公开(公告)号：JPH11290753A

公开(公告)日：1999-10-26

申请号：JP14924498

申请日：1998-05-29

Applicant: UNITED MICROELECTRONICS CORP

Inventor： TO ONDEN ,  YO MEITETSU ,  KO KOKUHO ,  TEI SEISHI

IPC: B05C5/00 ,  B05C11/08 ,  B05C11/10 ,  H01L21/00 ,  H01L21/31

Abstract: PROBLEM TO BE SOLVED: To decrease the time required for detaching and attaching works by forming a nozzle pot in such a manner that the wide opening of the nozzle is used to accept a fluid from a pot, a narrow opening is attached to the end of the projection of the nozzle to be inserted into a duct, and that a fluid is supplied to the outside through the wide and narrow openings and the duct. SOLUTION: A nozzle pot to spray a fluid on a wafer mounted on a spin-on- glass coating machine consists of a pot 20 to house the fluid, a funnel nozzle 21 having a wide opening 22, a narrow opening 23a and a projection 23b, and an attaching device 200 to attach the nozzle 21. The wide opening 22 of the nozzle 21 attached with the attaching device 200 is connected to the pot 20 and is used to accept the fluid from the pot 20. The narrow opening 23a of the nozzle 21 is formed at the end of the projection 23b so as to supply the chemical fluid in the pot 20 to the outside through a duct 24. Thereby, detaching and attaching works can be carried out in a short time.