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    High dynamic range measurement system for process monitoring
    4.
    发明授权
    High dynamic range measurement system for process monitoring 有权
    用于过程监控的高动态范围测量系统

    公开(公告)号：US09310250B1

    公开(公告)日：2016-04-12

    申请号：US14696370

    申请日：2015-04-24

    Applicant: Verity Instruments, Inc.

    Inventor： Larry Arlos Bullock ,  John D. Corless ,  Mark Anthony Meloni ,  Mike Whelan

    IPC: G01J3/28 ,  G01J3/26 ,  G01J3/10 ,  H05B41/30 ,  G01J3/12

    CPC classification number: H05B41/30 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/10 ,  G01J3/26 ,  G01J2003/1278 ,  G01N21/84 ,  G01N2201/061 ,  G01N2201/0696

    Abstract: A flashlamp control system is provided with a capacitor that is statically electrically connected to the high voltage power supply, and a current sensing component is then electrically connected to the static capacitor and digital control electronics to monitor the charge current and/or the discharge current to static capacitor. A dynamically switchable capacitor electrically may also be connected to the high voltage power supply and digital control electronics for isolating the dynamically switchable capacitor from the high voltage power supply based on the monitored charge current and/or discharge current. One or more homogenizing element, comprise of an air gap, diffusing homogenizing element, imaging element, non-imaging element or light pipe homogenizing element, may be disposed in the light path proximate to the flashlamp, such as a multichannel distributor if present, to decrease the coefficient of variation of the optical signal, either temporally and spectrally, or both.

    Abstract translation: 闪光灯控制系统设置有静电电连接到高压电源的电容器，并且电流感测部件然后电连接到静态电容器和数字控制电子器件，以监测充电电流和/或放电电流 静态电容。 电动可切换电容器还可以连接到高压电源和数字控制电子设备，用于基于所监视的充电电流和/或放电电流将动态可切换电容器与高压电源隔离。 包括气隙，扩散匀化元件，成像元件，非成像元件或光管均质元件的一个或多个匀化元件可以设置在接近闪光灯的光路中，例如多通道分配器（如果存在）到 在时间上和光谱上降低光信号的变化系数，或两者。

    MULTIMODE CONFIGURABLE SPECTROMETER
    5.
    发明申请
    MULTIMODE CONFIGURABLE SPECTROMETER 有权

    公开(公告)号：US20220406586A1

    公开(公告)日：2022-12-22

    申请号：US17893685

    申请日：2022-08-23

    Applicant: Verity Instruments, Inc.

    Inventor： Larry Arlos Bullock ,  John D. Corless ,  Richard J. Daignault, JR. ,  Mark Anthony Meloni ,  Mike Whelan

    IPC: H01J49/02 ,  H04N5/378 ,  H04N5/357 ,  G01B11/06 ,  H04N5/372 ,  H04N5/355 ,  H01L27/148 ,  H04N5/347 ,  G01N21/31 ,  G01N21/71

    Abstract: The disclosure provides multimode configurable spectrometers, a method of operating a multimode configurable spectrometer, and an optical monitoring system. In one embodiment the multimode configurable spectrometer includes: (1) an optical sensor configured to receive an optical input and convert the optical input to electrical signals, wherein the optical sensor includes multiple active pixel regions for converting the optical input to the electrical signals, (2) conversion circuitry, having multiple selectable converting circuits, that is configured to receive and convert the electrical signals to a digital output according to a selected one of the selectable converting circuits, and (3) a sensor controller configured to set a synchronized operating mode to direct operation of the optical sensor and select, based on the synchronized operating mode, at least one of the selectable converting circuits to provide the digital output.

    Fiberoptically-coupled measurement system with reduced sensitivity to angularly-driven variation of signals upon reflection from a wafer
    6.
    发明授权
    Fiberoptically-coupled measurement system with reduced sensitivity to angularly-driven variation of signals upon reflection from a wafer 有权

    公开(公告)号：US10794763B2

    公开(公告)日：2020-10-06

    申请号：US16788024

    申请日：2020-02-11

    Applicant: Verity Instruments, Inc.

