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    SYSTEMS AND METHODS FOR CURRENT DENSITY OPTIMIZATION IN CMOS-INTEGRATED MEMS CAPACITIVE DEVICES
    3.
    发明申请
    SYSTEMS AND METHODS FOR CURRENT DENSITY OPTIMIZATION IN CMOS-INTEGRATED MEMS CAPACITIVE DEVICES 审中-公开
    CMOS集成MEMS电容器件中电流密度优化的系统与方法

    公开(公告)号：WO2012170748A2

    公开(公告)日：2012-12-13

    申请号：PCT/US2012041436

    申请日：2012-06-07

    Applicant: WISPRY INC ,  MORRIS ARTHUR S III ,  NATARAJAN SARAVANA ,  DEREUS DANA

    Inventor： MORRIS ARTHUR S III ,  NATARAJAN SARAVANA ,  DEREUS DANA

    IPC: B81B3/00 ,  H01G5/16 ,  H01H59/00

    CPC classification number: H01G5/16 ,  H01G5/18 ,  H01H59/0009 ,  Y10T29/43

    Abstract: The present subject matter relates to the use of current splitting and routing techniques to distribute current uniformly among the various layers of a device to achieve a high Q-factor. Such current splitting can allow the use of relatively narrow interconnects and feeds while maintaining a high Q. Specifically, for example a micro-electromechanical systems (MEMS) device can comprise a metal layer comprising a first portion and a second portion that is electrically separated from the first portion. A first terminus can be independently connected to each of the first portion and the second portion of the metal layer, wherein the first portion defines a first path between the metal layer and the first terminus, and the second portion defines a second path between the metal layer and the first terminus.

    Abstract translation: 本主题涉及使用当前的分割和布线技术来均匀地在设备的各个层之间分配电流以实现高Q因子。 这种电流分流可以允许使用相对窄的互连和馈送，同时保持高的Q.具体地，例如微机电系统（MEMS）装置可以包括金属层，其包括第一部分和第二部分，其与 第一部分。 第一末端可以独立地连接到金属层的第一部分和第二部分中的每一个，其中第一部分限定金属层和第一末端之间的第一路径，并且第二部分限定金属之间的第二路径 层和第一个终点。

    MEMS SPRUNG CANTILEVER TUNABLE CAPACITORS AND METHODS
    4.
    发明申请
    MEMS SPRUNG CANTILEVER TUNABLE CAPACITORS AND METHODS 审中-公开
    MEMS扬声器电容式电容器及方法

    公开(公告)号：WO2011088362A3

    公开(公告)日：2011-11-17

    申请号：PCT/US2011021358

    申请日：2011-01-14

    Applicant: WISPRY INC ,  DEREUS DANA

    Inventor： DEREUS DANA

    IPC: H01G5/16 ,  B81B3/00

    CPC classification number: H01G5/18 ,  B81B3/007 ,  B81B2201/014 ,  H02N1/006

    Abstract: The present subject matter relates to MEMS tunable capacitors and methods for operating such capacitors. The tunable capacitor can feature a primary stationary actuator electrode on a substrate, a secondary stationary actuator electrode on the substrate, a stationary RF signal capacitor plate electrode on the substrate, a sprung cantilever disposed over the substrate, a beam anchor connecting a first end of the sprung cantilever to the substrate, and one or more elastic springs or other biasing members connecting a second end of the sprung cantilever to the substrate, the second end being located distally from the first end. The spring cantilever can be movable between an OFF state defined by the potential difference between the stationary and moveable actuator electrodes being zero, and an ON state defined by a non-zero potential difference between the stationary and moveable actuator electrodes.

    Abstract translation: 本主题涉及MEMS可调电容器和用于操作这种电容器的方法。 可调谐电容器可以在基板上具有主固定致动器电极，在基板上具有次级固定致动器电极，在基板上具有固定RF信号电容器板电极，设置在基板上的弹簧悬臂梁，连接第一端 弹簧悬臂连接到基板，以及一个或多个弹簧或其他偏置构件，将弹簧悬臂的第二端连接到基板，第二端位于远离第一端的位置。 弹簧悬臂可以在由静止和可动执行器电极之间的电位差为零定义的OFF状态和由固定和可动执行器电极之间的非零电位差限定的ON状态之间移动。

