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1.发明公开OPTICAL GRID FOR HIGH PRECISION AND HIGH RESOLUTION METHOD OF WAFER SCALE NANOFABRICATION 审中-公开光学网格的制备纳米半导体晶圆尺寸精度高，高分辨率处理
公开(公告)号：EP2340148A4
公开(公告)日：2012-05-02
申请号：EP09813558
申请日：2009-09-09
Applicant: UNIV CORNELL
Inventor： LAL AMIT , YOSHIMIZU NORIMASA
IPC: B23Q17/09
CPC classification number: G01B11/25 , G01B11/2518 , G01Q40/02 , G01Q80/00 , G03F7/70383 , G03F7/7085
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