    Inventor： Mark A. Meloni ,  John D. Corless

    IPC: G01J3/00 ,  G01J3/02 ,  H01L21/66

    Abstract: An optical system having an OAP mirror collimator is disclosed with a housing, an OAP mirror located within the housing and has an optical axis, a fold plane and a focal point. A fiber optical cable is coupled to the housing and has first and second optical fibers, each having an exit end that form a common end face of the fiber optic cable, wherein the fiber optical cable is rotationally and translationally aligned to the OAP mirror such that the common face is perpendicular to and centered upon the optical axis of the OAP mirror and positioned a fixed distance from the focal point, and wherein the optical axes of the first and second optical fibers are jointly angularly aligned to the fold plane, and the optical axes of the first and second optical fibers deviate from being parallel to the optical axis by no more than 0.15 degrees.

    System, apparatus, and method for spectral filtering
    8.
    发明授权
    System, apparatus, and method for spectral filtering 有权

    公开(公告)号：US11885682B2

    公开(公告)日：2024-01-30

    申请号：US17915936

    申请日：2022-04-13

    Applicant: Verity Instruments, Inc.

    Inventor： Chris D. Pylant ,  Timothy C. Michals ,  John D. Corless

    IPC: G01J3/02 ,  G01J3/28 ,  H01L21/66

    CPC classification number: G01J3/0275 ,  G01J2003/2826 ,  H01L22/10

    Abstract: The disclosure provides improved processing of optical data by identifying anomalous signals in the electrical data representing the optical data. The improved processing can also include modifying the identified anomalous signal data to provide a truer representation of the optical data. The disclosed processing can be used by various systems and apparatuses for processing spectral data corresponding to the optical data. The improved processing can be used to improve the monitoring of semiconductor processes and, therefore, improve the overall semiconductor processes. In one example, a method of processing spectral data includes: (1) receiving temporally separated spectral data samples, and (2) identifying one or more anomalous signals in an intermediate one of the temporally separated spectral data samples based on at least one preceding and at least one subsequent ones of the spectral data samples.

    SYSTEM, APPARATUS, AND METHOD FOR SPECTRAL FILTERING
    9.
    发明公开
    SYSTEM, APPARATUS, AND METHOD FOR SPECTRAL FILTERING 审中-公开

    公开(公告)号：US20230194342A1

    公开(公告)日：2023-06-22

    申请号：US17915936

    申请日：2022-04-13

    Applicant: Verity Instruments, Inc.

    Inventor： Chris D. Pylant ,  Timothy C. Michals ,  John D. Corless

    IPC: G01J3/02

    CPC classification number: G01J3/0275 ,  H01L22/10

    Abstract: The disclosure provides improved processing of optical data by identifying anomalous signals in the electrical data representing the optical data. The improved processing can also include modifying the identified anomalous signal data to provide a truer representation of the optical data. The disclosed processing can be used by various systems and apparatuses for processing spectral data corresponding to the optical data. The improved processing canbe used to improve the monitoring of semiconductor processes and, therefore, improve the overall semiconductor processes. In one example, a method of processing spectral data includes: (1) receiving temporally separated spectral data samples, and (2) identifying one or more anomalous signals in an intermediate one of the temporally separated spectral data samples based on at least one preceding and at least one subsequent ones of the spectral data samples.

    FIBEROPTICALLY-COUPLED MEASUREMENT SYSTEM WITH REDUCED SENSITIVITY TO ANGULARLY-DRIVEN VARIATION OF SIGNALS UPON REFLECTION FROM A WAFER
    10.
    发明申请
    FIBEROPTICALLY-COUPLED MEASUREMENT SYSTEM WITH REDUCED SENSITIVITY TO ANGULARLY-DRIVEN VARIATION OF SIGNALS UPON REFLECTION FROM A WAFER 审中-公开

    公开(公告)号：US20200264044A1

    公开(公告)日：2020-08-20

    申请号：US16788024

    申请日：2020-02-11

    Applicant: Verity Instruments, Inc.

    Inventor： Mark A. Meloni ,  John D. Corless

    IPC: G01J3/02 ,  H01L21/66

    Abstract: An optical system having an OAP mirror collimator is disclosed with a housing, an OAP mirror located within the housing and has an optical axis, a fold plane and a focal point. A fiber optical cable is coupled to the housing and has first and second optical fibers, each having an exit end that form a common end face of the fiber optic cable, wherein the fiber optical cable is rotationally and translationally aligned to the OAP mirror such that the common face is perpendicular to and centered upon the optical axis of the OAP mirror and positioned a fixed distance from the focal point, and wherein the optical axes of the first and second optical fibers are jointly angularly aligned to the fold plane, and the optical axes of the first and second optical fibers deviate from being parallel to the optical axis by no more than 0.15 degrees.

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