公开(公告)号：US11885682B2

公开(公告)日：2024-01-30

申请号：US17915936

申请日：2022-04-13

Applicant: Verity Instruments, Inc.

Inventor： Chris D. Pylant ,  Timothy C. Michals ,  John D. Corless

IPC: G01J3/02 ,  G01J3/28 ,  H01L21/66

CPC classification number: G01J3/0275 ,  G01J2003/2826 ,  H01L22/10

Abstract: The disclosure provides improved processing of optical data by identifying anomalous signals in the electrical data representing the optical data. The improved processing can also include modifying the identified anomalous signal data to provide a truer representation of the optical data. The disclosed processing can be used by various systems and apparatuses for processing spectral data corresponding to the optical data. The improved processing can be used to improve the monitoring of semiconductor processes and, therefore, improve the overall semiconductor processes. In one example, a method of processing spectral data includes: (1) receiving temporally separated spectral data samples, and (2) identifying one or more anomalous signals in an intermediate one of the temporally separated spectral data samples based on at least one preceding and at least one subsequent ones of the spectral data samples.

公开(公告)号：US20230194342A1

公开(公告)日：2023-06-22

申请号：US17915936

申请日：2022-04-13

Applicant: Verity Instruments, Inc.

Inventor： Chris D. Pylant ,  Timothy C. Michals ,  John D. Corless

IPC: G01J3/02

CPC classification number: G01J3/0275 ,  H01L22/10

Abstract: The disclosure provides improved processing of optical data by identifying anomalous signals in the electrical data representing the optical data. The improved processing can also include modifying the identified anomalous signal data to provide a truer representation of the optical data. The disclosed processing can be used by various systems and apparatuses for processing spectral data corresponding to the optical data. The improved processing canbe used to improve the monitoring of semiconductor processes and, therefore, improve the overall semiconductor processes. In one example, a method of processing spectral data includes: (1) receiving temporally separated spectral data samples, and (2) identifying one or more anomalous signals in an intermediate one of the temporally separated spectral data samples based on at least one preceding and at least one subsequent ones of the spectral data samples.