公开(公告)号：JPH11304571A

公开(公告)日：1999-11-05

申请号：JP1005099

申请日：1999-01-19

Applicant: UNITED MICROELECTRONICS CORP

Inventor： TEI SEISHI ,  HO BUNRYO ,  KO KOKUHO ,  BA KORYU

IPC: G01F23/292 ,  G05D9/12

Abstract: PROBLEM TO BE SOLVED: To enable the accurate monitoring of the amount of remaining liquid by detecting a liquid level in a liquid container with a liquid level sensor and generating a signal at the time that the liquid level comes down to a predetermined residual level. SOLUTION: A chemical solution 21 such as a chemical reaction agent is stored in a liquid container 20, and its liquid level is detected by a liquid level sensor 27 including an amplifying unit 22 to amplify a detection signal and a fiber photoelectric sensor 23. The chemical solution 21 is flowed out via a capillary tube 25 and is supplied for a spin-on-glass station. The liquid level comes down with the use of the chemical solution 21. At the time when the chemical solution 21 comes down to the tip 26 of the fiber photoelectric sensor 23, a predetermined amount of the solution remains in the liquid container 20. At this time, a signal is generated by the fiber photoelectric sensor 23, is amplified by the amplifying unit 22, and is transmitted to an alarm 28. By this, it becomes possible for a user of the spin-on glass station to know the appropriate timing of filling or exchange of the chemical solution 21.

公开(公告)号：JPH11290753A

公开(公告)日：1999-10-26

申请号：JP14924498

申请日：1998-05-29

Applicant: UNITED MICROELECTRONICS CORP

Inventor： TO ONDEN ,  YO MEITETSU ,  KO KOKUHO ,  TEI SEISHI

IPC: B05C5/00 ,  B05C11/08 ,  B05C11/10 ,  H01L21/00 ,  H01L21/31

Abstract: PROBLEM TO BE SOLVED: To decrease the time required for detaching and attaching works by forming a nozzle pot in such a manner that the wide opening of the nozzle is used to accept a fluid from a pot, a narrow opening is attached to the end of the projection of the nozzle to be inserted into a duct, and that a fluid is supplied to the outside through the wide and narrow openings and the duct. SOLUTION: A nozzle pot to spray a fluid on a wafer mounted on a spin-on- glass coating machine consists of a pot 20 to house the fluid, a funnel nozzle 21 having a wide opening 22, a narrow opening 23a and a projection 23b, and an attaching device 200 to attach the nozzle 21. The wide opening 22 of the nozzle 21 attached with the attaching device 200 is connected to the pot 20 and is used to accept the fluid from the pot 20. The narrow opening 23a of the nozzle 21 is formed at the end of the projection 23b so as to supply the chemical fluid in the pot 20 to the outside through a duct 24. Thereby, detaching and attaching works can be carried out in a short time.