公开(公告)号：WO1997022858A1

公开(公告)日：1997-06-26

申请号：PCT/US1996020065

申请日：1996-12-18

Applicant: COGNEX CORPORATION

Inventor： COGNEX CORPORATION ,  MICHAEL, David ,  WALLACK, Aaron

IPC: G01J01/02

CPC classification number: G03F7/706 ,  G01B11/002 ,  G01B11/245 ,  G01N21/8806 ,  G03F9/70

Abstract: An article of manufacture is provided both for coordinating multiple fiels of view of a plurality of cameras (18, 20, 22) so as to facilitate determining the distance between features on a semiconductor wafer, each feature being disposed within a different field of view, and for correcting image distortion within each field of view. The article of the invention includes a substantially rigid dimensionally-stable substrate (10), such as a plate, having a plurality of image distorsion calibration targets (12, 14, 16) that are each located at a known relative position. In a preferred embodiment, each calibration target is disposed at an orientation angle such that a first principle axis of the calibration target is perpendicular to a tangent to the perimeter of the semiconductor wafer. In the embodiment, the substrate includes physical alignment features that facilitate coordination of the multi-camera coordinate system of the article of the invention with the coordinate system of a semiconductor manufacturing machine.

Abstract translation: 提供制造物品用于协调多个照相机（18,20,22）的多个视野，以便于确定半导体晶片上的特征之间的距离，每个特征被布置在不同的视场内， 并且用于在每个视场内校正图像失真。 本发明的制品包括具有多个图像变形校准目标（12,14,16）的基本上刚性的尺寸稳定的基板（10），例如板，所述多个图像变形校准目标（12,14,16）各自位于已知的相对位置。 在优选实施例中，每个校准目标被设置成使得校准目标的第一主轴垂直于半导体晶片的周边的切线的取向角。 在该实施例中，基板包括便于将本发明的制品的多摄像机坐标系与半导体制造机的坐标系配合的物理对准特征。

公开(公告)号：WO1999031471A1

公开(公告)日：1999-06-24

申请号：PCT/JP1997004676

申请日：1997-12-18

Applicant: MITSUBISHI DENKI KABUSHIKI KAISHA ,  KIMATA, Masafumi

Inventor： MITSUBISHI DENKI KABUSHIKI KAISHA

IPC: G01J01/02

CPC classification number: G01J5/20 ,  G01J5/34

Abstract: An infrared solid state image sensing device is characterized by an infrared absorbing section (400) which is formed corresponding to each of pixels arrayed in a two-dimensional manner and adapted for absorbing and transducing incident infrared rays into heat, a temperature detector section (300) arranged on a semiconductor substrate (1) corresponding to each of pixel arrays constituted by a plurality of serially connected silicon pn junction diodes which are biased in a forward direction, a cavity section (200) formed in each region on the semiconductor substrate (1) where the temperature detector section (300) is formed, a supporting mechanism (supporting legs 21, 22) constituted with a material of high thermal resistivity for supporting the temperature detector section on the semiconductor substrate above the cavity section, and a junction column (140) for holding the infrared absorbing section (400) away from the temperature detector section (300) and for thermally coupling the infrared absorbing section (400) and the temperature detector section (300). Thus, all manufacturing processes except for removal of a sacrifice layer may be carried out on a silicon VLSI process line, and no active element except for the silicon pn junction diodes for the temperature detector is necessary in the pixel portion. Therefore, an inexpensive infrared image sensing device having improved productivity and high uniformity may be stably manufactured.

Abstract translation: 红外固体摄像装置的特征在于：红外线吸收部（400），其对应于以二维方式排列的每个像素形成，适于吸收和转换入射的红外线进入热量;温度检测部（300） ）配置在与由向前方偏压的多个串联连接的硅pn结二极管构成的像素阵列对应的半导体基板（1）上，形成在半导体基板（1）的各区域的空腔部（200） ），其中形成有温度检测器部分（300）的支撑机构（支撑腿部21,22）由用于支撑在腔部分上方的半导体衬底上的温度检测器部分的高热阻材料构成，以及接合柱 140），用于将红外线吸收部分（400）保持远离温度检测器部分（300）并用于热耦合 拉伸吸收部（400）和温度检测部（300）。 因此，除了牺牲层之外的所有制造工艺可以在硅VLSI工艺线上进行，并且在像素部分中不需要用于温度检测器的硅pn结二极管的有源元件。 因此，可以稳定地制造具有提高的生产率和高均匀性的廉价的红外图像感测装置。

