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    Triple spectral area pyrometer
    6.
    发明授权
    Triple spectral area pyrometer 失效
    三光谱区高温计

    公开(公告)号：US5125739A

    公开(公告)日：1992-06-30

    申请号：US640758

    申请日：1991-01-14

    Applicant: Ernesto Suarez-Gonzalez ,  Raymond L. Oqlukian

    Inventor： Ernesto Suarez-Gonzalez ,  Raymond L. Oqlukian

    IPC: G01J5/00 ,  G01J5/60

    CPC classification number: G01J5/60 ,  G01J2005/0059 ,  G01J5/026

    Abstract: An optical pyrometer for use with jet engines is characterized by the use of three spectral areas or bands in a temperature computation. A target temperature is optically distinguished from background radiation by dividing a received optical beam into three spectral components which are comprised of emitted and reflected radiation. A controller computes the measured power in each band as a function of the emitted power by the target and a ratio of reflected power in adjacent bands to yield signals of reflection corrected radiation. These are used with the reflected power ratios to determine values of temperature in adjacent bands. The difference between these computed temperatures is iteratively adjusted until the difference therebetween is approximately equal to a preselected value.

    Abstract translation: 用于喷气发动机的光学高温计的特征在于在温度计算中使用三个光谱区域或带。 通过将接收到的光束分成由发射和反射的辐射组成的三个光谱分量，目标温度与背景辐射在光学上是不同的。 控制器根据目标的发射功率和相邻频带中的反射功率的比率来计算每个频带中的测量功率，以产生反射校正辐射的信号。 这些与反射功率比一起使用以确定相邻带中的温度值。 迭代地调整这些计算温度之间的差异，直到它们之间的差值近似等于预选值。

    DEVICE FOR MEASURING HEAT RADIATION OF OBJECT TO BE MEASURED, METHOD FOR MEASURING HEAT RADIATION OF OBJECT TO BE MEASURED, AND CELL FOR MEASURING HEAT RADIATION
    7.
    发明申请
    DEVICE FOR MEASURING HEAT RADIATION OF OBJECT TO BE MEASURED, METHOD FOR MEASURING HEAT RADIATION OF OBJECT TO BE MEASURED, AND CELL FOR MEASURING HEAT RADIATION 有权
    用于测量要测量的物体的热辐射的装置，用于测量待测物体的热辐射的方法，以及用于测量加热辐射的电池

    公开(公告)号：US20150014540A1

    公开(公告)日：2015-01-15

    申请号：US14380167

    申请日：2013-02-20

    Applicant: TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY

    Inventor： Kenji Ikushima

    IPC: G01J5/08 ,  G01N21/03 ,  G01N1/28

    CPC classification number: G01J5/0806 ,  G01J5/0037 ,  G01J5/0205 ,  G01J5/0275 ,  G01J5/06 ,  G01J2005/0059 ,  G01J2005/0077 ,  G01J2005/0081 ,  G01N1/286 ,  G01N21/03 ,  G01N2001/2873 ,  G01N2201/068 ,  G02B13/14 ,  G02B13/24

    Abstract: An apparatus 100 for measuring thermal radiation in one mode of the present invention is used for detecting thermal radiation of an object 12 to be measured. The apparatus 100 is provided with: a sample cell 10 which includes the object 12 to be measured which is a liquid or an object containing liquid, and a housing part which houses the object 12 to be measured and includes one wall formed of a base 16 transmitting a wavelength of the thermal radiation; a first lens 20 formed by partially cutting a sphere so that a cross section forms a plane, wherein the sample cell 10 is arranged so that, when the base 16 is in close contact with the plane of the first lens 20, focus of a second lens is placed on at least a part of the object 12 to be measured, for example, located on the base 16, the second lens including the first lens 20 and the base 16 and used for detecting the thermal radiation through the first lens 20; a position controller 60 which controls one of the object 12 to be measured and the first lens 20 so as to be able to abut on and separate from the other in an optical axis direction; a vibrational controller 40 which allows one of the object to be measured and the first lens to vibrate with respect to the other and controls a frequency of the vibration; and a detector 70 which detects the thermal radiation through the first lens 20.

