公开(公告)号：US20090219128A1

公开(公告)日：2009-09-03

申请号：US12357826

申请日：2009-01-22

Applicant: Robert Faye Elliott ,  Philip John Reiner

Inventor： Robert Faye Elliott ,  Philip John Reiner

IPC: H01H37/52

CPC classification number: H01H37/52 ,  B81B3/0078 ,  B81B2201/032 ,  B81B2203/056 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2300/032

Abstract: A method of making a Lateral-Moving Micromachined Thermal Bimorph which provides the capability of achieving in-plane thermally-induced motion on a microchip, as opposed to the much more common out-of-plane, or vertical, motion seen in many devices. The present invention employs a novel fabrication process to allow the fabrication of a lateral bimorph in a fundamentally planar set of processes. In addition, the invention incorporates special design features that allow the bimorph to maintain material interfaces.

Abstract translation: 一种制造横向移动微机械加热双压电晶片的方法，其提供了在微芯片上实现面内热感应运动的能力，而不是在许多器件中看到的更常见的平面外或垂直运动。 本发明采用新颖的制造工艺，以允许在基本平面的工艺集合中制造横向双压电晶片。 此外，本发明还包含允许双压电晶体保持材料界面的特殊设计特征。

公开(公告)号：US20090174014A1

公开(公告)日：2009-07-09

申请号：US12300831

申请日：2007-05-16

Applicant: Mike Kunze ,  Ingo Daumiller

Inventor： Mike Kunze ,  Ingo Daumiller

IPC: H01L29/84

CPC classification number: F04B43/046 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/016 ,  B81B2201/032 ,  H01F21/04 ,  H01F2007/068 ,  H01G5/18 ,  H01L41/047 ,  H01L41/0933 ,  H01L41/094 ,  H01L41/0973

Abstract: A semiconductor actuator includes a substrate base, a bending structure which is connected to the substrate base and can be deflected at least partially relative to the substrate base. The bending structure has semiconductor compounds on the basis of nitrides of main group III elements and at least two electrical supply contacts which impress an electrical current in or for applying an electrical voltage to the bending structure. At least two of the supply contacts are disposed at a spacing from each other respectively on the bending structure and/or integrated in the latter.

Abstract translation: 半导体致动器包括基板，弯曲结构，其连接到基板基底并且可相对于基板基底至少部分地偏转。 该弯曲结构基于主要III族元素的氮化物和至少两个给弯曲结构施加电压或施加电压的电流的电源触点而具有半导体化合物。 至少两个电源触点分别设置在弯曲结构上和/或与后者集成在一起的彼此间隔开。

公开(公告)号：US07449817B2

公开(公告)日：2008-11-11

申请号：US11604688

申请日：2006-11-28

Applicant: Midori Kato ,  Masayoshi Ishibashi

Inventor： Midori Kato ,  Masayoshi Ishibashi

IPC: H01L41/08

CPC classification number: F03G7/06 ,  B81B3/0021 ,  B81B2201/032 ,  Y10S310/80 ,  Y10T29/42

Abstract: An object of the present invention is to provide a thin and light-weight actuator module structure comprising a multi-layer structure such as a bimorph or unimorph structure that can be formed in an arbitrary shape and deformed in an arbitrary direction, which is high in safety and durability and can be easily fabricated, as well as a method of manufacturing the same.An actuator has a structure such that a striped internal stress distribution is induced within a plane of a bending type actuator of a laminate structure, thereby allowing the actuator to bend so as to constitute a part of a cylindrical shape whose central axis is parallel to the striped direction.

公开(公告)号：US20080259253A1

公开(公告)日：2008-10-23

申请号：US10597569

申请日：2005-01-27

Applicant: Dirk Jan Broer ,  Christiane Maria Rosette De Witz ,  Grietje Neeltje Mol ,  Roel Penterman

Inventor： Dirk Jan Broer ,  Christiane Maria Rosette De Witz ,  Grietje Neeltje Mol ,  Roel Penterman

IPC: G02F1/1334 ,  B29C65/48

CPC classification number: G02B26/02 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/047 ,  Y10T156/11

Abstract: A mechanical structure comprises an element which is moveable by nonmechanical means, such as heat or radiation, between a first state having a first shape and a second state having a second shape different. To this end, the element includes a layer of oriented polymerized liquid crystal which exhibits an anisotropic expansion when subjected to such means. In order to facilitate manufacture the element is positioned on a substrate which has a region of high adhesiveness and a region of low adhesiveness for polymerized liquid crystal. To manufacture such structures a layer of oriented polymerizable liquid crystal is formed on a substrate (201) which is provided with a patterned surface that provides adhesive regions (204) with high adhesiveness to polymerized liquid crystal and nonadhesive regions (203) with low adhesiveness to polymerized liquid crystal. After polymerization, for example a thermal shock is applied which causes the layer of polymerized liquid crystal to delaminate at the non-adhering region while remaining fixed to the adhesive regions. Thus, the method does not require time-consuming under-etching steps.

