公开(公告)号：NL2011868C2

公开(公告)日：2015-06-01

申请号：NL2011868

申请日：2013-11-29

Applicant: UNIV DELFT TECH

Inventor： ELSHINAWY MOSTAFA ,  HEIRMAN STEFAAN GUSTAAF MARIETTE ,  MELSKENS JIMMY ,  FISCHER MARINUS

IPC: G01J3/02 ,  G01J3/18

Abstract: A system for measuring an optical spectral response or property and/or IV data of a device or object under test (9), comprising in optically coupled sequence: a broadband light source (1) for emitting light of a prede- fined spectrum, a slit and/or light guide (2), a wavelength dispersive device (3), a spatial light modulator (5) for re- ceiving the emitted light and controlling an intensity and spectrum of light reflected by said modulator (5), focusing optics (6, 7, 8, 12, 13, 14) for the reflected light directed towards a reference detector (15) and towards the device or object under test (9), wherein the spatial light modulator (5) is embodied as a beamsplitter and is combined with a fil- ter (4) for suppression of second and higher order frequen- cies of the primary frequencies in the reflected light.

公开(公告)号：NL2011868C

公开(公告)日：2015-06-01

申请号：NL2011868

申请日：2013-11-29

Applicant: UNIV DELFT TECH

Inventor： ELSHINAWY MOSTAFA ,  HEIRMAN STEFAAN GUSTAAF MARIETTE ,  MELSKENS JIMMY ,  FISCHER MARINUS

IPC: G01J3/02 ,  G01J3/18

CPC classification number: G01J3/0213 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/0259 ,  G01J3/18 ,  G01J3/4532 ,  G01J2003/1273 ,  G01J2003/1828