公开(公告)号：WO1996035930A1

公开(公告)日：1996-11-14

申请号：PCT/JP1996001208

申请日：1996-05-07

Applicant: JAPAN ENERGY CORPORATION ,  NAYA, Kazunari

Inventor： JAPAN ENERGY CORPORATION

IPC: G01J01/02

CPC classification number: G01J5/62 ,  G01J5/0014 ,  G08B17/12

Abstract: A disc having a plurality of radial slits of a width substantially equal to the photosensitive diameter of a sensor and a rotary chopper are rotatably disposed on the same axis, and the disc and the chopper are rotated at their respective speeds so that an infrared beam passing through a slit opposed to a sensor may be interrupted (2 to 16) times by the chopper. Two or more sets of infrared sensors for different wavelength bands are disposed radially behind the chopper and the disc, and a zone to be monitored is scanned in X and Y directions to obtain detection signals. In this way, it becomes easy to recognize at which position inside the field of view fire occurs, and even when the fires occur at a plurality of positions, they can be detected discriminatingly.

Abstract translation: 具有大致等于传感器和旋转斩波器的感光直径的多个径向狭缝的盘被可旋转地设置在同一轴线上，并且盘和斩波器以它们各自的速度旋转，使得红外光束通过 通过与传感器相对的狭缝可能被斩波器中断（2至16次）。 用于不同波长带的两组或更多套红外传感器径向设置在斩波器和盘之后，并且在X和Y方向上扫描待监视的区域以获得检测信号。 以这种方式，可以容易地识别在视野内的哪个位置发生火灾，并且即使当在多个位置发生火焰时，也可以区分地检测它们。

公开(公告)号：WO1993006444A1

公开(公告)日：1993-04-01

申请号：PCT/JP1992001211

申请日：1992-09-24

Applicant: NOHMI BOSAI LTD. ,  INOUE, Masao

Inventor： NOHMI BOSAI LTD.

IPC: G01J01/02

CPC classification number: G01J5/34

Abstract: A pyroelectric body (11) which senses infrared rays is contained in a case consisting of a can (4) and a stem (5) both made of an alloy having a composition of 55 % Fe, 28 % Ni and 17 % Co. A filter (2) for closing a window (1) which is provided so as to introduce infrared rays into the interior of the case is fixed to the periphery of the window with a fusion material (3) such as silver solder. On the upper and lower surfaces of the pyroelectric body formed are an electrode for absorbing infrared rays and an electrode for leading out an electric signal representing the detection of infrared rays to a conductive bonding agent. The absorption electrode is a thin layer of an infrared ray absorbing material; the take-out electrode is of the same material, or of a corrosion-resisting material, and is a layer thicker than that of the absorption electrode. Terminal pins (6, 7, 8) extending from the interior to the exterior of the case so as to take an electric signal representing the detection of infrared rays to the outside are provided with flat collars (17) projecting radially in the vicinity of the inner ends of the pins. A printed board (15) used to process the electric signal in the interior of the case is supported stably and in parallel with the collars.

Abstract translation: 在由具有55％Fe，28％Ni和17％Co.的组成的合金制成的罐（4）和阀杆（5）的情况下，包含感测红外线的热电体（11） 用于封闭用于将红外线引入到壳体内部的窗口（1）的过滤器（2）用诸如银焊料的熔融材料（3）固定到窗户的周边。 在形成的热电体的上表面和下表面是用于吸收红外线的电极和用于将表示红外线检测的电信号导出到导电粘合剂的电极。 吸收电极是红外线吸收材料的薄层; 取出电极具有相同的材料或耐腐蚀材料，并且是比吸收电极厚的层。 从壳体的内部向外部延伸以便将表示红外线检测的电信号传送到外部的端子销（6,7,8）设置有在其附近径向突出的平坦的凸缘（17） 销的内端。 用于处理壳体内部的电信号的印刷电路板（15）稳定地并且与套环平行地支撑。

公开(公告)号：WO1994017377A1

公开(公告)日：1994-08-04

申请号：PCT/JP1994000126

申请日：1994-01-28

Applicant: NIPPON CERAMIC CO., LTD. ,  TANIGUCHI, Yoshiharu

Inventor： NIPPON CERAMIC CO., LTD.