Abstract translation: 机械结构包括可在诸如热或辐射之间的非机械装置在具有第一形状的第一状态和具有第二形状的第二状态之间移动的元件。 为此，元件包括定向聚合的液晶层，当经受这种方法时，其呈现各向异性膨胀。 为了便于制造，元件位于具有高粘合性区域的基底和聚合液晶的低粘合性区域。 为了制造这样的结构，在基板（201）上形成定向聚合性液晶层，该基板（201）设置有图案化表面，该图案表面向聚合液晶和非粘合区域（203）提供对粘合性高的粘合性区域（204） 聚合液晶。 聚合后，例如进行热冲击，使得聚合液晶层在非粘附区域分层，同时保持固定在粘合剂区域上。 因此，该方法不需要耗时的蚀刻下步骤。

公开(公告)号：US07356913B2

公开(公告)日：2008-04-15

申请号：US10949800

申请日：2004-09-24

Applicant: Yves Fouillet

Inventor： Yves Fouillet

IPC: H01H11/00 ,  H01H65/00

CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/016 ,  B81B2201/032 ,  H01G5/16 ,  H01H2001/0042 ,  H01H2037/008 ,  Y10T29/42 ,  Y10T29/49105 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49128 ,  Y10T29/49155

Abstract: A process for making microswitches or microvalves, composed of a substrate and used for shifting between a first state of functioning and a second state of functioning by means of a bimetal-effect thermal sensor. The sensor includes a deformable element attached, at opposite ends, to the substrate so that there is a natural deflection without stress with respect to a surface of the substrate opposite it, this natural deflection determining the first state of functioning, the second state of functioning being caused by the thermal sensor which, under the influence of temperature variation, induces a deformation of the deformable element which diminishes the deflection by subjecting it to a compressive force which shifts it in a direction opposite to its natural deflection by buckling.

Abstract translation: 一种制造微型开关或微型阀的方法，由基板组成，用于通过双金属效应热传感器在第一功能状态和第二功能状态之间移动。 该传感器包括一可变形元件，该可变形元件在相对端附接到基底，使得相对于与其相反的基底的表面存在无应力的自然变形，该自然偏转确定第一功能状态，第二功能状态 由热传感器引起，其在温度变化的影响下引起可变形元件的变形，该变形元件通过使其具有通过弯曲而在与其自然偏转相反的方向上移动它的压缩力而减小偏转。

公开(公告)号：US20070228887A1

公开(公告)日：2007-10-04

申请号：US11683755

申请日：2007-03-08

Applicant: Michihiko Nishigaki ,  Toshihiko Nagano ,  Takashi Miyazaki ,  Kazuhiko Itaya ,  Takashi Kawakubo

Inventor： Michihiko Nishigaki ,  Toshihiko Nagano ,  Takashi Miyazaki ,  Kazuhiko Itaya ,  Takashi Kawakubo

IPC: H01L41/00

CPC classification number: B81B3/0072 ,  B81B2201/032 ,  H01G5/18 ,  H01H57/00 ,  H01H2057/006 ,  H01L41/094

Abstract: A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and the first upper electrode; a second actuator having a second fixed end, being disposed in parallel with the first actuator, including a stacked structure of a second lower electrode, a second piezoelectric film, and a second upper electrode, and being able to be operated by applying voltages to the second lower electrode and the second upper electrode; and an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator.

Abstract translation: MEMS器件包括：第一致动器，具有第一固定端，包括第一下电极，第一压电膜和第一上电极的堆叠结构，并且能够通过向第一下电极施加电压而操作， 第一上电极; 具有第二固定端的第二致动器，与所述第一致动器平行设置，包括第二下电极，第二压电膜和第二上电极的堆叠结构，并且能够通过向所述第二致动器施加电压而被操作 第二下电极和第二上电极; 以及具有连接到第一致动器的第一作用部分和连接到第二致动器的第二作用部分的电路元件。

公开(公告)号：US07239064B1

公开(公告)日：2007-07-03

申请号：US11138108

申请日：2005-05-26

Applicant: Arthur Anthony Jenkins ,  Michael Scott Kranz ,  Marty Ray Williams

Inventor： Arthur Anthony Jenkins ,  Michael Scott Kranz ,  Marty Ray Williams

IPC: H01H71/16 ,  H02N10/00

CPC classification number: H01H37/52 ,  B81B3/0078 ,  B81B2201/032 ,  B81B2203/056 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2300/032

