公开(公告)号：US20040184760A1

公开(公告)日：2004-09-23

申请号：US10721724

申请日：2003-11-24

Applicant: Xerox Corporation

Inventor： Joel A. Kubby ,  Kristine A. German ,  Peter M. Gulvin

IPC: G02B006/00

CPC classification number: G02B6/3508 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B2006/12145

Abstract: Methods for applying electrical stimuli to optical micro-electro-mechanical system (MEMS) devices are disclosed. Electrical stimuli may be applied to one or more released current carrying elements mounted above a supporting substrate biased to minimize electrostatic force between the one or more current released current carrying elements and the supporting substrate. Additionally, the electrical stimuli bias minimizes electrical potential difference between the one or more released current carrying elements and one or more non-current carrying elements mounted above the supporting substrate that come in contact or close proximity during operation of the one or more released current carrying elements.

Abstract translation: 公开了将电刺激应用于光学微机电系统（MEMS）装置的方法。 可以将电刺激施加到安装在支撑基板上方的一个或多个释放的载流元件，偏置以最小化一个或多个电流释放的载流元件与支撑基板之间的静电力。 此外，电刺激偏压最小化一个或多个释放的载流元件与安装在支撑基板上方的一个或多个非电流承载元件之间的电势差，该一个或多个非电流承载元件在一个或多个释放的电流载体的操作期间接触或接近 元素。

公开(公告)号：US20040184709A1

公开(公告)日：2004-09-23

申请号：US10712200

申请日：2003-11-12

Applicant: Xerox Corporation

Inventor： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

IPC: G02B006/26

CPC classification number: G02B6/3508 ,  G02B6/356 ,  G02B6/358 ,  G02B2006/12145

Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an MnullN optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a shuttle for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS switch utilizes a latching mechanism in association with a thermal drive actuator for aligning the waveguide shuttle. In use the optical MEMS switch may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

Abstract translation: 公开了一种光学微机电系统（MEMS）开关。 在优选实施例中，光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在梭子上的多个光波导，用于切换光学状态，其中光学开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS开关利用与用于对准波导穿梭机的热驱动致动器相关联的闭锁机构。 在使用中，光学MEMS开关可以与其他光学部件集成以形成平面光电路（PLC）。 当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重配置光插座多路复用器（ROADM）。

公开(公告)号：US20040118481A1

公开(公告)日：2004-06-24

申请号：US10727191

申请日：2003-12-03

Applicant: Xerox Corporation.

Inventor： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

IPC: H01F001/03

CPC classification number: G02B6/3508 ,  B81B3/0054 ,  B81B2201/032 ,  G02B6/3546 ,  G02B6/3568 ,  G02B6/3582 ,  G02B6/3596 ,  H01H2001/0042

Abstract: A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.

公开(公告)号：US20020130916A1

公开(公告)日：2002-09-19

申请号：US09812498

申请日：2001-03-19

Applicant: Xerox Corporation

Inventor： Peter M. Gulvin ,  Jingkuang Chen

IPC: B41J002/015

CPC classification number: B41J2/1639 ,  B41J2/16 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14403 ,  B81B7/0006

Abstract: A microstructure that may be used as an electrical connection in a microfabricated electro-mechanical system (MEMS) apparatus. The microstructure may have one or more isolatable electrical connections for signal transmission. The microstructure allows a MEMS apparatus to shield signal transmissions from the effects of electromagnetic interference or conductive fluids.

Abstract translation: 微结构可用作微加工机电系统（MEMS）装置中的电连接。 微结构可以具有用于信号传输的一个或多个可分离的电连接。 微结构允许MEMS装置屏蔽信号传输免受电磁干扰或导电流体的影响。

公开(公告)号：US20030087468A1

公开(公告)日：2003-05-08

申请号：US09986107

申请日：2001-11-07

Applicant: XEROX CORPORATION

Inventor： Peter M. Gulvin ,  Elliott A. Eklund ,  Joel A. Kubby

IPC: H01L021/00

CPC classification number: B81C1/00476 ,  B81B2203/0127 ,  B81C2201/053

Abstract: A structure for a micro-device is fabricated by forming: a first layer of sacrificial material, a layer of structural material over the first sacrificial material layer, a second layer of sacrificial material over the structural material layer and a protective layer over the second sacrificial material layer. A release etch is used to remove the first and second sacrificial material layers at approximately the same rate. A structural feature may also be fabricated by forming: a first layer of a first material; a layer of structural material over the first layer of the first material; at least one cut in the structural material layer; and, a first layer of a sacrificial material, different from the first material, over the structural material layer such that an interface is created between the first layer of the sacrificial material and the first layer of the first material at the at least one cut.

