公开(公告)号：US20190293922A1

公开(公告)日：2019-09-26

申请号：US16435986

申请日：2019-06-10

Applicant: Gigaphoton Inc.

Inventor： Hiroyuki ITO ,  Hiroshi TANAKA

IPC: G02B26/08 ,  H05G2/00 ,  H01S3/23 ,  H01S3/223 ,  H01S3/00 ,  G02B27/14 ,  G02B27/10

Abstract: A laser apparatus may include: a mirror configured to reflect a laser beam; an actuator configured to operate the mirror; and a controller configured to transmit a movement instruction to the actuator, wherein the controller predicts a movement completion time of the actuator, and transmits a polling signal so that the actuator receives the polling signal after expiration of the predicted movement completion time.