公开(公告)号：AU2002240032A1

公开(公告)日：2002-08-06

申请号：AU2002240032

申请日：2002-01-22

Applicant: UNIV CALIFORNIA

Inventor： T-NEE JOCELYN ,  LAU KAM-YIN ,  CONANT ROBERT A

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G02B7/182

Abstract: A micromirror for fast beam steering and method of fabricating the same. The micromirror of the present invention is lightweight and optically flat, and includes a tensile membrane that is stretched under high tension across a rigid single-crystal silicon support rib structure. A thin layer of gold may be deposited on the polysilicon membrane to improve reflectivity. The tensile stress in the membrane gives the micromirror a very high resonant frequency, thereby allowing the mirror to be scanned at high frequencies without exciting resonant nodes that may compromise the flatness of the optical surface and ruin its optical properties. The tensile stress also causes the optical surface to be stretched flat. The micromirror of the present invention may be actuated by a staggered torsional electrostatic combdrive.

公开(公告)号：AU6657401A

公开(公告)日：2001-12-11

申请号：AU6657401

申请日：2001-05-14

Applicant: UNIV CALIFORNIA

Inventor： CONANT ROBERT A ,  T-NEE JOCELYN ,  LAU KAM-YIN ,  MULLER RICHARD S

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G02B7/182