公开(公告)号：US20160379802A1

公开(公告)日：2016-12-29

申请号：US15161432

申请日：2016-05-23

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sejin OH ,  Dougyong SUNG ,  Kiho HWANG ,  Yun-Kwang JEON

IPC: H01J37/32 ,  G01J1/04 ,  G01J1/42 ,  C23C16/50 ,  C23C16/52

CPC classification number: G01J1/0407 ,  C23C16/50 ,  C23C16/52 ,  G01J1/0295 ,  G01J1/0422 ,  G01J1/0492 ,  G01J1/10 ,  G01J1/22 ,  G01J1/26 ,  G01J1/429 ,  G01J2001/242 ,  H01J37/32935 ,  H01J37/32972 ,  H01J37/3299

Abstract: An apparatus for monitoring vacuum ultraviolet, the apparatus including a light controller including a slit, the slit to transmit plasma emission light emitted from a process chamber in which a plasma process is performed on a substrate; a light selector adjacent to the light controller, the light selector selectively to transmit light, having a predetermined wavelength band, of the plasma emission light passing through the slit; a light collector to concentrate the light selectively transmitted by the light selector; and a detector to detect the light concentrated by the light collector, the light selectively transmitted by the light selector being vacuum ultraviolet.

Abstract translation: 一种用于监测真空紫外线的装置，该装置包括具有狭缝的光控制器，该狭缝用于传输从其中在基板上执行等离子体处理的处理室发射的等离子体发射光; 与所述光控制器相邻的光选择器，所述光选择器选择性地透射通过所述狭缝的等离子体发射光的具有预定波长带的光; 集光器，用于集中由选择器选择性地传输的光; 以及检测器，用于检测由光收集器集中的光，由选择器选择性地透射的光是真空紫外线。

公开(公告)号：US5260772A

公开(公告)日：1993-11-09

申请号：US382191

申请日：1989-07-20

Applicant: Fred H. Pollak ,  Hong-En Shen

Inventor： Fred H. Pollak ,  Hong-En Shen

IPC: G01J1/24 ,  G01N21/17 ,  G01N21/25 ,  G01N21/55 ,  G01N21/84

CPC classification number: G01N21/1717 ,  G01N21/255 ,  G01J2001/242 ,  G01N2021/1719 ,  G01N2021/1725 ,  G01N2021/8461 ,  G01N21/55 ,  G01N2201/0695

Abstract: A method and apparatus for determining the characteristics of materials, particularly of semi-conductors, semi-conductor heterostructures and semi-conductor interfaces by the use of photoreflectance, in which monochromatic light and modulated light beam reflected from the sample is detected to produce a d.c. signal and an a.c. signal, whereby the d.c. signal is applied to one input of a computer and the a.c. signal is used with another input of the computer which controls the light intensity of the monochromatic light impinging on the sample to maintain the d.c. signal substantially constant. A stepping motor is preferably utilized for varying the light intensity of the monochromatic light. Additionally, the modulation frequency of the modulated beam and/or the wavelength of the monochromatic light can also be varied by the computer. Growth conditions of semi-conductor materials as well as information about trap times can be obtained by analyzing the energy band gaps and determining the dependence of the in-phase photoreflectance signal on the pump modulating frequency, respectively.

Abstract translation: 一种用于通过使用光反射率确定材料特别是半导体，半导体异质结构和半导体界面的特性的方法和装置，其中检测从样品反射的单色光和调制光束产生直流。 信号和a.c. 信号，由此直流。 信号被应用于计算机的一个输入端和等 信号与计算机的另一个输入端一起使用，该输入端控制着入射在样品上的单色光的光强度，以保持直流。 信号基本上恒定。 步进电机最好用于改变单色光的光强度。 此外，调制光束的调制频率和/或单色光的波长也可以由计算机改变。 半导体材料的生长条件以及关于陷阱时间的信息可以通过分析能带隙并分别确定同相光反射信号对泵调制频率的依赖性来获得。

