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    LOW NOISE PIEZOELECTRIC SENSORS
    1.
    发明申请
    LOW NOISE PIEZOELECTRIC SENSORS 审中-公开

    公开(公告)号：WO2022120229A1

    公开(公告)日：2022-06-09

    申请号：PCT/US2021/061889

    申请日：2021-12-03

    Applicant: VESPER TECHNOLOGIES INC.

    Inventor： LITTRELL, Robert J. ,  CORE, Craig

    IPC: H01L41/083 ,  H04R17/02 ,  C01F17/212

    Abstract: A low noise piezoelectric sensor, such as a piezoelectric acoustic transducer, includes a first conductive layer, a second conductive layer, and a piezoelectric layer between the first conductive layer and the second conductive layer. The piezoelectric layer comprises aluminum scandium nitride (AlScN) having a scandium content of greater than 15%, in which the scandium content and an aluminum content comprises 100% of the aluminum scandium nitride. In this way, the piezoelectric layer (or the sensor including the piezoelectric layer) achieves a dissipation factor of less than about 0.1%.

    PLATE COUPLING STRUCTURE
    3.
    发明申请
    PLATE COUPLING STRUCTURE 审中-公开
    板联接结构

    公开(公告)号：WO2018035486A1

    公开(公告)日：2018-02-22

    申请号：PCT/US2017/047658

    申请日：2017-08-18

    Applicant: VESPER TECHNOLOGIES INC.

    Inventor： LITTRELL, Robert J.

    IPC: H04R17/02

    Abstract: A piezoelectric, acoustic device comprising: a substrate; a plurality of plates, each plate comprising a first electrode layer, a piezoelectric layer and a second electrode layer, wherein the piezoelectric layer is in between the first electrode layer and the second electrode layer, and wherein, for each plate, a base of the plate is affixed to the substrate and a remaining portion of the plate is unaffixed to the substrate; and a plate coupling structure affixed to a first one of the plates and to a second one of the plates, wherein the plate coupling structure at least partly covers a gap between a first edge of the first one of the plates and a second edge of the second one of the plates, wherein the first edge faces the second edge; wherein the plate coupling structure comprises a mismatch reduction element and a stopping element, wherein the mismatch reduction element is configured to reduce an amount of mismatch in deflection of the first one of the plates and the second one of the plates, and wherein the stopping element is configured to enable the mismatch reduction element to expand only up to a specified amount.

    Abstract translation: 一种压电声学装置，包括：基板; 多个板，每个板包括第一电极层，压电层和第二电极层，其中压电层位于第一电极层和第二电极层之间，并且其中对于每个板， 将板固定到基底上，并将板的其余部分不固定到基底上; 以及板联接结构，所述板联接结构固定到所述板中的第一板和所述板中的第二板，其中所述板联接结构至少部分地覆盖所述板中的所述第一板的第一边缘与所述板中的第二边缘 第二个板，其中第一边缘面对第二边缘; 其中，所述板联接结构包括失配减少元件和止动元件，其中，所述失配减少元件构造成减小所述板中的所述第一板和所述板中的所述第二板的偏转量，并且其中，所述止动元件 被配置为使失配减少元件仅扩展到指定量。

    PLATE SPRING
    4.
    发明申请
    PLATE SPRING 审中-公开

    公开(公告)号：WO2017049278A9

    公开(公告)日：2017-03-23

    申请号：PCT/US2016/052461

    申请日：2016-09-19

    Applicant: VESPER TECHNOLOGIES INC.

    Inventor： LITTRELL, Robert J.

    IPC: B81B3/00 ,  B81B7/00

    Abstract: A transducer and method for processing a MEMS transducer. In one aspect, the MEMS transducer includes a first plate and a second plate. The MEMS transducer can also include a spring substantially between the first plate and the second plate, the spring including first and second spring arms dimensioned to decrease vertical deflection mismatch between the first and second plates, relative to vertical deflection mismatch of the first and second plates independent of the spring.