IPC: G01J01/02

CPC classification number: G08B13/193 ,  Y10S250/01

Abstract: This detector comprises an infrared detector (PE) which is arranged on a plane, and has at least one light receiving surface; a group of slit type light converging members (LR and LD) for converging infrared rays, which are so arranged on the plane as to surround the infrared detector; means of a primary reflection mirror (M1 or M1') which primarily reflects infrared rays (B) having entered the inside through the light converging members; and means of secondary reflection mirrors (M2) each having a reflection surface sufficiently smaller than the surface areas of the light converging members, and so arranged inside the light converging members as to direct the reflected infrared rays from the means of the primary reflection mirror within the angle of field of detection of the infrared detector and to allow the light receiving surface to receive the infrared rays.

Abstract translation: 该检测器包括布置在平面上并具有至少一个光接收表面的红外检测器（PE）; 一组用于会聚红外线的狭缝型聚光构件（LR和LD），它们布置在围绕红外检测器的平面上; 主反射镜（M1或M1'）主要反射通过聚光部件进入内部的红外线（B）的装置; 以及二次反射镜（M2）的装置，每个二次反射镜（M2）的反射表面充分小于聚光构件的表面积，并且设置在聚光构件内部以将来自主反射镜的装置的反射红外线引导到 红外检测器的检测角度和允许光接收表面接收红外线。

公开(公告)号：WO1991008452A1

公开(公告)日：1991-06-13

申请号：PCT/US1990006968

申请日：1990-11-29

Applicant: AKZO N.V. ,  SWOPE, Charles, Hermas ,  LINK, John, Glenn ,  HAUGEN, Douglas, Glenn

Inventor： AKZO N.V.

IPC: G01J01/02

CPC classification number: G01N21/278

Abstract: A device and method for optical calibration of an optical instrument (12) that measures optical characteristics along an optical path. A controllable shutter (18) having electrically alterable optical characteristics is placed across the optical path of the instrument (12). An electrical control (36 and 38) is connected to the shutter for selectively providing a variable voltage to the shutter to electrically alter optical characteristics of the shutter in a controlled manner so that the optical characteristics of the shutter correspond to selected optical characteristics.

公开(公告)号：WO1994007115A1

公开(公告)日：1994-03-31

申请号：PCT/JP1993001328

申请日：1993-09-16

Applicant: MITSUBISHI DENKI KABUSHIKI KAISHA ,  UTSUMI, Yoshikazu; ,  YAMADA, Akira; ,  OKUMURA, Masatomi; ,  WATARAI, Hisao; ,  SATO, Ken; ,  SATO, Takehiko; ,  SAKAI, Yuichi;

Inventor： MITSUBISHI DENKI KABUSHIKI KAISHA

IPC: G01J01/02

CPC classification number: G01J5/02 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/024 ,  G01J5/10 ,  G01J2005/202 ,  H01L27/16 ,  H01L37/02

Abstract: An infrared detector array wherein infrared detectors are arranged in a high density and each detector has a low thermal capacity. An insulating film (2) is disposed on the surface of a silicon substrate having a (100)-plane as its upper surface, and right-angled triangle portions at four corners of matrix-like right-angled quadrilaterals encompassed by two parallel straight lines portions of two sets crossing orthogonally each other on the insulating film (2) are etched to form openings. The silicon substrate is anisotropically etched through the openings in such a manner as to form pyramidal cavities (3) in the silicon substrate below the insulating film (2). The infrared detectors are then disposed on the insulating film.