公开(公告)号：US5270797A

公开(公告)日：1993-12-14

申请号：US408903

申请日：1989-09-13

Applicant: Fred H. Pollak ,  Hong-En Shen

Inventor： Fred H. Pollak ,  Hong-En Shen

IPC: G01J1/24 ,  G01N21/17 ,  G01N21/55 ,  G01N21/84 ,  H01L21/66 ,  G01N21/25

CPC classification number: G01N21/1717 ,  G01J2001/242 ,  G01N2021/1719 ,  G01N2021/1725 ,  G01N2021/8461 ,  G01N21/55 ,  G01N2201/0695

Abstract: A method and apparatus for determining the characteristics of materials, particularly of semiconductors, semiconductor heterostructures and semiconductor interfaces by the use of photoreflectance, in which monochromatic light and modulated light beam reflected from the sample is detected to produce a d.c. signal and an a.c. signal, whereby the d.c. signal is applied to one input of a computer and the a.c. signal is used with another input of the computer which controls the light intensity of the monochromatic light impinging on the sample to maintain the d.c. signal substantially constant. A stepping motor is preferably utilized for varying the light intensity of the monochromatic light which is controlled by a computer to re-establish rapidly a predetermined d.c. signal established during normalization procedures when the light intensity of the monochromatic light changes, especially during change of its wavelength. Additionally, the modulation frequency of the modulated beam and/or the wavelength of the monochromatic light can also be varied by the computer.

公开(公告)号：US4737029A

公开(公告)日：1988-04-12

申请号：US856579

申请日：1986-04-25

Applicant: Kenji Yabusaki ,  Hitoshi Tozawa ,  Akira Noda ,  Takashi Ito

Inventor： Kenji Yabusaki ,  Hitoshi Tozawa ,  Akira Noda ,  Takashi Ito

IPC: G01J1/08 ,  G01J1/24 ,  G01J1/42 ,  G01J1/44

CPC classification number: G01J1/02 ,  G01J1/0228 ,  G01J1/04 ,  G01J1/0414 ,  G01J1/0418 ,  G01J1/0466 ,  G01J1/08 ,  G01J2001/086 ,  G01J2001/242

Abstract: A photometer is providing including light detecting means for detecting incident light and generating electric signals in response thereto as a measure of the incident light thereon, and optical means for guiding light to the light detecting means from a standard light source in a calibration mode and from an object, a photometric quantity of which is to be measured, in a measurement mode. Control means are adapted to generate calibration control signals for carrying out a calibration mode wherein a photometric quantity value Dstd of the standard light source and a measured value Rstd corresponding to the intensity of the standard light source detected by the light detecting means are stored in a memory, and light measurement control signals for carrying out a measurement mode wherein a photometric quantity value Rm corresponding to the photometric quantity of the object measured by the light detecting means is also stored in memory such that a CPU or similar computing means can communicate with the memory and compute a photometric quantity value R of the object according to the formulaR=Rm.times.(Dstd/Rstd).

Abstract translation: 提供了一种光度计，其包括用于检测入射光并响应于其产生电信号的光检测装置作为其上的入射光的量度;以及光学装置，用于以标准模式从标准光源引导光到光检测装置， 在测量模式中要测量的物体，其光度量。 控制装置适于产生用于执行校准模式的校准控制信号，其中标准光源的光度值Dstd和由光检测装置检测到的标准光源的强度对应的测量值Rstd存储在 存储器和光测量控制信号，用于执行测量模式，其中与由光检测装置测量的对象的光度相对应的光度值Rm也存储在存储器中，使得CPU或类似计算装置可以与 存储并根据公式R = Rmx（Dstd / Rstd）计算对象的测光量值R.

公开(公告)号：US20160290866A1

公开(公告)日：2016-10-06

申请号：US15085520

申请日：2016-03-30

Applicant: DeNovix, Inc.

Inventor： Fernando F. Kielhorn ,  David B. Ward ,  David L. Ash

IPC: G01J3/44 ,  G01N21/25 ,  G01N21/64

CPC classification number: G01J3/4406 ,  G01J3/0202 ,  G01J3/10 ,  G01J2001/242 ,  G01J2003/104 ,  G01J2003/106 ,  G01J2003/1213 ,  G01J2003/1221 ,  G01N21/255 ,  G01N21/645 ,  G01N2021/6419 ,  G01N2201/062

Abstract: An apparatus and method for measuring fluorescence of a sample is described. An apparatus includes three or more fluorescence channels passing through a sample site. The three or more fluorescence channels allow for exposing a sample at the sample site to light from three or more light sources, which results in fluorescence measurements based on emissions from the sample in response to the three or more light sources.

