrate. Then, the thin film is heated to a temperature within the supercooled liquid phase region and is deformed by its weight, mechanical external force, electrostatic external force or the like, thereby to form a thin film-structure. Thereafter, the thin film-structure is cooled down to room temperature, which results in the prevention of the thin film's deformation.