Abstract translation: 一种其中红外检测器以高密度排列并且每个检测器具有低热容量的红外检测器阵列。 绝缘膜（2）设置在具有（100）平面作为其上表面的硅衬底的表面上，并且在由两个平行直线包围的矩阵状直角四边形的四个角处的直角三角形部分 在绝缘膜（2）上彼此正交交叉的两组的部分被蚀刻以形成开口。 通过开口各向异性蚀刻硅衬底，以便在绝缘膜（2）下面的硅衬底中形成锥体腔（3）。 然后将红外检测器设置在绝缘膜上。

公开(公告)号：WO1992002791A1

公开(公告)日：1992-02-20

申请号：PCT/US1991005551

申请日：1991-08-07

Applicant: MACRI, James, N. ,  COOK, Edward, J.

IPC: G01J01/02

CPC classification number: G01N21/274 ,  G01N2201/0446 ,  G01N2201/13

Abstract: An apparatus for the calibration and quality assurance of a multichannel spectrophotometer, particularly an ELISA spectrophotometer, comprises film selectively exposed in the presence of a color to produce a series of filters (columns 3-10) having a known first color and linearly increasing optical density. The response of the spectrophotometer is measured against the known color and linearly increasing optical density. Additional filters (columns 11-12) of at least one additional color permit checking the color response of the spectrophotometer. An algorithm determines whether the response conforms to predetermined conditions. An output is produced to provide a record of the calibration and quality assurance of the spectrophotometer. The invention has particular utility for conducting calibration and quality assurance of ELISA spectrophotometers used in clinical laboratory screening for infectious diseases, such as Hepatitis B and the AIDS viruses.

公开(公告)号：WO1991004469A1

公开(公告)日：1991-04-04

申请号：PCT/GB1990001397

申请日：1990-09-10

Applicant: RUGER DESIGN LIMITED ,  LINCOLN, Mark

Inventor： RUGER DESIGN LIMITED

IPC: G01J01/02

CPC classification number: G01J1/429

Abstract: An ultraviolet radiation dosimeter comprises a sensor (12) for producing a signal representative of the intensity of ultraviolet radiation received by the sensor, and a keypad (13) for entering parameters corresponding to the type of skin of a user, the protection factor of a sun protection product used by the user, and also a degree of previously accumulated tan of a user. A microprocessor calculates an estimate of a maximum permissible dose of ultraviolet radiation according to the entered parameters and a suitable exposure time determined from the estimate of the maximum permissible dose and the intensity of ultraviolet radiation sensed by the sensor is displayed on a display (14). The dosimeter may also have an alarm for alerting a user when the time suitable for exposure is about to be or has been exceeded.

Abstract translation: 紫外线辐射剂量计包括用于产生表示由传感器接收的紫外线辐射强度的信号的传感器（12），以及用于输入与用户皮肤类型对应的参数的小键盘（13），保护因子 用户使用的防晒产品，以及用户以前累积的一定程度。 微处理器根据输入的参数来计算最大允许紫外线辐射剂量的估计值，并且从显示器（14）上显示由传感器感测到的最大允许剂量和紫外线辐射强度的估计确定的合适的曝光时间， 。 当适合暴露的时间即将被超过或已被超过时，剂量计还可能具有用于警告用户的警报。

公开(公告)号：WO1987003086A1

公开(公告)日：1987-05-21

申请号：PCT/JP1986000572

申请日：1986-11-11

Applicant: SHISEIDO COMPANY LTD. ,  TOMOEGAWA PAPER COMPANY LTD. ,  TOMITA, Kenichi ,  SUETSUGU, Masaru ,  FUKUDA, Minoru ,  HIGASHI, Takao ,  KOIZUMI, Norimichi

Inventor： SHISEIDO COMPANY LTD. ,  TOMOEGAWA PAPER COMPANY LTD.

IPC: G01J01/02

CPC classification number: C09K9/02 ,  G01J1/50 ,  G03C1/675

Abstract: An ultraviolet-sensitive composition comprising a photo-activatable agent capable of forming a radical upon being irradiated with UV rays, a color-changing agent which undergoes a visible change in color by the action of the radical, and an ultraviolet absorber.

Abstract translation: 一种紫外线敏感性组合物，其包含能够在照射紫外线时能够形成自由基的可光活化剂，通过基团的作用发生可见的颜色变化的变色剂和紫外线吸收剂。