    SYSTEMS, DEVICES, AND METHODS TO REDUCE DIELECTRIC CHARGING IN MICRO-ELECTROMECHANICAL SYSTEMS DEVICES
    7.
    发明公开
    SYSTEMS, DEVICES, AND METHODS TO REDUCE DIELECTRIC CHARGING IN MICRO-ELECTROMECHANICAL SYSTEMS DEVICES 审中-公开

    公开(公告)号：EP3201123A4

    公开(公告)日：2018-05-23

    申请号：EP15846735

    申请日：2015-10-05

    Applicant: WISPRY INC

    Inventor： DEREUS DANA ,  MORRIS ARTHUR S ,  MOLINERO-GILES DAVID

    IPC: B81B7/02 ,  B81B5/00 ,  B81C1/00

    CPC classification number: H01G5/16 ,  B81B3/0008 ,  B81B3/0051 ,  B81B2201/0221

    Abstract: The present subject matter relates to devices, systems, and methods for isolation of electrostatic actuators in MEMS devices to reduce or minimize dielectric charging. A tunable component can include a fixed actuator electrode positioned on a substrate, a movable actuator electrode carried on a movable component that is suspended over the substrate, one or more isolation bumps positioned between the fixed actuator electrode and the movable actuator electrode, and a fixed isolation landing that is isolated within a portion of the fixed actuator electrode that is at, near, and/or substantially aligned with each of the one or more isolation bumps. In this arrangement, the movable actuator electrode can be selectively movable toward the fixed actuator electrode, but the one or more isolation bumps can prevent contact between the fixed and movable actuator electrodes, and the fixed isolation landing can inhibit the development of an electric field in the isolation bump.

    ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS
    8.
    发明公开
    ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS 审中-公开
    控制面板分割与控制装置及程序

    公开(公告)号：EP2969912A4

    公开(公告)日：2016-11-09

    申请号：EP14764504

    申请日：2014-03-17

    Applicant: WISPRY INC

    Inventor： DEREUS DANA ,  CUNNINGHAM SHAWN J ,  MORRIS ARTHUR S

    IPC: B81B7/02 ,  H01G5/14

    CPC classification number: B81B3/001 ,  B81B3/0051 ,  B81B3/0056 ,  B81B2201/0221 ,  B81B2203/04 ,  B81B2203/053 ,  H01G4/1227 ,  H01G5/18

    Abstract: Devices and methods of operating partitioned actuator plates to obtain a desirable shape of a movable component of a micro-electro-mechanical system (MEMS) device. The subject matter described herein can in some embodiments include a micro-electro-mechanical system (MEMS) device including a plurality of actuation electrodes attached to a first surface, where each of the one or more actuation electrode being independently controllable, and a movable component spaced apart from the first surface and movable with respect to the first surface. Where the movable component further includes one or more movable actuation electrodes spaced apart from the plurality of fixed actuation electrodes.

    MEMS SPRUNG CANTILEVER TUNABLE CAPACITORS AND METHODS
    10.
    发明公开
    MEMS SPRUNG CANTILEVER TUNABLE CAPACITORS AND METHODS 审中-公开

    公开(公告)号：EP2524383A4

    公开(公告)日：2018-03-28

    申请号：EP11733466

    申请日：2011-01-14

    Applicant: WISPRY INC

    Inventor： DEREUS DANA

    IPC: H01G5/16 ,  B81B3/00 ,  H01G5/18 ,  H02N1/00

    CPC classification number: H01G5/18 ,  B81B3/007 ,  B81B2201/014 ,  H02N1/006

    Abstract: The present subject matter relates to MEMS tunable capacitors and methods for operating such capacitors. The tunable capacitor can feature a primary stationary actuator electrode on a substrate, a secondary stationary actuator electrode on the substrate, a stationary RF signal capacitor plate electrode on the substrate, a sprung cantilever disposed over the substrate, a beam anchor connecting a first end of the sprung cantilever to the substrate, and one or more elastic springs or other biasing members connecting a second end of the sprung cantilever to the substrate, the second end being located distally from the first end. The spring cantilever can be movable between an OFF state defined by the potential difference between the stationary and moveable actuator electrodes being zero, and an ON state defined by a non-zero potential difference between the stationary and moveable actuator electrodes.

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