    Abstract translation: 用于测量本发明的一种模式的热辐射的装置100用于检测待测物体12的热辐射。 装置100设置有：样品池10，其包括被测量物体12，其为液体或含有液体的物体;容纳部，其容纳被测量物体12，并且包括由基部16形成的一个壁 透射所述热辐射的波长; 通过部分地切割球体使得横截面形成平面而形成的第一透镜20，其中样品池10被布置成使得当基底16与第一透镜20的平面紧密接触时，第二透镜 透镜被放置在要被测量的物体12的至少一部分上，例如位于基座16上，第二透镜包括第一透镜20和基座16，并用于检测通过第一透镜20的热辐射; 位置控制器60，其控制要测量的对象12中的一个和第一透镜20，以便能够在光轴方向上彼此抵接并分离; 振动控制器40，其允许要测量的对象中的一个和第一透镜相对于另一个振动并控制振动的频率; 以及检测器70，其检测通过第一透镜20的热辐射。

    Method for repeatable temperature measurement using surface reflectivity
    8.
    再颁专利
    Method for repeatable temperature measurement using surface reflectivity 失效
    使用表面反射率进行可重复温度测量的方法

    公开(公告)号：USRE36050E

    公开(公告)日：1999-01-19

    申请号：US722360

    申请日：1996-09-27

    Applicant: Randhir P. S. Thakur ,  Gurtej S. Sandhu ,  Annette L. Martin

    Inventor： Randhir P. S. Thakur ,  Gurtej S. Sandhu ,  Annette L. Martin

    IPC: G01J5/00 ,  G01J5/04 ,  G01K11/14 ,  G01J5/54

    CPC classification number: G01J5/0003 ,  G01J5/0007 ,  G01J5/041 ,  G01K11/14 ,  G01J2005/0059

    Abstract: A method is disclosed for continuously measuring the temperature of a semiconductor substrate in a chamber is disclosed. The first step of the method involves providing a substantially clean semiconductor substrate having a layer a reflective surface thereon into a chamber. A film is formed superjacent the surface by introducing a gas comprising at least one of N.sub.2, NH.sub.3, O.sub.2, N.sub.2 O, Ar, Ar--H.sub.2, H.sub.2, GeH.sub.4, or any fluorine based gas and photon energy in situ. The photon energy, having a wavelength substantially in the absorption band of silicon, generates a temperature substantially within the range of 500.degree. C. to 1250.degree. C. Subsequently, the reflectivity of the surface is measured prior to introducing the gas, and continuously, while forming the film until the film is substantially formed. The substrate is exposed to photon energy having a power level responsive to the measured reflectivities of the film.

    Abstract translation: 公开了一种连续测量室内半导体衬底的温度的方法。 该方法的第一步包括提供基本上干净的半导体衬底，其具有在其上的反射表面的层到腔室中。 通过引入包含N 2，NH 3，O 2，N 2 O，Ar，Ar-H 2，H 2，GeH 4或任何基于氟的气体中的至少一种的气体和原位的光子能量，在该表面之上形成膜。 具有基本上在硅的吸收带中的波长的光子能量产生基本上在500℃至1250℃范围内的温度。随后，在引入气体之前测量表面的反射率，并且连续地， 同时形成膜直到膜基本形成。 将基板暴露于具有响应于所测量的膜的反射率的功率电平的光子能量。

    Reflection corrected radiosity optical pyrometer
    10.
    发明授权
    Reflection corrected radiosity optical pyrometer 失效
    反射校正辐射度光学高温计

    公开(公告)号：US4708474A

    公开(公告)日：1987-11-24

    申请号：US798212

    申请日：1985-11-14

    Applicant: Ernesto Suarez-Gonzalez

    Inventor： Ernesto Suarez-Gonzalez

    IPC: G01J5/10 ,  G01J5/00 ,  G01J5/08 ,  G01J5/60

    CPC classification number: G01J5/60 ,  G01J2005/0059 ,  G01J2005/604 ,  G01J2005/607

    Abstract: A reflection corrected radiosity optical pyrometer includes an optical guide for receiving a target optical beam from a turbine blade in a jet engine. The target optical beam is provided to a detector module that divides the target optical beam into two beams, one having a spectral width selected to be less than the target optical beam spectral width. A signal processor receives signals from the detector module indicative of the energy of the two beams, calculates a reflection corrected energy signal directly therefrom and provides a correct target temperature signal.

    Abstract translation: 反射校正辐射度光学高温计包括用于从喷气发动机中的涡轮机叶片接收目标光束的光导。 将目标光束提供给检测器模块，该检测器模块将目标光束分成两束，其中光束宽度被选择为小于目标光束光谱宽度。 信号处理器从检测器模块接收指示两个光束的能量的信号，直接从其计算反射校​​正的能量信号并提供正确的目标温度信号。

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