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公开(公告)号：WO2006104863A2
公开(公告)日：2006-10-05
申请号：PCT/US2006010682
申请日：2006-03-22
Applicant: TOKYO ELECTRON LTD , ISHIZAKA TADAHIRO , MATSUDA TSUKASA , CERIO JR FRANKM , YAMAMOTO KAORU
Inventor： ISHIZAKA TADAHIRO , MATSUDA TSUKASA , CERIO JR FRANKM , YAMAMOTO KAORU
IPC: C23C16/00
CPC classification number: C23C16/4409 , C23C16/4404 , C23C16/4412 , C23C16/45542 , C23C16/45544 , C23C16/5096
Abstract: A plasma enhanced atomic layer deposition (PEALD) system includes a first chamber component coupled to a second chamber component to provide a processing chamber defining an isolated processing space within the processing chamber. A substrate holder is provided within the processing chamber and configured to support a substrate, a first process material supply system is configured to supply a first process material to the processing chamber and a second process material supply system is configured to supply a second process material to the processing chamber. A power source is configured to couple electromagnetic power to the processing chamber, and a sealing assembly interposed between the first and second chamber components. The sealing assembly includes a plurality of sealing members configured to reduce the amount of external contaminants permeating through an interface of the first and second components into the isolated processing space of the processing chamber, wherein the film is formed on the substrate by altematingly introducing the first process material and the second process material.
Abstract translation: 等离子体增强原子层沉积（PEALD）系统包括耦合到第二室部件的第一室部件，以提供限定处理室内的隔离处理空间的处理室。 衬底保持器设置在处理室内并且被配置为支撑衬底，第一处理材料供应系统被配置为将第一处理材料供应到处理室，第二处理材料供应系统被配置为将第二处理材料供应到 处理室。 电源被配置为将电磁功率耦合到处理室，以及插入在第一和第二室部件之间的密封组件。 密封组件包括多个密封构件，其被配置为将渗透通过第一和第二部件的界面的外部污染物的量减少到处理室的隔离处理空间中，其中通过替代地将第一 工艺材料和第二工艺材料。
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公开(公告)号：WO2006104864A3
公开(公告)日：2007-08-09
申请号：PCT/US2006010685
申请日：2006-03-22
Applicant: TOKYO ELECTRON LTD , ISHIZAKA TADAHIRO , YAMAMOTO KAORU
Inventor： ISHIZAKA TADAHIRO , YAMAMOTO KAORU
IPC: C23C16/00
CPC classification number: C23C16/4409 , C23C16/4404 , C23C16/4412 , C23C16/45542 , C23C16/45544 , C23C16/5096
Abstract: A plasma enhanced atomic layer deposition (PEALD) system includes a processing chamber defining an isolated processing space within the processing chamber, and a substrate holder provided within the processing chamber and configured to support a substrate. A first process material supply system is configured to supply a first process material to the processing chamber, a second process material supply system is configured to supply a second process material to the processing chamber and a power source is configured to couple electromagnetic power to the processing chamber. A contaminant shield is positioned along a periphery of the substrate holder and configured to impede external contaminants that permeate the chamber from traveling to a region of the substrate holder, wherein the film is formed on the substrate by altematingly introducing the first process material and the second process material.
Abstract translation: 等离子体增强原子层沉积（PEALD）系统包括限定处理室内的隔离处理空间的处理室和设置在处理室内并被配置为支撑衬底的衬底保持器。 第一处理材料供应系统被配置为将第一处理材料供应到处理室，第二处理材料供应系统被配置为将第二处理材料供应到处理室，并且电源被配置为将电磁功率耦合到处理 室。 污染物屏蔽沿着衬底保持器的周边定位，并且构造成阻止渗透室的外部污染物移动到衬底保持器的区域，其中膜通过替代地引入第一工艺材料而形成在衬底上，而第二工艺材料 工艺材料。
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公开(公告)号：WO2006101857A3
公开(公告)日：2007-07-26
申请号：PCT/US2006009190
申请日：2006-03-15
Applicant: TOKYO ELECTRON LTD , ISHIZAKA TADAHIRO , YAMAMOTO KAORU
Inventor： ISHIZAKA TADAHIRO , YAMAMOTO KAORU
IPC: H01L21/44
CPC classification number: H01L21/28562 , C23C16/4554 , C23C16/45544 , C23C16/5096 , H01J2237/022 , H01L21/76843 , H01L21/76862
Abstract: A method for depositing a film on a substrate using a plasma enhanced atomic layer deposition (PEALD) process includes disposing the substrate in a process chamber configured to facilitate the PEALD process. A first process material is introduced within the process chamber, and a second process material is introduced within the process chamber. Electromagnetic power of more than 600W is coupled to the process chamber during introduction of the second process material in order to generate a plasma that accelerates a reduction reaction between the first and second process materials at a surface of the substrate. The film is formed on the substrate by alternatingly introducing the first process material and the second process material.
