-
1.
公开(公告)号:CA2414325C
公开(公告)日:2007-09-25
申请号:CA2414325
申请日:2002-12-13
Applicant: XEROX CORP
Inventor: KNIESSL MICHAEL A , CHUA CHRISTOPHER L , BOUR DAVID P
IPC: H01L21/18 , H01L33/00 , H01L33/10 , H01L33/46 , H01S5/125 , H01S5/183 , H01S5/187 , H01S5/323 , H01S5/343
Abstract: A method is provided for fabricating a nitride based resonant cavity semiconductor structure with a first distributed Bragg reflector on a sapphi re substrate, a second substrate bonded to the first distributed Bragg reflector, the sapphi re substrate removed by laser-assisted epitaxial lift-off, and fabricating a second Bragg reflector on the semiconductor structure opposite the first distributed Bragg reflector. The nitride based resonant cavity semiconductor structure can be a VCSEL, LED or photodetector, or a combination of said devices.
-
公开(公告)号:BR0205192A
公开(公告)日:2004-06-29
申请号:BR0205192
申请日:2002-12-19
Applicant: XEROX CORP
Inventor: BOUR DAVID P , KNEISSL MICHAEL A
Abstract: Graded semiconductor layers (200,202) between GaN and AlGaN layers (118,120) in a nitride based semiconductor laser structure reduce the threshold voltage of the laser structure by reducing the electric potential barrier at the interface between the GaN and AlGaN layers. The graded layers can be step graded, continuous graded or digital graded.
-
公开(公告)号:DE69515428T2
公开(公告)日:2000-07-06
申请号:DE69515428
申请日:1995-11-28
Applicant: XEROX CORP
Inventor: BOUR DAVID P , THORNTON ROBERT L
Abstract: The laser includes a substrate, an N doped cladding layer adjacent the substrate, and two confining layers with an active layer between them. One of the confining layers is adjacent the N doped cladding layer. Also provided are a p-doped cladding layer, e.g. of AlGaAs, and a tunnel barrier layer having an indirect bandgap energy value and a direct bandgap energy value associated with it. The P doped cladding layer is adjacent the second confining layer and it has a bandclap energy value associated with it. The indirect bandgap energy value of the tunnel barrier layer is less than the direct bandclap energy value and equal to or less than the bandgap energy value of the P doped cladding layer. The barrier layer is disposed between the second confining layer and the P doped cladding layer and is thin enough such that electrons in the active region are prevented from entering the P doped cladding layer.
-
公开(公告)号:DE69515428D1
公开(公告)日:2000-04-13
申请号:DE69515428
申请日:1995-11-28
Applicant: XEROX CORP
Inventor: BOUR DAVID P , THORNTON ROBERT L
Abstract: The laser includes a substrate, an N doped cladding layer adjacent the substrate, and two confining layers with an active layer between them. One of the confining layers is adjacent the N doped cladding layer. Also provided are a p-doped cladding layer, e.g. of AlGaAs, and a tunnel barrier layer having an indirect bandgap energy value and a direct bandgap energy value associated with it. The P doped cladding layer is adjacent the second confining layer and it has a bandclap energy value associated with it. The indirect bandgap energy value of the tunnel barrier layer is less than the direct bandclap energy value and equal to or less than the bandgap energy value of the P doped cladding layer. The barrier layer is disposed between the second confining layer and the P doped cladding layer and is thin enough such that electrons in the active region are prevented from entering the P doped cladding layer.
-
公开(公告)号:DE60025407T2
公开(公告)日:2006-07-27
申请号:DE60025407
申请日:2000-04-07
Applicant: XEROX CORP
Inventor: VAN DE WALLE CHRISTIAN G , BOUR DAVID P , KNEISSL MICHAEL A , ROMANO LINDA T
Abstract: An asymmetric waveguide nitride laser diode structure and a method of fabricating the same is provided. The asymmetric laser diode structure comprises an active layer having a first and a second surface, a transition layer in contact with the first surface of the active layer, a p-cladding layer disposed adjacent to the transition layer, and an n-type layer in contact with the second surface of the active layer.
-
公开(公告)号:DE60022723D1
公开(公告)日:2005-10-27
申请号:DE60022723
申请日:2000-11-03
Applicant: XEROX CORP
Inventor: KNEISSL MICHAEL A , BOUR DAVID P , ROMANO LINDA T , KRUSOR BRENT S , JOHNSON NOBLE M
Abstract: An inner stripe laser diode structure (100) for GaN laser diodes is disclosed. Inner stripe laser diode structures provide a convenient means of achieving low threshold, single mode laser diodes. The structure of an inner stripe laser diode is modified to produce lateral index guiding.
-
公开(公告)号:BR0205196A
公开(公告)日:2004-06-29
申请号:BR0205196
申请日:2002-12-19
Applicant: XEROX CORP
Inventor: CHUA CHRISTOPHER L , KNEISSL MICHEAEL A , BOUR DAVID P
Abstract: A method is provided for fabricating a nitride based resonant cavity semiconductor structure with a first distributed Bragg reflector (122) on a sapphire substrate (100), a second substrate (128) bonded to the first distributed Bragg reflector (122), the sapphire substrate (100) removed by laser-assisted epitaxial lift-off, and fabricating a second Bragg reflector (142) on the semiconductor structure opposite the first distributed Bragg reflector. The nitride based resonant cavity semiconductor structure can be a VCSEL, LED or photodetector, or a combination of said devices.
-
公开(公告)号:DE60022723T2
公开(公告)日:2006-04-27
申请号:DE60022723
申请日:2000-11-03
Applicant: XEROX CORP
Inventor: KNEISSL MICHAEL A , BOUR DAVID P , ROMANO LINDA T , KRUSOR BRENT S , JOHNSON NOBLE M
Abstract: An inner stripe laser diode structure (100) for GaN laser diodes is disclosed. Inner stripe laser diode structures provide a convenient means of achieving low threshold, single mode laser diodes. The structure of an inner stripe laser diode is modified to produce lateral index guiding.
-
9.
公开(公告)号:CA2414325A1
公开(公告)日:2003-06-21
申请号:CA2414325
申请日:2002-12-13
Applicant: XEROX CORP
Inventor: CHUA CHRISTOPHER L , KNIESSL MICHAEL A , BOUR DAVID P
IPC: H01L33/00 , H01L33/10 , H01L33/46 , H01S5/183 , H01S5/323 , H01S5/343 , H01L21/18 , H01S5/125 , H01S5/187
Abstract: A method is provided for fabricating a nitride based resonant cavity semiconductor structure with a first distributed Bragg reflector on a sapphi re substrate, a second substrate bonded to the first distributed Bragg reflector, the sapphi re substrate removed by laser-assisted epitaxial lift-off, and fabricating a second Bragg reflector on the semiconductor structure opposite the first distributed Bragg reflector. The nitride based resonant cavity semiconductor structure can be a VCSEL, LED or photodetector, or a combination of said devices.
-
公开(公告)号:DE60236402D1
公开(公告)日:2010-07-01
申请号:DE60236402
申请日:2002-12-12
Applicant: XEROX CORP
Inventor: CHUA CHRISTOPHER L , KNEISSL MICHAEL A , BOUR DAVID P
-
-
-
-
-
-
-
-
-