公开(公告)号：UA86372C2

公开(公告)日：2009-04-27

申请号：UAA200511415

申请日：2005-12-01

Applicant: UNITED TECHNOLOGIES CORP

Inventor： BEERS RUSSEL A ,  KASULE ASUMINI ,  COLLINS KEVIN LEE

IPC: C23C14/24 ,  C23C14/32 ,  C23C14/54

Abstract: Предлагаетсяспособнанесенияпокрытияс помощьюнапылительноймашиныс применениемкатоднойдуги. Способхарактеризуетсятем, чтонапылительнаямашинас применениемкатоднойдугисодержитисточникпитания, вмашинеприменяютдискообразныйкатод, которыйимеетвыпарнуюповерхность, котораяпроходитмеждупервойторцевойповерхностьюи второйторцевойповерхностьюкатода, ивыпарнаяповерхностьимеетплощадь. Способвключаетэтапопределениямаксимальноприемлемойудельноймощностидлявыпарнойповерхностии подведенияэлектрическоготокаопределеннойвеличиныотисточникапитанияк катоду, причемвеличинаэлектрическоготока, разделеннаянаплощадь, равняетсяилиявляетсяменьшемаксимальноприемлемойудельноймощностидлявыпарнойповерхности. Способобеспечиваетвысокуюскор�

公开(公告)号：DE69835324T2

公开(公告)日：2007-08-23

申请号：DE69835324

申请日：1998-08-28

Applicant: UNITED TECHNOLOGIES CORP

Inventor： BEERS RUSSEL A ,  HENDRICKS ROBERT E ,  MARSZAL DEAN N ,  WRIGHT ROBERT J ,  NOETZEL ALLAN A

IPC: C23C14/24 ,  C23C14/32 ,  H01J37/32

Abstract: According to the present invention, an apparatus (10) for applying material by cathodic arc vapor deposition to a substrate (12) is provided which includes a vessel (14), apparatus (16) for maintaining a vacuum in the vessel, an annular cathode (18) having a bore (46) and an evaporative surface (44) extending between first (40) and second (42) end surfaces, apparatus (24) for selectively sustaining an arc of electrical energy between the cathode and a anode, and apparatus for driving the arc around the evaporative surface. The apparatus for driving the arc is positioned within the cathode bore, and produces a magnetic field that runs substantially parallel to the evaporative surface. The annular cathode is disposed radially inside of, and aligned with, the substrates inside the vessel.

公开(公告)号：DE69835324D1

公开(公告)日：2006-09-07

申请号：DE69835324

申请日：1998-08-28

Applicant: UNITED TECHNOLOGIES CORP

Inventor： BEERS RUSSEL A ,  HENDRICKS ROBERT E ,  MARSZAL DEAN N ,  WRIGHT ROBERT J ,  NOETZEL ALLAN A

IPC: C23C14/24 ,  C23C14/32 ,  H01J37/32

Abstract: According to the present invention, an apparatus (10) for applying material by cathodic arc vapor deposition to a substrate (12) is provided which includes a vessel (14), apparatus (16) for maintaining a vacuum in the vessel, an annular cathode (18) having a bore (46) and an evaporative surface (44) extending between first (40) and second (42) end surfaces, apparatus (24) for selectively sustaining an arc of electrical energy between the cathode and a anode, and apparatus for driving the arc around the evaporative surface. The apparatus for driving the arc is positioned within the cathode bore, and produces a magnetic field that runs substantially parallel to the evaporative surface. The annular cathode is disposed radially inside of, and aligned with, the substrates inside the vessel.