公开(公告)号：AT524412T

公开(公告)日：2011-09-15

申请号：AT06118802

申请日：2002-11-08

Applicant: WISPRY INC

Inventor： CUNNINGHAM SHAWN ,  TATIC-LUCIC SVETLANA

IPC: B81B3/00 ,  B81B7/00 ,  H01H1/04 ,  H01H1/50 ,  H01H59/00 ,  H01H61/04 ,  H01L21/302 ,  H01L23/373 ,  H01L23/522 ,  H01L27/12 ,  H01L29/86 ,  H02N1/00 ,  H02N10/00

Abstract: According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves. The structural layer is folded.

公开(公告)号：AT417021T

公开(公告)日：2008-12-15

申请号：AT06116530

申请日：2002-11-08

Applicant: WISPRY INC

Inventor： CUNNINGHAM SHAWN ,  DEREUS DANA R ,  SETT SUBHAM ,  TATIC-LUCIC SVETLANA

IPC: B81B3/00 ,  B81B7/00 ,  H01H1/04 ,  H01H1/50 ,  H01H59/00 ,  H01H61/04 ,  H01L21/302 ,  H01L23/373 ,  H01L23/522 ,  H01L27/12 ,  H01L29/86 ,  H02N1/00 ,  H02N10/00

Abstract: According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves. The structural layer is folded.

公开(公告)号：AT372955T

公开(公告)日：2007-09-15

申请号：AT02797085

申请日：2002-11-08

Applicant: WISPRY INC

Inventor： CUNNINGHAM SHAWN ,  DEREUS DANA ,  SETT SUBHAM ,  TATIC-LUCIC SVETLANA

IPC: B81B3/00 ,  B81B7/00 ,  H01H1/04 ,  H01H1/50 ,  H01H59/00 ,  H01H61/04 ,  H01L21/302 ,  H01L23/373 ,  H01L23/522 ,  H01L27/12 ,  H01L29/86 ,  H02N1/00 ,  H02N10/00

Abstract: According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves. The structural layer is folded.

公开(公告)号：AT432240T

公开(公告)日：2009-06-15

申请号：AT06118800

申请日：2002-11-08

Applicant: WISPRY INC

Inventor： CUNNINGHAM SHAWN ,  TATIC-LUCIC SVETLANA

IPC: B81B3/00 ,  B81B7/00 ,  H01H1/04 ,  H01H1/50 ,  H01H59/00 ,  H01H61/04 ,  H01L21/302 ,  H01L23/373 ,  H01L23/522 ,  H01L27/12 ,  H01L29/86 ,  H02N1/00 ,  H02N10/00

Abstract: According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves. The structural layer is folded.

公开(公告)号：AT412611T

公开(公告)日：2008-11-15

申请号：AT06118798

申请日：2002-11-08

Applicant: WISPRY INC

Inventor： CUNNINGHAM SHAWN ,  TATIC-LUCIC SVETLANA

IPC: B81B3/00 ,  B81B7/00 ,  H01H1/04 ,  H01H1/50 ,  H01H59/00 ,  H01H61/04 ,  H01L21/302 ,  H01L23/373 ,  H01L23/522 ,  H01L27/12 ,  H01L29/86 ,  H02N1/00 ,  H02N10/00

Abstract: According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves. The structural layer is folded.