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    DEVICE FOR STICKING MATERIAL TO SUBSTRATE BY CATHODE ARC VAPOR DEPOSITION
    1.
    发明专利
    DEVICE FOR STICKING MATERIAL TO SUBSTRATE BY CATHODE ARC VAPOR DEPOSITION 失效

    公开(公告)号：JPH11140632A

    公开(公告)日：1999-05-25

    申请号：JP26099898

    申请日：1998-08-31

    Applicant: UNITED TECHNOLOGIES CORP

    Inventor： RAMALINGAM SUBBIAH

    IPC: C23C14/24 ,  H01J37/32

    Abstract: PROBLEM TO BE SOLVED: To execute uniform coating with high quality on a substrate in an advantageous manner from the viewpoint of the cost. SOLUTION: A device 10 for sticking a material to a substrate 12 by cathode arc vapor deposition includes a vessel 14, a means 16 for keeping the inside of the vessel 14 vacuum, a disk-type cathode 18, a means 22 for maintaining the arc of electric energy between the cathode 18 and an anode 24 and a means for driving the arc around the evaporating face stretching to the direction of the axis of the cathode 18. The means for driving the arc has a magnetic field generator fitted to a ferromagnetic center part piece. The magnetic field generator includes plural side part magnets fitted to the ferromagnetic center part piece and a center magnet placed in the inner direction of the radial direction of the side part magnets. Each of side part magnets generates the magnetic field transmitting the cathode, and each magnetic field includes the part running approximately parallel to the evaporating face. The center magnet exerts influence on the position in the axial direction of the arc path to the evaporating face.

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