公开(公告)号：WO02059942A3

公开(公告)日：2003-05-01

申请号：PCT/US0201968

申请日：2002-01-22

Applicant: UNIV CALIFORNIA

Inventor： CONANT ROBERT A ,  NEE JOCELYN T ,  LAU KAM-YIN

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G02B7/182

CPC classification number: B81C1/00658 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81C1/00182 ,  B81C2201/0178 ,  B81C2203/032 ,  G02B26/0841

Abstract: A micromirror (140) for fast beam steering and method of fabricating the same. The micromirror of the present invention is lightweight and optically flat, and includes a tensile membrane (144) that is stretched under high tension across a rigid single-crystal silicon support rib structure (142). A thin layer of gold may be deposited on the polysilicon membrane to improve reflectivity. The tensile stress in the membrane gives the micromirror a very high resonant frequency, thereby allowing the mirror (40) to be scanned at high frequencies without exciting resonant nodes that may compromise the flatness of the optical surface properties. The tensile stress also causes the optical surface to be stretched flat. The micromirror of the present invention may be actuated by a staggered torsional (42) electrostatic combdrive.

Abstract translation: 一种用于快速光束转向的微镜（140）及其制造方法。 本发明的微反射镜是重量轻且光学平坦的，并且包括在高拉力下横跨刚性单晶硅支撑肋结构（142）拉伸的拉伸膜（144）。 可以在多晶硅膜上沉积薄的金层以提高反射率。 膜中的拉伸应力使微镜具有非常高的谐振频率，从而允许反射镜（40）以高频扫描，而不会激发可能损害光学表面性质的平坦度的谐振节点。 拉伸应力也使得光学表面被拉平。 本发明的微反射镜可以由交错的扭转（42）静电梳状驱动器驱动。

公开(公告)号：AU2002240032A1

公开(公告)日：2002-08-06

申请号：AU2002240032

申请日：2002-01-22

Applicant: UNIV CALIFORNIA

Inventor： T-NEE JOCELYN ,  LAU KAM-YIN ,  CONANT ROBERT A

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G02B7/182

Abstract: A micromirror for fast beam steering and method of fabricating the same. The micromirror of the present invention is lightweight and optically flat, and includes a tensile membrane that is stretched under high tension across a rigid single-crystal silicon support rib structure. A thin layer of gold may be deposited on the polysilicon membrane to improve reflectivity. The tensile stress in the membrane gives the micromirror a very high resonant frequency, thereby allowing the mirror to be scanned at high frequencies without exciting resonant nodes that may compromise the flatness of the optical surface and ruin its optical properties. The tensile stress also causes the optical surface to be stretched flat. The micromirror of the present invention may be actuated by a staggered torsional electrostatic combdrive.

公开(公告)号：AU6657401A

公开(公告)日：2001-12-11

申请号：AU6657401

申请日：2001-05-14

Applicant: UNIV CALIFORNIA

Inventor： CONANT ROBERT A ,  T-NEE JOCELYN ,  LAU KAM-YIN ,  MULLER RICHARD S

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G02B7/182