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    Passive microfluidic valves
    91.
    发明授权
    Passive microfluidic valves 有权

    公开(公告)号：US11725749B2

    公开(公告)日：2023-08-15

    申请号：US17515792

    申请日：2021-11-01

    Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

    Inventor： Michael Wehner ,  Keng-Yu Lin ,  Natalie King

    IPC: F16K99/00

    CPC classification number: F16K99/0015 ,  F16K99/0057 ,  B81B2201/038 ,  B81B2201/054 ,  F16K99/0025 ,  F16K2099/0069 ,  F16K2099/0082

    Abstract: A passive microfluidic valve includes a first manifold portion having a first chamber; a first inlet fluidly coupled to the first chamber; and a second inlet. The valve also includes a second manifold portion in fluid communication with the first chamber via a channel. The second manifold portion includes a second chamber fluidly coupled to the first chamber and the second inlet. The valve further includes a flexible membrane disposed between the first manifold portion and the second manifold portion and separating the first chamber and the second chamber, the flexible membrane configured to modulate a flow rate of a media flowing between the first inlet and the second inlet in either direction in response to pressure of the media flow.

    Method of making a microfluidic device
    93.
    发明授权
    Method of making a microfluidic device 有权
    制造微流体装置的方法

    公开(公告)号：US08975193B2

    公开(公告)日：2015-03-10

    申请号：US13196421

    申请日：2011-08-02

    Applicant: Robert Johnstone ,  Stephane Martel

    Inventor： Robert Johnstone ,  Stephane Martel

    IPC: H01L21/00 ,  B81C3/00 ,  B81B7/00 ,  B81C1/00

    CPC classification number: B81C1/00182 ,  B81B2201/054 ,  B81C2201/019 ,  B81C2203/0735

    Abstract: A microfabricated device is fabricated by depositing a first metal layer on a substrate to provide a first electrode of an electrostatic actuator, depositing a first structural polymer layer over the first metal layer, depositing a second metal layer over said first structural polymer layer to form a second electrode of the electrostatic actuator, depositing an insulating layer over said first structural polymer layer, planarizing the insulating layer, etching the first structural polymer layer through the insulating layer and the second metal layer to undercut the second metal layer, providing additional pre-formed structural polymer layers, at least one of which has been previously patterned, and finally bonding the additional structural layers in the form of a stack over the planarized second insulating layer to one or more microfluidic channels. The technique can also be used to make cross over channels in devices without electrostatic actuators, in which case the metal layers can be omitted.

    Abstract translation: 通过在衬底上沉积第一金属层以提供静电致动器的第一电极，在第一金属层上方沉积第一结构聚合物层，在第一结构聚合物层上沉积第二金属层以形成微结构聚合物层 静电致动器的第二电极，在所述第一结构聚合物层上沉积绝缘层，平坦化绝缘层，通过绝缘层和第二金属层蚀刻第一结构聚合物层以切割第二金属层，从而提供额外的预成形 结构聚合物层，其中至少一个已经被预先图案化，并且最后将平坦化的第二绝缘层上的堆叠形式的附加结构层结合到一个或多个微流体通道。 该技术也可以用于在没有静电致动器的装置中跨越通道，在这种情况下可以省略金属层。

    Fluid flow passage structure and manufacturing method thereof
    96.
    发明授权
    Fluid flow passage structure and manufacturing method thereof 有权
    流体流路结构及其制造方法

    公开(公告)号：US08109296B2

    公开(公告)日：2012-02-07

    申请号：US12208679

    申请日：2008-09-11

    Applicant: Keiichi Minegishi ,  Yasunori Yoshida ,  Kouji Wada ,  Youichi Kawamura

    Inventor： Keiichi Minegishi ,  Yasunori Yoshida ,  Kouji Wada ,  Youichi Kawamura

    IPC: F16K11/10

    CPC classification number: B81C1/00071 ,  B81B2201/054 ,  B81B2201/058 ,  B81C2201/019 ,  F15B13/0807 ,  Y10T137/87885

    Abstract: A fluid flow passage structure and a manufacturing method therefor are provided, in which fluid flow passages can be easily produced employing a simple structure and process, while also being suitable for reducing the weight thereof. Wire members having a predetermined pattern are disposed between a first block member and a second block member. Airtight and fluidtight hermetic fluid flow passages are formed between such members, by forming the first block member, the second block member, and the wire members together as an integral structure.

    Abstract translation: 提供了一种流体流动通道结构及其制造方法，其中可以使用简单的结构和工艺容易地生产流体流动通道，同时也适合于减轻流体流动的重量。 具有预定图案的线构件设置在第一块构件和第二块构件之间。 通过将第一块构件，第二块构件和线构件形成为一体结构，在这些构件之间形成气密和流体密封的密封流体流动通道。

    Hysteretic MEMS thermal device and method of manufacture
    98.
    发明授权
    Hysteretic MEMS thermal device and method of manufacture 有权
    迟滞MEMS热装置及其制造方法

    公开(公告)号：US07944113B2

    公开(公告)日：2011-05-17

    申请号：US12318634

    申请日：2009-01-05

    Applicant: Paul J. Rubel

    Inventor： Paul J. Rubel

    IPC: H01L41/08

    CPC classification number: F03G7/06 ,  B81B3/0059 ,  B81B2201/018 ,  B81B2201/032 ,  B81B2201/054 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008 ,  H02N10/00 ,  Y10T29/49105

    Abstract: A MEMS hysteretic thermal actuator may have a plurality of beams disposed over a heating element formed on the surface of the substrate. The plurality of beams may be coupled to a passive beam which is not disposed over the heating element. One of the plurality of beams may be formed in a first plane parallel to the substrate, whereas another of the plurality of beams may be formed in a second plane closer to the surface of the substrate. When the heating element is activated, it heats the plurality of beams such that they move the passive beam in a trajectory that is neither parallel to nor perpendicular to the surface of the substrate. When the beams are cooled, they may move in a different trajectory, approaching the substrate before moving laterally across it to their initial positions. By providing one electrical contact on the distal end of the passive beam and another stationary electrical contact on the substrate surface, the MEMS hysteretic actuator may form a reliable electrical switch that is relatively simple to manufacture and operate.

    Abstract translation: MEMS迟滞热致动器可以具有设置在形成在基板的表面上的加热元件上的多个光束。 多个光束可以耦合到未设置在加热元件上方的无源光束。 多个光束中的一个可以形成在平行于衬底的第一平面中，而多个光束中的另一个可以形成在靠近衬底表面的第二平面中。 当加热元件被激活时，它加热多个光束，使得它们以不平行于或垂直于衬底表面的轨迹移动被动束。 当梁被冷却时，它们可以以不同的轨迹移动，在横向移动到其初始位置之前接近基板。 通过在被动束的远端上提供一个电接触，并在衬底表面上提供另一个固定的电触点，MEMS滞后致动器可形成可靠的电开关，其制造和操作相对简单。

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