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公开(公告)号:WO2008121845A3
公开(公告)日:2008-10-09
申请号:PCT/US2008/058705
申请日:2008-03-28
Applicant: THE UNIVERSITY OF UTAH RESEARCH FOUNDATION , BOUTTE, Ronald W. , SOLZBACHER, Florian , HARVEY, Ian R. , HORN, Justin A. , MEACHAM, Taylor M. , GASKIN, Nathaniel C. , BAKER, Brian W.
Inventor: BOUTTE, Ronald W. , SOLZBACHER, Florian , HARVEY, Ian R. , HORN, Justin A. , MEACHAM, Taylor M. , GASKIN, Nathaniel C. , BAKER, Brian W.
IPC: B81B7/02
Abstract: A microelectromechanical systems (MEMS) device includes a generally planar outer frame defining an inner structural portion; a plurality of first multi-angular elements (MAEs), each having a proximal portion and a distal portion, wherein the proximal portions are operably coupled to the outer frame, and wherein the plurality of first MAEs extend from the outer frame into the inner structural portion; and a plurality of second MAEs, each having a proximal portion and a distal portion, wherein the distal portions of the first and second MAEs are operably coupled to define an aperture. A microcamera includes a microautofocus system configured to focus light, and a microaperture configured to control a light passage. The microautofocus system employs a MEMS device to actuate a shape of a lends. A method of fabricating and operating the MEMS is also provided.
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公开(公告)号:WO2008131088A1
公开(公告)日:2008-10-30
申请号:PCT/US2008/060608
申请日:2008-04-17
Applicant: THE UNIVERSITY OF UTAH RESEARCH FOUNDATION , HARVEY, Ian R. , MEACHAM, Taylor M. , BOUTTE, Ronald W. , BAKER, Brian W. , HARVEY, Iain E.
Inventor: HARVEY, Ian R. , MEACHAM, Taylor M. , BOUTTE, Ronald W. , BAKER, Brian W. , HARVEY, Iain E.
CPC classification number: B81B3/0029 , B81B2201/038 , B81B2203/0118 , H01H59/0009
Abstract: A microelectromechanical system (MEMS) device includes an actuator having a plurality of charge collection elements. At least one of the charge collection elements is configured to build up electrical charges by directly interacting with an energy field thereby actuating the MEMS through Coulombic interactions. An actuator for a MEMS device is configured to actuate the MEMS device through Coulombic interactions by pumping charges to the actuator when subject to an energy field. A method of actuating a MEMS device includes irradiating an actuator of the MEMS device with an energy field thereby building up electrical charges on the actuator, and actuating the MEMS device with Coulomb forces from the built up electrical charges.
Abstract translation: 微机电系统(MEMS)装置包括具有多个电荷收集元件的致动器。 电荷收集元件中的至少一个被配置为通过与能量场直接相互作用来建立电荷,从而通过库仑相互作用来致动MEMS。 用于MEMS器件的致动器被配置为当经受能量场时将电荷泵送到致动器,通过库仑相互作用来致动MEMS器件。 致动MEMS器件的方法包括用能量场照射MEMS器件的致动器,从而在致动器上建立电荷,并且利用来自建立的电荷的库仑力来致动MEMS器件。
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公开(公告)号:WO2008121845A2
公开(公告)日:2008-10-09
申请号:PCT/US2008058705
申请日:2008-03-28
Applicant: UNIV UTAH RES FOUND , BOUTTE RONALD W , SOLZBACHER FLORIAN , HARVEY IAN R , HORN JUSTIN A , MEACHAM TAYLOR M , GASKIN NATHANIEL C , BAKER BRIAN W
Inventor: BOUTTE RONALD W , SOLZBACHER FLORIAN , HARVEY IAN R , HORN JUSTIN A , MEACHAM TAYLOR M , GASKIN NATHANIEL C , BAKER BRIAN W
IPC: B81B7/02
CPC classification number: B81B3/0051 , B81B2201/037
Abstract: A microelectromechanical systems (MEMS) device includes a generally planar outer frame defining an inner structural portion; a plurality of first multi-angular elements (MAEs), each having a proximal portion and a distal portion, wherein the proximal portions are operably coupled to the outer frame, and wherein the plurality of first MAEs extend from the outer frame into the inner structural portion; and a plurality of second MAEs, each having a proximal portion and a distal portion, wherein the distal portions of the first and second MAEs are operably coupled to define an aperture. A microcamera includes a microautofocus system configured to focus light, and a microaperture configured to control a light passage. The microautofocus system employs a MEMS device to actuate a shape of a lends. A method of fabricating and operating the MEMS is also provided.
Abstract translation: 微机电系统(MEMS)装置包括限定内部结构部分的大致平坦的外部框架; 多个第一多角形元件(MAE),每个具有近侧部分和远侧部分,其中所述近侧部分可操作地联接到所述外框架,并且其中所述多个第一MAE从所述外框架延伸到所述内部结构 一部分; 以及多个第二MAE,每个第二MAE具有近端部分和远端部分,其中第一和第二MAE的远端部分可操作地连接以限定孔。 微摄像机包括被配置为聚焦光的微自动聚焦系统和被配置为控制光通道的微孔。 微自动聚焦系统采用MEMS器件来驱动借贷的形状。 还提供了制造和操作MEMS的方法。
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