LAYERED CHIP STRUCTURE
    2.
    发明申请
    LAYERED CHIP STRUCTURE 审中-公开
    层状芯片结构

    公开(公告)号:WO1993019857A1

    公开(公告)日:1993-10-14

    申请号:PCT/US1993002990

    申请日:1993-03-30

    Abstract: A method for making a substrate for use in a multilayered integrated circuit or multichip module which includes coating a conductive material (14) on a surface of a support sheet (10) to form a conductive circuit (12) and then drying the sheet. Next, a coating of a layer of dielectric layer (18) is placed on the support surface in the areas where the conductive material is not cast. After which the coated sheet is densified to form a densified conductive circuit embedded dielectric layer. A second coating of a dielectric (28) is placed over the first densified conductive circuit embedded dielectric layer such that the second layer is characterized by vias (30) therein which are in register with at least a portion of the conductive circuit (12). The vias in the second dielectric layer are filled to form electrically conductive vias and then densified to form the substrate (44).

    Abstract translation: 一种制造用于多层集成电路或多芯片模块的衬底的方法,包括在支撑片(10)的表面上涂覆导电材料(14)以形成导电电路(12),然后干燥片材。 接下来,将电介质层(18)的涂层放置在导电材料不被铸造的区域中的支撑表面上。 之后,将被覆层片致密化,形成致密化的导电电路嵌入介质层。 电介质(28)的第二涂层被放置在第一致密化的导电电路嵌入介电层上,使得第二层的特征在于其中与导电电路(12)的至少一部分对准的通孔(30)。 填充第二电介质层中的通孔以形成导电通孔,然后致密化以形成衬底(44)。

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