公开(公告)号：WO2021142140A1

公开(公告)日：2021-07-15

申请号：PCT/US2021/012526

申请日：2021-01-07

Applicant: VESPER TECHNOLOGIES, INC.

Inventor： CORE, Craig ,  BASAERI, Hamid ,  LITTRELL, Robert

IPC: H04R1/04 ,  H04R3/00 ,  H04R17/02 ,  H04R19/00 ,  H04R19/04 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81B2203/019 ,  B81B2203/0315 ,  B81B2207/012 ,  B81B3/0021 ,  B81C1/00158 ,  B81C2201/013 ,  H04R19/005 ,  H04R2201/003 ,  H04R31/003 ,  H04R7/06

Abstract: A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.

公开(公告)号：WO2022120229A1

公开(公告)日：2022-06-09

申请号：PCT/US2021/061889

申请日：2021-12-03

Applicant: VESPER TECHNOLOGIES INC.

Inventor： LITTRELL, Robert J. ,  CORE, Craig

IPC: H01L41/083 ,  H04R17/02 ,  C01F17/212

Abstract: A low noise piezoelectric sensor, such as a piezoelectric acoustic transducer, includes a first conductive layer, a second conductive layer, and a piezoelectric layer between the first conductive layer and the second conductive layer. The piezoelectric layer comprises aluminum scandium nitride (AlScN) having a scandium content of greater than 15%, in which the scandium content and an aluminum content comprises 100% of the aluminum scandium nitride. In this way, the piezoelectric layer (or the sensor including the piezoelectric layer) achieves a dissipation factor of less than about 0.1%.