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公开(公告)号：EP2075352A4
公开(公告)日：2010-06-30
申请号：EP07807030
申请日：2007-09-11
Applicant: ULVAC INC
Inventor： IIJIMA EIICHI , MASUDA YUKIO , ISO YOSHIKI , HAKOMORI MUNETO
CPC classification number: C23C14/30 , C23C14/081 , H01J2211/40
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