Abstract translation: 使用等离子体增强原子层沉积（PEALD）工艺在衬底上沉积膜的方法包括将衬底设置在配置为便于PEALD工艺的处理室中。 在处理室内引入第一处理材料，并且在处理室内引入第二处理材料。 超过600W的电磁功率在引入第二工艺材料期间耦合到处理室，以便产生加速基材表面处的第一和第二工艺材料之间的还原反应的等离子体。 通过交替地引入第一处理材料和第二处理材料，在基板上形成膜。
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公开(公告)号：WO2006104921A2
公开(公告)日：2006-10-05
申请号：PCT/US2006010870
申请日：2006-03-24
Applicant: TOKYO ELECTRON LTD , FAGUET JACQUES , CERIO FRANK M JR , MATSUDA TSUKASA , YAMAMOTO KAORU
Inventor： FAGUET JACQUES , CERIO FRANK M JR , MATSUDA TSUKASA , YAMAMOTO KAORU
CPC classification number: C23C16/45544 , C23C16/4401 , C23C16/4409 , C23C16/45542 , C23C16/5096 , H01J37/32477
Abstract: A plasma enhanced atomic layer deposition (PEALD) method and system, the system including a process chamber and a substrate holder provided within the processing chamber and configured to support a substrate on which a predetermined film will be formed. A first process material supply system is configured to supply a first process material to the process chamber, and a second process material supply system configured to supply a second process material to the process chamber in order to provide a reduction reaction with the first process material to form the predetermined film on the substrate. Also included is a power source configured to couple electromagnetic power to the process chamber to generate a plasma within the process chamber to facilitate the reduction reaction, and a chamber component exposed to the plasma and made from a film compatible material that is compatible with the predetermined film deposited on the substrate.
Abstract translation: 等离子体增强原子层沉积（PEALD）方法和系统，该系统包括设置在处理室内的处理室和衬底保持器，并被配置为支撑将在其上形成预定膜的衬底。 第一处理材料供应系统被配置为将第一处理材料供应到处理室，以及第二处理材料供应系统，其被配置为将第二处理材料供应到处理室，以便提供与第一处理材料的还原反应， 在基板上形成预定的膜。 还包括被配置为将电磁功率耦合到处理室以在处理室内产生等离子体以促进还原反应的电源，以及暴露于等离子体并由与薄膜相容的材料制成的室组件，其与预定的 膜沉积在基底上。
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公开(公告)号：JPH10325087A
公开(公告)日：1998-12-08
申请号：JP13507397
申请日：1997-05-26
Applicant: YAMAMOTO KAORU
Inventor： YAMAMOTO KAORU
Abstract: PROBLEM TO BE SOLVED: To enable to produce a printed product good in fastness, brilliance and touch at a low cost and in a short delivery date by fixing a color toner image to a thermal transfer sheet having at least two polyurethane resin coating layers by the using an electronic image-forming and outputting device with saving a process for making a printing plate, peeling the imaged layers from the thermal transfer sheet, placing the peeled imaged layers on an article to be printed, and subsequently heating and pressing the imaged layers with an iron, etc. SOLUTION: This method for producing a printed product comprises applying a silicone coating to the substrate 1 of a thermal transfer sheet, disposing at least a polyurethane resin layer 3 for fixing the color agents of an electronic image-outputting device and a polyurethane resin layer 2 strong in adhesivity and easy in the peeling from the substrate, on the coated surface, peeling the layers 2, 3 from the substrate 1 of the thermal transfer sheet, facing the peeled surface to an article 5 to be printed, placing silicone release paper, etc., on the combination and subsequently heating and pressing the combination with an iron, etc.
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Patent Agency Ranking6.发明专利
公开(公告)号：JPH10193885A
公开(公告)日：1998-07-28
申请号：JP516797
申请日：1997-01-16
Applicant: YAMAMOTO KAORU , FUKUI YASUTO
Inventor： YAMAMOTO KAORU
Abstract: PROBLEM TO BE SOLVED: To print clearly without yellowing and provide a good hand thereof by forming a surface layer fixed layer into which porous silicon powder or the like easily adsorbing wet toner is mixed, using vinyl resin to be sharp melted at the low melting point for an intermediate layer and using polyurethane resin or the like and also using polyethylene resin to be sharp melted at the high melting point. SOLUTION: A polyurethane resin layer 2 is formed on a base 1, on which an ethylene vinyl acetate layer 3 is formed. A vinyl resin layer 4 formed of vinyl resin mixed with silicon powder and quarternary ammonium is formed on the vinyl acetate layer 3. A transfer sheet thus formed is inserted into a wet toner image printer, and a wet toner image is fixed. A wet toner image surface is faced to a cotton cloth 6, heated and pressurized by an iron or the like, and the transfer sheet is released. Thus the fixing force applied on the cotton cloth 6 is different between wet toner sections 5 and other sections, and as a result, much of a bonded layer is transferred on wet toner 5, while the transfer of the bonded layer on the sections on which the wet toner 5 is not fixed is reduced.