Abstract translation: 描述了用于测量样品的荧光的装置和方法。 一种装置包括通过样品位点的三个或更多个荧光通道。 三个或更多个荧光通道允许将样品位点处的样品暴露于来自三个或更多个光源的光，这导致基于来自样品的响应于三个或更多个光源的发射的荧光测量。

公开(公告)号：US5159410A

公开(公告)日：1992-10-27

申请号：US563094

申请日：1990-08-03

Applicant: Fred H. Pollak ,  J. M. Woodall ,  P. A. Montano

Inventor： Fred H. Pollak ,  J. M. Woodall ,  P. A. Montano

IPC: G01J1/24 ,  G01N21/17 ,  G01N21/25 ,  G01N21/55 ,  G01N21/84

CPC classification number: G01N21/255 ,  G01N21/1717 ,  G01J2001/242 ,  G01N2021/1719 ,  G01N2021/1725 ,  G01N2021/8461 ,  G01N21/55 ,  G01N2201/0695

Abstract: A method for in-situ determination by photoreflectance of the Fermi level (V.sub.F) at the surfaces or interfaces of GaAs and related materials, in which a probe beam of monochromatic light and a modulated pump beam from a pump source are directed onto a sample, and the measured barrier height V.sub.m =V.sub.F -V.sub.S is obtained from the information in the reflected light, where V.sub.S represents the surface voltage effects on the sample by the photoreflectance, whereby V.sub.m approaches V.sub.F as V.sub.S approaches zero during repeated tests in which a parameter such as temperature affecting the numerical value of V.sub.S is changed until there is flattening of the curve illlustrating V.sub.m as a function of the parameter.

Abstract translation: 用于通过GaAs和相关材料的表面或界面处的费米能级（VF）的光反射原位测定的方法，其中单色光的探测光束和来自泵浦源的调制的泵浦光束被引导到样品上， 并且从反射光中的信息获得测量的势垒高度Vm = VF-VS，其中VS表示通过光反射率对样品的表面电压影响，由此在反复测试期间，Vm接近VF，其中参数 随着影响VS数值的温度的变化，直到曲线的平坦化显示Vm为参数的函数为止。

公开(公告)号：EP0409271A3

公开(公告)日：1991-07-03

申请号：EP90113969.1

申请日：1990-07-20

Applicant: Pollak, Fred H. ,  Shen, Hong-En

Inventor： Pollak, Fred H. ,  Shen, Hong-En

IPC: G01N21/55 ,  G01N21/17

CPC classification number: G01N21/1717 ,  G01J2001/242 ,  G01N21/55 ,  G01N2021/1719 ,  G01N2021/1725 ,  G01N2021/8461 ,  G01N2201/0695

Abstract: A method and apparatus for determining the charac­teristics of materials, particularly of semiconductors, semi­conductor heterostructures and semiconductor interfaces by the use of photoreflectance, in which monochromatic light and modulated light beam reflected from the sample (62) is detec­ted to produce a d.c. signal and an a.c. signal, whereby the d.c. signal is applied to one input of a computer (70) and the a.c. signal is used with another input of the computer (70) which controls the light intensity of the monochromatic light impinging on the sample (62) to maintain the d.c. signal sub­stantially constant. A stepping motor (53) is preferably utilized for varying the light intensity of the monochromatic light which is controlled by a computer (70) to re-establish rapidly a predetermined d.c. signal established during normal­ization procedures when the light intensity of the monochrom­atic light changes, especially during change of its wave­length. Additionally, the modulation frequency of the modul­ated beam and/or the wavelength of the monochromatic light can also be varied by the computer (70).

