公开(公告)号：DE60230341D1

公开(公告)日：2009-01-22

申请号：DE60230341

申请日：2002-11-08

Applicant: WISPRY INC

Inventor： CUNNINGHAM SHAWN J ,  DEREUS DANA R ,  SETT SUBHAM ,  TATIC-LUCIC SVETLANA

IPC: B81B3/00 ,  B81B7/00 ,  H01H1/04 ,  H01H1/50 ,  H01H59/00 ,  H01H61/04 ,  H01L21/302 ,  H01L23/373 ,  H01L23/522 ,  H01L27/12 ,  H01L29/86 ,  H02N1/00 ,  H02N10/00

Abstract: According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves. The structural layer is folded.

公开(公告)号：DE60229675D1

公开(公告)日：2008-12-11

申请号：DE60229675

申请日：2002-11-08

Applicant: WISPRY INC

Inventor： CUNNINGHAM SHAWN J ,  TATIC-LUCIC SVETLANA

IPC: B81B3/00 ,  B81B7/00 ,  H01H1/04 ,  H01H1/50 ,  H01H59/00 ,  H01H61/04 ,  H01L21/302 ,  H01L23/373 ,  H01L23/522 ,  H01L27/12 ,  H01L29/86 ,  H02N1/00 ,  H02N10/00

Abstract: According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves. The structural layer is folded.

公开(公告)号：DE60222468T2

公开(公告)日：2008-06-12

申请号：DE60222468

申请日：2002-11-08

Applicant: WISPRY INC

Inventor： CUNNINGHAM SHAWN J ,  DEREUS DANA R ,  SETT SUBHAM ,  TATIC-LUCIC SVETLANA

IPC: B81B3/00 ,  B81B7/00 ,  H01H1/04 ,  H01H1/50 ,  H01H59/00 ,  H01H61/04 ,  H01L21/302 ,  H01L23/373 ,  H01L23/522 ,  H01L27/12 ,  H01L29/86 ,  H02N1/00 ,  H02N10/00

Abstract: According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves. The structural layer is folded.

公开(公告)号：DE60232471D1

公开(公告)日：2009-07-09

申请号：DE60232471

申请日：2002-11-08

Applicant: WISPRY INC

Inventor： CUNNINGHAM SHAWN J ,  TATIC-LUCIC SVETLANA

IPC: B81B3/00 ,  B81B7/00 ,  H01H1/04 ,  H01H1/50 ,  H01H59/00 ,  H01H61/04 ,  H01L21/302 ,  H01L23/373 ,  H01L23/522 ,  H01L27/12 ,  H01L29/86 ,  H02N1/00 ,  H02N10/00

Abstract: According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves. The structural layer is folded.

公开(公告)号：DE60222468D1

公开(公告)日：2007-10-25

申请号：DE60222468

申请日：2002-11-08

Applicant: WISPRY INC

Inventor： CUNNINGHAM SHAWN J ,  DEREUS DANA R ,  SETT SUBHAM ,  TATIC-LUCIC SVETLANA

IPC: B81B3/00 ,  B81B7/00 ,  H01H1/04 ,  H01H1/50 ,  H01H59/00 ,  H01H61/04 ,  H01L21/302 ,  H01L23/373 ,  H01L23/522 ,  H01L27/12 ,  H01L29/86 ,  H02N1/00 ,  H02N10/00

Abstract: According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves. The structural layer is folded.

公开(公告)号：AT341098T

公开(公告)日：2006-10-15

申请号：AT02793902

申请日：2002-11-08

Applicant: WISPRY INC

Inventor： CUNNINGHAM SHAWN J ,  TATIC-LUCIC SVETLANA

IPC: B81B3/00 ,  B81B7/00 ,  H01H1/04 ,  H01H1/50 ,  H01H59/00 ,  H01H61/04 ,  H01L21/302 ,  H01L23/373 ,  H01L23/522 ,  H01L27/12 ,  H01L29/86 ,  H02N1/00 ,  H02N10/00 ,  H01L21/4763 ,  H01P1/10 ,  H01H57/00 ,  H02B1/00

Abstract: According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves. The structural layer is folded.

