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公开(公告)号：US10481354B2
公开(公告)日：2019-11-19
申请号：US16055243
申请日：2018-08-06
Applicant: Gigaphoton Inc.
Inventor： Yukio Watanabe , Hiroshi Someya , Yuki Kawashima , Yuto Tanaka
Abstract: An optical unit and an optical path tube are easily connected. A structure of connection between a side surface (1a) of the optical unit and the optical path tube includes: an extensible tube (72) constituting at least a part of the optical path tube, the extensible tube being extensible in a tube axis direction; a flange (26) attached to one end of the optical path tube; a flange receiving part (20) provided on the optical unit, the flange receiving part (20) receiving a front surface (26a) of the flange (26), the front surface (26a) of the flange (26) being an end surface on an open side; and a biasing part (23, 72) configured to bias at least a part of the optical path tube in a direction in which the extensible tube (72) extends.
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公开(公告)号：US10475650B2
公开(公告)日：2019-11-12
申请号：US16055287
申请日：2018-08-06
Inventor： Hiroshi Ikenoue , Akira Suwa , Osamu Wakabayashi
IPC: H01L21/228 , H01L21/268 , B23K26/00 , B23K26/06 , B23K26/067 , B23K26/073 , B23K26/08 , B23K26/354 , B23K26/0622 , B23K26/066 , B23K26/12 , B23K103/00 , B23K101/34 , B23K101/40 , B23K103/16 , B23K103/18
Abstract: A laser doping device includes: a solution supply system configured to supply a solution containing dopant to a doping region; a pulse laser system configured to output pulse laser light including a plurality of pulses, the pulse laser light transmitting through the solution; a first control unit configured to control a number of pulses of the pulse laser light for allowing the doping region to be irradiated, and to control a fluence of the pulse laser light in the doping region; and a second control unit configured to control a flow velocity of the solution so as to move bubbles, from the doping region, occurring in the solution every time of irradiation with the pulse.
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公开(公告)号：US20190334311A1
公开(公告)日：2019-10-31
申请号：US16507075
申请日：2019-07-10
Applicant: Gigaphoton Inc.
Inventor： Hiroaki HAMANO
IPC: H01S3/23 , H01S3/097 , B23K26/03 , B23K26/062 , B23K26/064 , B23K26/06
Abstract: A laser apparatus includes: a master oscillator for emitting a laser beam; an amplifier on an optical path of the laser beam; a beam splitter between the master oscillator and the amplifier for separating, from the optical path of the laser beam, at least part of a return beam traveling through the optical path of the laser beam in a direction opposite to a traveling direction of the laser beam; a focusing optical system for focusing the return beam separated from the optical path; and an optical sensor having a light receiving surface for the return beam for detecting information on power of the return beam entering the light receiving surface through the focusing optical system, the light receiving surface being arranged at a position different from a focusing position of the focusing optical system on the optical path of the return beam.
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公开(公告)号：US20190313519A1
公开(公告)日：2019-10-10
申请号：US16434196
申请日：2019-06-07
Applicant: Gigaphoton Inc.
Inventor： Takayuki YABU , Osamu WAKABAYASHI
Abstract: An extreme ultraviolet light generation system includes: a target supply unit configured to output a target toward a predetermined region; a drive laser configured to output a drive laser beam in a first duration; a guide laser configured to output a guide laser beam; a beam combiner configured to substantially align the optical path axes of the drive and guide laser beams and output the laser beams; a laser beam focusing optical system configured to focus the laser beams output from the beam combiner to the predetermined region; an actuator configured to change the focusing positions of the laser beams through the laser beam focusing optical system; an optical sensor configured to detect reflected light of the guide laser beam from the target; and a control unit configured to control the actuator so that the light amount of the reflected light thus detected increases in a second duration.
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公开(公告)号：US20190293922A1
公开(公告)日：2019-09-26
申请号：US16435986
申请日：2019-06-10
Applicant: Gigaphoton Inc.
Inventor： Hiroyuki ITO , Hiroshi TANAKA
Abstract: A laser apparatus may include: a mirror configured to reflect a laser beam; an actuator configured to operate the mirror; and a controller configured to transmit a movement instruction to the actuator, wherein the controller predicts a movement completion time of the actuator, and transmits a polling signal so that the actuator receives the polling signal after expiration of the predicted movement completion time.