    MICROPHONE HAVING A DIGITAL OUTPUT DETERMINED AT DIFFERENT POWER CONSUMPTION LEVELS
    5.
    发明申请
    MICROPHONE HAVING A DIGITAL OUTPUT DETERMINED AT DIFFERENT POWER CONSUMPTION LEVELS 审中-公开

    公开(公告)号：WO2020186265A1

    公开(公告)日：2020-09-17

    申请号：PCT/US2020/022973

    申请日：2020-03-16

    Applicant: VESPER TECHNOLOGIES INC.

    Inventor： LITTRELL, Robert J.

    IPC: G10L21/0216 ,  G10L15/28 ,  G10L15/22 ,  G10L25/51 ,  G10L21/0224 ,  G10L21/0208 ,  H04W52/02 ,  H04R17/02 ,  H04R3/00

    Abstract: An acoustic device is described and includes an acoustic sensor element configured to sense acoustic energy and produce an output signal and a threshold detector circuit including a switch having an input coupled to the output of the acoustic sensor element to receive the output signal, a control port that receives a control signal, and first and second output ports, a first channel including an analog-to-digital converter that operates at a first power level a second analog-to-digital converter that operates at a second higher power level, relative to the first power level and a threshold level detector that receives an output from the first analog-to-digital converter to produce the control signal having a first state that causes the switch feed the output signal from the acoustic sensor element to the second analog-to-digital converter when the first digitized output signal meets a threshold criteria.

    PIEZOELECTRIC ACCELEROMETER WITH WAKE FUNCTION
    7.
    发明申请
    PIEZOELECTRIC ACCELEROMETER WITH WAKE FUNCTION 审中-公开

    公开(公告)号：WO2022226516A1

    公开(公告)日：2022-10-27

    申请号：PCT/US2022/071834

    申请日：2022-04-21

    Applicant: VESPER TECHNOLOGIES INC.

    Inventor： LITTRELL, Robert J.

    IPC: H01L41/113 ,  H01L41/08 ,  H01L41/27

    Abstract: A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first cantilever beam element.

    PIEZOELECTRIC ACCELEROMETER WITH WAKE FUNCTION
    8.
    发明申请
    PIEZOELECTRIC ACCELEROMETER WITH WAKE FUNCTION 审中-公开

    公开(公告)号：WO2020264247A1

    公开(公告)日：2020-12-30

    申请号：PCT/US2020/039746

    申请日：2020-06-26

    Applicant: VESPER TECHNOLOGIES INC.

    Inventor： LITTRELL, Robert J.

    IPC: H01L41/04 ,  G10L25/90 ,  H04R1/46

    Abstract: A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first tapered cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first tapered cantilever beam element tapers in width from the base portion to the tip portion. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first tapered cantilever beam element.

    PLATE SPRING
    9.
    发明申请
    PLATE SPRING 审中-公开
    板弹簧

    公开(公告)号：WO2017049278A1

    公开(公告)日：2017-03-23

    申请号：PCT/US2016/052461

    申请日：2016-09-19

    Applicant: VESPER TECHNOLOGIES INC.

    Inventor： LITTRELL, Robert J.

    IPC: B81B3/00 ,  B81B7/00

    CPC classification number: B81B3/0048 ,  B81B2201/0257 ,  B81B2203/0118 ,  B81B2203/0163 ,  H04R17/02 ,  H04R17/025 ,  H04R31/00 ,  H04R2201/003 ,  H04R2410/03

    Abstract: A transducer and method for processing a MEMS transducer. In one aspect, the MEMS transducer includes a first plate and a second plate. The MEMS transducer can also include a spring substantially between the first plate and the second plate, the spring including first and second spring arms dimensioned to decrease vertical deflection mismatch between the first and second plates, relative to vertical deflection mismatch of the first and second plates independent of the spring.

    Abstract translation: 一种用于处理MEMS换能器的换能器和方法。 在一个方面，MEMS换能器包括第一板和第二板。 MEMS换能器还可以包括基本上在第一板和第二板之间的弹簧，弹簧包括第一和第二弹簧臂，其尺寸被设计成相对于第一和第二板的垂直偏转失配而减小第一和第二板之间的垂直偏转失配 独立于春天。

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