公开(公告)号：EP3004868A4

公开(公告)日：2017-01-25

申请号：EP14805060

申请日：2014-05-27

Applicant: VAISALA OYJ

Inventor： VIITANEN VELI-PEKKA ,  LEHMUS KAISA ,  LEPPÄNEN JUKKA

IPC: G01N33/00 ,  G01N27/12 ,  G01N27/22

CPC classification number: G01N33/0031 ,  G01N27/121 ,  G01N27/223 ,  G01N33/0024

Abstract: The invention relates to a sensor structure and a method. The sensor structure includes a first sensor having a sensing element sensitive to humidity of the environment. In accordance with the invention the sensor structure also includes s second sensor having a sensing element sensitive to humidity, the second sensor comprising a catalytic permeable layer positioned on the second sensor such that it is between the sensing element of the second sensor and the environment.

Abstract translation: 本发明涉及传感器结构和方法。 传感器结构包括具有对环境湿度敏感的感测元件的第一传感器。 根据本发明，传感器结构还包括具有对湿度敏感的感测元件的第二传感器，第二传感器包括位于第二传感器上的催化可渗透层，使得其位于第二传感器的感测元件和环境之间。