公开(公告)号：WO2014009816A1

公开(公告)日：2014-01-16

申请号：PCT/IB2013/050941

申请日：2013-02-04

Applicant: UAB NOVA FABRICA

Inventor： AUDRONIS, Martynas

IPC: H01J37/32

CPC classification number: H01J49/0013 ,  C23C14/35 ,  C23C14/52 ,  C23C14/54 ,  H01J37/32981 ,  H01J37/3476 ,  H01J2237/2002 ,  H01J2237/332

Abstract: An assembly for use in a vacuum treatment process, the assembly including a process chamber 1. Gas analysis apparatus to sample and analyse the gas composition within the chamber 1 is provided. The gas analysis apparatus includes a measuring apparatus 14 based either on a miniature mass spectrometer or on a miniature plasma source, which is located within an elongate housing 18. Part of the housing 18 is located within the process chamber 1 such that the gas is analysed within the chamber 1. The process can be controlled in response to the gas analysis.

Abstract translation: 一种用于真空处理过程的组件，该组件包括处理室1.提供用于对室1内的气体成分进行采样和分析的气体分析装置。 气体分析装置包括基于微型质谱仪或位于细长壳体18内的微型等离子体源的测量装置14.壳体18的一部分位于处理室1内，使得气体被分析 可以根据气体分析来控制该过程。

公开(公告)号：EP2859575A1

公开(公告)日：2015-04-15

申请号：EP13716833.2

申请日：2013-02-04

Applicant: UAB Nova Fabrica

Inventor： AUDRONIS, Martynas

IPC: H01J37/32

CPC classification number: H01J49/0013 ,  C23C14/35 ,  C23C14/52 ,  C23C14/54 ,  H01J37/32981 ,  H01J37/3476 ,  H01J2237/2002 ,  H01J2237/332

Abstract: An assembly for use in a vacuum treatment process, the assembly including a process changer 1. Gas analysis apparatus to sample and analyse the gas composition within the chamber 1 is provided. The gas analysis apparatus includes a measuring apparatus 14 based either on a miniature mass spectrometer or on a miniature plasma source, which is located within an elongate housing 18. Part of the housing 18 is located within the process chamber 1 such that the gas is analysed within the chamber 1. The process can be controlled in response to the gas analysis