Abstract: The Resettable Latching MEMS Temperature Sensor provides the capability of recording external temperature extremes without consuming electrical power. The device incorporates a thermal bimorph, contacts, latches, and actuators for device reset. The device can be designed, hardwired, or programmed to trigger at various temperature levels. The device can be fabricated in a simple micromachining process that allows its size to be miniaturized for embedded and portable applications. During operation, the device consumes no quiescent power. The device can be configured to close a circuit, switch an interrupt signal, or switch some other electrical trigger signal between devices at the time of a temperature extreme being reached, or it can be configured to latch and be polled at some time after the temperature limit has occurred.

Abstract translation: 可复位闭锁MEMS温度传感器提供了记录外部温度极限而不消耗电力的能力。 该器件包含一个热双压电晶片，触点，闩锁和执行器，用于器件复位。 该设备可以设计，硬连线或编程为在各种温度水平触发。 该器件可以在简单的微加工工艺中制造，允许其尺寸被小型化以用于嵌入式和便携式应用。 在运行期间，该设备不消耗静态功率。 该设备可以配置为在达到温度极限时关闭电路，切换中断信号或切换设备之间的其他电触发信号，或者可以将其配置为在温度之后的某个时间锁存和轮询 发生了极限。

公开(公告)号：US07179674B2

公开(公告)日：2007-02-20

申请号：US11024192

申请日：2004-12-28

Applicant: Joseph Colby McAlexander, III

Inventor： Joseph Colby McAlexander, III

IPC: H01L21/00

CPC classification number: H01H35/14 ,  B81B2201/0235 ,  B81B2201/032 ,  B81C1/0015 ,  B81C2201/019 ,  G01P15/125 ,  G01P15/135 ,  G01P2015/0828 ,  H01H1/0036

Abstract: An acceleration sensor includes a semiconductor substrate, a first layer formed on the substrate, a first aperture within the first layer, and a beam coupled at a first end to the substrate and suspended above the first layer for a portion of the length thereof. The beam includes a first boss coupled to a lower surface thereof and suspended within the first aperture, and a second boss coupled to an upper surface of the second end of the beam. A second layer is positioned on the first layer over the beam and includes a second aperture within which the second boss is suspended by the beam. Contact surfaces are positioned within the apertures such that acceleration of the substrate exceeding a selected threshold in either direction along a selected axis will cause the beam to flex counter to the direction of acceleration and make contact through one of the bosses with one of the contact surfaces.

Abstract translation: 加速度传感器包括半导体衬底，形成在衬底上的第一层，第一层内的第一孔，以及在第一端处耦合到衬底并在其长度的一部分上悬浮在第一层上方的梁。 梁包括联接到其下表面并悬挂在第一孔内的第一凸起，以及联接到梁的第二端的上表面的第二凸台。 第二层位于梁上的第一层上，并且包括第二孔，第二凸起由梁悬挂在该第二孔内。 接触表面定位在孔内，使得沿着所选择的轴线在任一方向超过选定阈值的基底的加速度将导致梁相对于加速方向弯曲并且通过一个凸起与其中一个接触表面 。

公开(公告)号：US07141915B2

公开(公告)日：2006-11-28

申请号：US10896769

申请日：2004-07-22

Applicant: Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

Inventor： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

IPC: H01L41/08

CPC classification number: B81B3/0018 ,  B81B2201/032 ,  G02B26/0841 ,  G02B26/0858 ,  H01L41/0474 ,  H01L41/0973 ,  H04R17/005 ,  H04R2201/003

Abstract: An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.

Abstract translation: 致动器装置具有驱动部，该驱动部具有布置在基板上的平面中的多个致动器，以及传递来自驱动部的致动器的驱动力的单个第一板部件。 多个间隔件设置在第一板构件和基板之间，形成m个单元。 每个致动器具有形成在基板上的空腔，振动部分和固定部分。 第一板构件的刚性大于致动器的振动部的刚性。

公开(公告)号：US07070699B2

公开(公告)日：2006-07-04

申请号：US10727191

申请日：2003-12-03

Applicant: Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

Inventor： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

IPC: B29D11/00 ,  C23F1/00

CPC classification number: G02B6/3508 ,  B81B3/0054 ,  B81B2201/032 ,  G02B6/3546 ,  G02B6/3568 ,  G02B6/3582 ,  G02B6/3596 ,  H01H2001/0042

Abstract: A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.