公开(公告)号：EP0409271A2

公开(公告)日：1991-01-23

申请号：EP90113969.1

申请日：1990-07-20

Applicant: Pollak, Fred H. ,  Shen, Hong-En

Inventor： Pollak, Fred H. ,  Shen, Hong-En

IPC: G01N21/55 ,  G01N21/17

CPC classification number: G01N21/1717 ,  G01J2001/242 ,  G01N21/55 ,  G01N2021/1719 ,  G01N2021/1725 ,  G01N2021/8461 ,  G01N2201/0695

Abstract: A method and apparatus for determining the charac­teristics of materials, particularly of semiconductors, semi­conductor heterostructures and semiconductor interfaces by the use of photoreflectance, in which monochromatic light and modulated light beam reflected from the sample (62) is detec­ted to produce a d.c. signal and an a.c. signal, whereby the d.c. signal is applied to one input of a computer (70) and the a.c. signal is used with another input of the computer (70) which controls the light intensity of the monochromatic light impinging on the sample (62) to maintain the d.c. signal sub­stantially constant. A stepping motor (53) is preferably utilized for varying the light intensity of the monochromatic light which is controlled by a computer (70) to re-establish rapidly a predetermined d.c. signal established during normal­ization procedures when the light intensity of the monochrom­atic light changes, especially during change of its wave­length. Additionally, the modulation frequency of the modul­ated beam and/or the wavelength of the monochromatic light can also be varied by the computer (70).

Abstract translation: 检测到一个用于确定性采矿方法和装置的材料特性特别是半导体，半导体异质结构和半导体界面通过使用光反射的，其中单色光和调制的光束从所述样品（62）反射，以产生一个直流 信号和交流 信号，由此所述直流 信号被施加到一台计算机的一个输入端（70）和所述交流 信号与所述计算机（70），其控制所述单色光照射在样品（62）的光强度的另一个输入端用于保持直流 大致恒定信号。 步进电机（53）优选地用于由计算机（70）改变所述单色光的光强度所有这一切都被控制以重新建立快速预定直流 期间归一化程序信号时建立的单色光的变化的光强度，其波长的变化期间爱更是如此。 另外，调制的束和/或单色的光的波长的调制频率因此可以由计算机（70）改变。

公开(公告)号：KR1020010001673A

公开(公告)日：2001-01-05

申请号：KR1019990021045

申请日：1999-06-02

Applicant: 이방현

Inventor： 이방현

IPC: G01J1/22

CPC classification number: G01J1/24 ,  G01J1/0403 ,  G01J2001/242 ,  G02B6/29389

Abstract: PURPOSE: A human body sensing device is provided to apparently distinguish a human from an animal by sensing a moving object in a wide and distant range, thereby preventing waste of electricity or manpower in advance. CONSTITUTION: A human body sensing device includes a condensing lens(1) for condensing thermal infrared of human or animal, a filter(2) for filtering wavelength of the collected thermal infrared, a sensor(3) for generating a signal by infrared energy, a low pass filter(4) for removing high frequency noise from a detected signal, an amplifier(5) for amplifying the signal, a microcomputer(8) for setting a sampling time for sampling/holding the signal passed through the amplifier, setting a threshold value with relation to a change of thermal energy distribution according to atmospheric temperature and generating an output signal when a TTL pulse exceeds a predetermined coefficient, an A/D converter(7), a differentiator(9) for generating a positive pulse when an input analogue signal value exceeds a predetermined value, and a TTL pulse converter(10) for converting the positive pulse to a TTL level pulse, wherein a human body and an animal are distinguished by sensing thermal infrared of a moving object and the output is generated only when the distinguished object is a human.

Abstract translation: 目的：提供一种人体感测装置，通过感测广泛而遥远的范围内的运动物体来明显区分人与动物，从而预防电力或人力浪费。 构成：人体感测装置包括用于冷凝人体或动物的热红外线的聚光透镜（1），用于滤波所收集的热红外波长的滤光器（2），用于通过红外能产生信号的传感器（3） 用于从检测信号中去除高频噪声的低通滤波器（4），用于放大信号的放大器（5）;微机（8），用于设置采样/保持通过放大器的信号的采样时间， 相对于根据大气温度的热能分布的变化而产生的阈值，并且当TTL脉冲超过预定系数时产生输出信号; A / D转换器（7），用于当正脉冲产生正脉冲时的微分器（9） 输入模拟信号值超过预定值，以及用于将正脉冲转换为TTL电平脉冲的TTL脉冲转换器（10），其中通过感测人体和动物的热红外 移动对象并且只有在辨别的对象是人类时才产生输出。