公开(公告)号：WO2006063257A2

公开(公告)日：2006-06-15

申请号：PCT/US2005044678

申请日：2005-12-09

Applicant: WISPRY INC ,  MORRIS ARTHUR S ,  CUNNINGHAM SHAWN J

Inventor： MORRIS ARTHUR S ,  CUNNINGHAM SHAWN J

IPC: H01L41/00

CPC classification number: H03H7/465 ,  H01F17/0033 ,  H01F2007/068 ,  H01F2017/002 ,  H01F2017/0053 ,  H01G5/16 ,  H01G5/18 ,  H01G5/40 ,  H01H59/0009 ,  H01L23/5223 ,  H01L23/5227 ,  H01L28/40 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/3011 ,  H01P1/20345 ,  H03H7/1783 ,  H03H7/1791 ,  H03H7/463 ,  H03H2007/006 ,  H03H2007/008 ,  H01L2924/00

Abstract: According to one aspect, the subject matter described herein includes a MEMS fixed capacitor and a method for fabricating the MEMS fixed capacitor. The MEMS fixed capacitor can include a first stationary, capacitive plate on a substrate. Further, the MEMS fixed capacitor can include a non-conductive, stationary beam suspended above the substrate. The MEMS fixed capacitor can also include a second stationary, capacitive plate spaced a predetermined distance from the first stationary, capacitive plate for producing a predetermined capacitance between the capacitive plates.

Abstract translation: 根据一个方面，本文所述的主题包括MEMS固定电容器和用于制造MEMS固定电容器的方法。 MEMS固定电容器可以包括在基板上的第一固定电容板。 此外，MEMS固定电容器可以包括悬挂在衬底上的非导电的静止光束。 MEMS固定电容器还可以包括与第一固定电容板隔开预定距离的第二固定电容板，用于在电容板之间产生预定的电容。

公开(公告)号：EP2100176A4

公开(公告)日：2017-11-29

申请号：EP07862543

申请日：2007-12-05

Applicant: WISPRY INC

Inventor： MORRIS ARTHUR S III ,  DEREUS DANA ,  CUNNINGHAM SHAWN J

IPC: G02B6/26

CPC classification number: H01G5/011 ,  B81B1/00 ,  B81B2207/07 ,  H01G5/16 ,  Y10T29/41 ,  Y10T29/435

Abstract: Substrates with slotted metals and related methods are provided. According to one aspect, a slotted metal attached to a substrate can include a metal patterned with slots less than or about equal to 2 microns. The slots can result in line widths that are approximately the size of a single metallurgical grain in an unpatterned layer.

公开(公告)号：WO2008070115A3

公开(公告)日：2008-10-16

申请号：PCT/US2007024905

申请日：2007-12-05

Applicant: WISPRY INC ,  MORRIS ARTHUR S III ,  DEREUS DANA ,  CUNNINGHAM SHAWN J

Inventor： MORRIS ARTHUR S III ,  DEREUS DANA ,  CUNNINGHAM SHAWN J

IPC: G02B6/26 ,  G02B26/00

CPC classification number: H01G5/011 ,  B81B1/00 ,  B81B2207/07 ,  H01G5/16 ,  Y10T29/41 ,  Y10T29/435

Abstract: Substrates with slotted metals and related methods are provided. According to one aspect, a slotted metal attached to a substrate can include a metal patterned with slots less than or about equal to 2 microns. The slots can result in line widths that are approximately the size of a single metallurgical grain in an unpatterned layer.

Abstract translation: 提供了具有开槽金属和相关方法的基板。 根据一个方面，附接到基底的开槽金属可以包括图案化的具有小于或等于2微米的狭缝的金属。 槽可以产生大约在未图案化层中的单个冶金颗粒的尺寸的线宽度。

公开(公告)号：EP2969912A4

公开(公告)日：2016-11-09

申请号：EP14764504

申请日：2014-03-17

Applicant: WISPRY INC

Inventor： DEREUS DANA ,  CUNNINGHAM SHAWN J ,  MORRIS ARTHUR S

IPC: B81B7/02 ,  H01G5/14

CPC classification number: B81B3/001 ,  B81B3/0051 ,  B81B3/0056 ,  B81B2201/0221 ,  B81B2203/04 ,  B81B2203/053 ,  H01G4/1227 ,  H01G5/18

Abstract: Devices and methods of operating partitioned actuator plates to obtain a desirable shape of a movable component of a micro-electro-mechanical system (MEMS) device. The subject matter described herein can in some embodiments include a micro-electro-mechanical system (MEMS) device including a plurality of actuation electrodes attached to a first surface, where each of the one or more actuation electrode being independently controllable, and a movable component spaced apart from the first surface and movable with respect to the first surface. Where the movable component further includes one or more movable actuation electrodes spaced apart from the plurality of fixed actuation electrodes.