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Patent Agency Ranking
公开(公告)号：US20190289707A1
公开(公告)日：2019-09-19
申请号：US16434197
申请日：2019-06-07
Applicant: Gigaphoton Inc.
Inventor： Yuichi NISHIMURA , Takayuki YABU , Yoshifumi UENO
Abstract: An EUV light generation system includes: a target supply unit; a prepulse laser that outputs a prepulse laser beam; a main pulse laser that outputs a main pulse laser; a light focusing optical system that focuses the prepulse and main pulse laser beams on a predetermined region; an actuator that changes a focusing position of the prepulse laser beam by the light focusing optical system; a first sensor that captures an image of a target; and a control unit that stores a reference position of the actuator, calculates a predetermined parameter on the target after irradiation with the prepulse laser beam and before irradiation with the main pulse laser beam based on image data obtained from the first sensor, and controls the actuator to approach the reference position if the predetermined parameter does not satisfy a first condition.
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公开(公告)号：US20190283177A1
公开(公告)日：2019-09-19
申请号：US16429091
申请日：2019-06-03
Applicant: Gigaphoton Inc.
Inventor： Kouji KAKIZAKI , Osamu WAKABAYASHI
IPC: B23K26/0622 , H03K7/08 , H01S3/094 , G02B21/36
Abstract: A laser processing system includes a wavelength tunable laser apparatus capable of changing the wavelength of pulsed laser light to be outputted, an optical system irradiating a workpiece with the pulsed laser light, a reference wavelength acquisition section acquiring a reference wavelength corresponding to photon absorption according to the material of the workpiece, a laser processing controller controlling the wavelength tunable laser apparatus to perform preprocessing before final processing performed on the workpiece, changes the wavelength of the pulsed laser light over a predetermined range containing the reference wavelength, and performs wavelength search preprocessing at a plurality of wavelengths, a processed state measurer measuring a processed state on a wavelength basis achieved by the wavelength search preprocessing performed at the plurality of wavelengths, and an optimum wavelength determination section assessing the processed state on a wavelength basis to determine an optimum wavelength used in the final processing.
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公开(公告)号：US20190239330A1
公开(公告)日：2019-08-01
申请号：US16379511
申请日：2019-04-09
Applicant: Gigaphoton Inc.
Inventor： Motoki NIWANO
CPC classification number: H05G2/008 , H01S3/09702 , H01S3/10 , H01S3/115 , H01S3/2232 , H01S3/2308
Abstract: A laser device includes: a master oscillator (100) configured to output a pulse laser beam (L) based on a light emission trigger signal (S21); a delay circuit (153) configured to generate a switching signal (S10) after a predetermined delay time has elapsed since reception of the light emission trigger signal (S21); a high voltage switch (304) configured to generate a high voltage pulse based on the switching signal (S10); an optical shutter (32k) positioned on the optical path of the pulse laser beam (L) and driven based on the high voltage pulse; and a high voltage monitor (151) configured to detect the high voltage pulse and transmit a high voltage pulse sensing signal (S6) to the delay circuit (153). The delay circuit (153) determines the delay time based on the light emission trigger signal (S21) and the high voltage pulse sensing signal (S6).
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公开(公告)号：US10349508B2
公开(公告)日：2019-07-09
申请号：US15888111
申请日：2018-02-05
Applicant: Gigaphoton Inc.
Inventor： Yutaka Shiraishi , Toshihiro Nishisaka , Toshiyuki Hirashita , Takuya Ishii
IPC: H05G2/00
Abstract: A target storage device may include a tank configured to store a target that generates extreme ultraviolet light when being irradiated with laser light, a heater connected with the tank and configured to heat the tank, and a radiation member disposed to cover at least a part of the tank connected with the heater and configured to reflect heat radiation from the tank and the heater toward the tank.
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公开(公告)号：US20190173259A1
公开(公告)日：2019-06-06
申请号：US16266189
申请日：2019-02-04
Applicant: Gigaphoton Inc.
Inventor： Takeshi ASAYAMA , Hiroyuki MASUDA
Abstract: A laser apparatus includes a chamber accommodating a pair of discharge electrodes, a gas supply and exhaust device configured to supply laser gas to an interior of the chamber and exhaust laser gas from the interior of the chamber, and a controller. The controller performs first control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber at every first number of pulses or first elapsed time, and second control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber before the first control at every second number of pulses less than the first number of pulses or second elapsed time less than the first elapsed time.
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