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    SPECTROSCOPIC ANALYZING DEVICE AND SPECTROSCOPIC ANALYZING METHOD
    1.
    发明公开
    SPECTROSCOPIC ANALYZING DEVICE AND SPECTROSCOPIC ANALYZING METHOD 有权
    VORRICHTUNG UND VERFAHREN ZUR SPEKTROSKOPISCHEN ANALYZE

    公开(公告)号：EP2112498A1

    公开(公告)日：2009-10-28

    申请号：EP07859657.4

    申请日：2007-12-21

    Applicant: Tokyo Institute of Technology

    Inventor： HASEGAWA, Takeshi

    IPC: G01N21/21 ,  G01J3/447

    CPC classification number: G01N21/21 ,  G01J3/447 ,  G01N21/31 ,  G01N21/8422

    Abstract: A spectrometric analyzing device is capable of analyzing a thin film with high accuracy by using light having an arbitrary wavelength, such as not only infrared light but also visible light, ultraviolet light and X-ray, and using whatever refractive index of a supporting member of the thin film. A spectrometric analyzing device comprises a light source (1), a polarizing filter (2), a detection unit (3), a regression operation unit (4) and an absorbance spectrum calculation unit (5). The light source (1) emits light at n different angles of incidence (θ n ) to a measurement portion. The polarizing filter (2) shields an s-polarized component. The detection unit (3) detects transmitted spectra (S). The regression operation unit (4) uses the transmitted spectra (S) and a mixing ratio (R) to obtain an in-plane mode spectrum (s ip ) and an out-of-plane mode spectrum (s op ) through a regression analysis. The absorbance spectrum calculation unit (5) calculates an in-plane mode absorbance spectrum (A ip ) and an out-of-plane mode absorbance spectrum (A op ) of the thin film, based on the results from a state in which the thin film is on the supporting member and a state in which no thin film is on the supporting member.

    Abstract translation: 光谱分析装置能够通过使用具有任意波长的光，例如不仅具有红外光，还包括可见光，紫外线和X射线，并且使用任何波长的支撑构件的折射率，能够高精度地分析薄膜 薄膜。 光谱分析装置包括光源（1），偏振滤光器（2），检测单元（3），回归运算单元（4）和吸收光谱计算单元（5）。 光源（1）将n个不同入射角（¸n）的光发射到测量部分。 偏振滤光器（2）屏蔽s偏振分量。 检测单元（3）检测发射光谱（S）。 回归运算单元（4）使用透射光谱（S）和混合比（R）通过回归分析获得平面内模式谱（s ip）和平面外模式谱（s op） 。 吸收光谱计算单元（5）根据薄膜状态的结果，计算出薄膜的面内模式吸收光谱（A ip）和平面外模式吸收光谱（A op） 膜处于支撑构件上，并且在支撑构件上没有薄膜的状态。

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