公开(公告)号：WO2021216162A2

公开(公告)日：2021-10-28

申请号：PCT/US2021/015798

申请日：2021-01-29

Applicant: APPLIED MATERIALS, INC.

Inventor： YANG, Zihao ,  ZHU, Mingwei ,  PATIBANDLA, Nag B. ,  YAHAV, Nir ,  VISSER, Robert Jan ,  DE LA ZERDA, Adi

IPC: G01J1/44 ,  G01J1/02 ,  H01B12/06 ,  G01J1/0407 ,  G01J1/0437 ,  G01J1/42 ,  G01J2001/0496 ,  G01J2001/442 ,  H01L39/10 ,  H01L39/12 ,  H01L39/2416 ,  H01L39/248

Abstract: A superconducting nanowire single photon detector (SNSPD) device includes a substrate, a distributed Bragg reflector on the substrate, a seed layer of a metal nitride on the distributed Bragg reflector, and a superconductive wire on the seed layer. The distributed Bragg reflector includes a plurality of bi-layers, each bilayer including lower layer of a first material and an upper layer of a second material having a higher index of refraction than the first material. The wire is a metal nitride different from the metal nitride of the seed material.