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公开(公告)号：JPH1030599A
公开(公告)日：1998-02-03
申请号：JP18365696
申请日：1996-07-12
Applicant: YAMAMOTO KAORU , YAMAMOTO HIDEO , IWANO HARUJI
Inventor： YAMAMOTO KAORU , YAMAMOTO HIDEO , IWANO HARUJI
Abstract: PROBLEM TO BE SOLVED: To provide a pump which can restrain the degradation of filtering performance even if a large amount of inclusions gather and facilitate replacement of a filter or removal of the inclusions from the filter. SOLUTION: In this pump a motor 4 involving at an impeller 10 at a rotating shaft 9 is installed inside a case 1 involving fluid outflow openings 31 , 32 , a volute chamber 12 which stores the impeller 10, and a bulkhead 14 involving an inflow opening 11 at the middle part are fitted. An attached case 17 is jointed on the installation side of the bulkhead 14 of the case 1, and at its opening part, a covering member 21 where a fluid introduction cylindrical part 20 is protrudingly-formed in the inward direction of the attached case 17 is formed. A fluid sucking opening member 23 is fitted into the outward opening 22 of the cylindrical part 20, and a bag-shaped filter 25 is fitted at the inward end.
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公开(公告)号：JPH1111005A
公开(公告)日：1999-01-19
申请号：JP17003597
申请日：1997-06-26
Applicant: YAMAMOTO KAORU
Inventor： YAMAMOTO KAORU
Abstract: PROBLEM TO BE SOLVED: To provide a clearly printed article to be manufactured without passing through a printing plate manufacturing step by causing a liquid ink to be absorbed and fixed into the surface layer face of a heat-transfer sheet. SOLUTION: A mixed resin obtained by stirring a 0-80 μm powder copolymerized polyamide resin which reaches an adhesion temperature at 100-160 deg.C and a solution containing a mixture of polyvinyl alcohol with a low degree of saponification and a basic surfactant in a solution-like polyurethane resin is applied to a base material 1A on the surface layer of which a silicone coat with 10% of active component with the help of a silk screen coating machine. In addition, a white concealing sheet is manufactured by applying a thermoplastic polyurethane resin 3 in the thickness of 20 μm on a base material 1B on the surface layer face of which the silicone coat with 20% of active component, and further, applying a urethane white ink resin in the thickness of 5 μm on the polyurethane resin 3. Thus a heat-transfer sheet is manufactured by absorbing and fixing a liquid ink image into a transfer sheet with the help of a liquid ink-type electronic picture printing device, and then is fitted to the white concealing sheet. Thus it is possible to manufacture the printed article easily.
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公开(公告)号：JPH10136964A
公开(公告)日：1998-05-26
申请号：JP29682496
申请日：1996-11-08
Applicant: YAMAMOTO KAORU , YAMAMOTO HIDEO , IWANO HARUJI
Inventor： YAMAMOTO KAORU , YAMAMOTO HIDEO , IWANO HARUJI
Abstract: PROBLEM TO BE SOLVED: To provide a lighter-equipped cigarette case enabling to easily smoke a cigarette even with a single hand, little in a fear to wet the cigarette with water or snow, even when the cigarette case is exposed on the water or the snow, and not damaging the cigarette when the cigarette is taken out. SOLUTION: This cigarette case comprises a cartridge 2 and a cigarette case 1 comprising a lighter-attaching side case 12 and a cartridge-attaching side case 11 to which the cigarette-receiving cartridge 2 can freely be attached. The cartridge 2 is provided with a lid for opening or closing an opening for taking out a cigarette and with a taking member having a magnetic piece attached thereto, slidably attached in the cartridge and used for slidably taking out the cigarette from the opening for taking out the cigarette. The cartridge- attaching side case 11 is provided with an operation member 9 having a magnet piece and capable of vertically moving the taking member by the magnet piece attraction force of the magnet piece of the taking member. The case 12 is rotatably pivotally attached to one end of the case 11 , and is formed so as to close the opening of the case 11 , when superposed on the case 11 .
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公开(公告)号：JP2858111B2
公开(公告)日：1999-02-17
申请号：JP18365696
申请日：1996-07-12
Applicant: YAMAMOTO KAORU , YAMAMOTO HIDEO , IWANO HARUJI
Inventor： YAMAMOTO KAORU , YAMAMOTO HIDEO , IWANO HARUJI
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