Abstract translation: 通过在第一牺牲材料层上形成第一牺牲材料层，结构材料层，在结构材料层上形成第二牺牲材料层，在第二牺牲层上形成保护层，制成微器件结构 材料层。 使用释放蚀刻以大致相同的速率去除第一和第二牺牲材料层。 还可以通过形成第一材料的第一层来制造结构特征; 在第一材料的第一层上方的结构材料层; 在结构材料层中至少有一个切口; 以及在所述结构材料层上方的与所述第一材料不同的牺牲材料的第一层，使得在所述牺牲材料的第一层和所述至少一个切口处的所述第一材料的所述第一层之间形成界面。

公开(公告)号：US20020096488A1

公开(公告)日：2002-07-25

申请号：US09768688

申请日：2001-01-24

Applicant: Xerox Corporation

Inventor： Peter M. Gulvin ,  Elliott A. Eklund

IPC: G11B005/127 ,  B41J002/04

CPC classification number: B81B3/007 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B81B2201/052 ,  B81B2203/0127 ,  F04B43/043 ,  H04R7/08

Abstract: A method for fabricating a membrane having a corrugated, multi-layer structure, comprising the steps of: providing a substrate having an insulator layer on the top surface of the substrate, a conductive layer on the insulator layer, a sacrificial layer on said conductive layer, and a second conductive layer; patterning a series of holes the second conductive layer to allow release etchant to have access to a second sacrificial layer; depositing the second sacrificial layer onto said second conductive layer so that the series of holes are filled with the second sacrificial layer; patterning the second sacrificial layer with a radial and/or concentric grid pattern so that a third conductive layer when deposited will form the support structure and top portion of the corrugated structure; depositing the third conductive layer so that the grid pattern is filled in and is in contact with the second conductive layer; removing the first and second sacrificial layer by immersing the device in a release etchant.

Abstract translation: 一种用于制造具有波纹状多层结构的膜的方法，包括以下步骤：在所述基板的顶表面上提供具有绝缘体层的基板，所述绝缘体层上的导电层，所述导电层上的牺牲层 ，和第二导电层; 将一系列孔图案化成第二导电层，以允许剥离蚀刻剂进入第二牺牲层; 将所述第二牺牲层沉积到所述第二导电层上，使得所述一系列孔被所述第二牺牲层填充; 以径向和/或同心网格图案图案化第二牺牲层，使得沉积时的第三导电层将形成波纹结构的支撑结构和顶部; 沉积第三导电层，使得栅格图案被填充并与第二导电层接触; 通过将设备浸入释放蚀刻剂中来去除第一和第二牺牲层。

公开(公告)号：US20040184710A1

公开(公告)日：2004-09-23

申请号：US10712203

申请日：2003-11-12

Applicant: Xerox Corporation

Inventor： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

IPC: G02B006/26

CPC classification number: G02B6/358 ,  G02B6/3508 ,  G02B6/3566 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3594 ,  G02B2006/12145

Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an MnullN optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a cantilever beam platform for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning the cantilever beam platform. In use the optical MEMS device may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

Abstract translation: 公开了一种光学微机电系统（MEMS）开关。 在优选实施例中，光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在悬臂梁平台上的多个光波导，用于切换光学状态，其中光开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 在使用中，光学MEMS器件可以与其他光学部件集成以形成平面光电路（PLC）。 当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重构光插座多路复用器（ROADM）。

公开(公告)号：US20030210115A1

公开(公告)日：2003-11-13

申请号：US10063762

申请日：2002-05-10

Applicant: XEROX CORPORATION

Inventor： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

IPC: H01H051/22

CPC classification number: G02B6/3508 ,  B81B3/0054 ,  B81B2201/032 ,  G02B6/3546 ,  G02B6/3568 ,  G02B6/3582 ,  G02B6/3596 ,  H01H2001/0042

Abstract: A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.

Abstract translation: 基于双稳态微机电系统（MEMS）的系统包括具有第一稳定状态的微加工梁，其中梁基本上无应力且具有特定的非线性形状和第二稳定状态。 弯曲形状可以包括简单曲线或复合曲线。 在实施例中，梁的边界条件是固定的边界条件，轴承边界条件，弹簧边界条件或其组合。 系统还可以包括致动器，其被布置成在第一和第二稳定状态之间移动梁，以及根据梁在第一和第二稳定状态之间的移动而在第一位置和第二位置之间移动的可动元件。 致动器可以包括热致动器，静电致动器，压电致动器和磁致动器中的一个。 致动器还可以包括热冲击致动器或拉链静电致动器。

公开(公告)号：US20020097303A1

公开(公告)日：2002-07-25

申请号：US09768676

申请日：2001-01-24

Applicant: Xerox Corporation

Inventor： Peter M. Gulvin ,  Elliott A. Eklund

IPC: B41J002/05

CPC classification number: H02N1/006 ,  B41J2/14314 ,  F04B43/043

Abstract: A micro-electromechanical fluid ejector including a substrate having an insulating layer thereon; a conductor formed on said insulating layer; a membrane adjacent to said conductor, said membrane having a corrugated, multi-layer structure for added rigidity; and an actuator chamber formed between said membrane and said conductor, said membrane flexing toward said conductor when a voltage bias is applied thereto.

Abstract translation: 一种微机电流体喷射器，包括其上具有绝缘层的基板; 形成在所述绝缘层上的导体; 与所述导体相邻的膜，所述膜具有波纹状多层结构，用于增加刚性; 以及形成在所述膜和所述导体之间的致动器室，当施加电压偏压时，所述膜朝着所述导体弯曲。