OZONE GENERATOR AND OZONE GENERATION METHOD
    92.
    发明申请
    OZONE GENERATOR AND OZONE GENERATION METHOD 审中-公开
    臭氧发生器和臭氧发生方法

    公开(公告)号:US20160023900A1

    公开(公告)日:2016-01-28

    申请号:US14442011

    申请日:2013-11-11

    Applicant: WACOM

    Inventor: Masaki KUSUHARA

    Abstract: In order to generate ozone, which is used for ashing and plasma cleaning, plasma generated in a decompressed chamber is conventionally used. But it is difficult to reduce the production cost of an ozone generation, because facility cost and process cost are expensive in a decompressed process. According to the present invention, ozone is generated by atmospheric pressure plasma CVD using dielectric barrier discharge generated by a plasma head where a plurality of plasma head unit members are installed in parallel to generate plasma by applying electric field or magnetic field via a dielectric member. Stable glow discharge plasma is formed even under atmospheric pressure by dielectric barrier discharge. Then, ozone can be generated under atmospheric pressure, and semiconductor device with low cost can be fabricated.

    Abstract translation: 为了产生用于灰化和等离子体清洗的臭氧,通常使用在减压室中产生的等离子体。 但由于设备成本和工艺成本在减压过程中昂贵,所以难以降低臭氧发生的生产成本。 根据本发明,通过使用由等离子体头产生的介质阻挡放电,通过大气压等离子体CVD产生臭氧,其中多个等离子体头单元构件并联安装以通过经由电介质构件施加电场或磁场而产生等离子体。 通过电介质阻挡放电,甚至在大气压下形成稳定的辉光放电等离子体。 然后,可以在大气压下产生臭氧,可以制造低成本的半导体器件。

    Nitrogen-free ozone generation unit and ozone gas supply system
    93.
    发明授权
    Nitrogen-free ozone generation unit and ozone gas supply system 有权
    无氮臭氧发生装置和臭氧气体供应系统

    公开(公告)号:US09067789B2

    公开(公告)日:2015-06-30

    申请号:US14110828

    申请日:2011-04-13

    Abstract: A gas pipe integrated block includes a plurality of internal pipe paths. The plurality of internal pipe paths are connected to a nitrogen-free ozone generator in which a photocatalytic material for generating ozone is applied to a discharge surface, a controller (an MFC, a gas filter, and an APC), a raw material gas supply port, and an ozone gas output port. Thereby, a raw material gas input pipe path extending from the raw material gas supply port through the APC to the nitrogen-free ozone gas generator, and an ozone gas output pipe path extending from the nitrogen-free ozone generator through the gas filter and the MFC to the ozone gas output port, are formed in an integrated unit.

    Abstract translation: 燃气管一体化块包括多个内管道。 多个内部管道连接到无氮臭氧发生器,其中用于产生臭氧的光催化材料被施加到排放表面,控制器(MFC,气体过滤器和APC),原料气体供应 港口和臭氧气体输出口。 由此,从原料气体供给口通过APC向无氮臭氧气体发生器延伸的原料气体输入管路和从无氮臭氧发生器通过气体过滤器延伸的臭氧气体输出管路, MFC到臭氧气体输出口,形成在一体的单元中。

    System and method for preparing an optimized fuel mixture
    94.
    发明申请
    System and method for preparing an optimized fuel mixture 审中-公开
    制备优化燃料混合物的系统和方法

    公开(公告)号:US20110108009A1

    公开(公告)日:2011-05-12

    申请号:US12805789

    申请日:2010-08-19

    Inventor: Carlos A. Plata

    Abstract: Aspects of the present invention relate to systems and method for converting ozone and fuel into mechanical energy and waste products. In some embodiments, a super-combustor may be used to provide a combustion engine with an improved ability to combust fuel. Certain embodiments of the invention may provide for an improved spark plug or modified engine having a super-combustor built in.

    Abstract translation: 本发明的方面涉及将臭氧和燃料转化为机械能和废物的系统和方法。 在一些实施例中,超燃烧器可以用于提供具有改善燃烧燃料的能力的内燃机。 本发明的某些实施例可以提供具有内置的超级燃烧器的改进的火花塞或改进的发动机。

    N-phase ozone generator
    96.
    发明授权
    N-phase ozone generator 有权
    N相臭氧发生器

    公开(公告)号:US07744825B2

    公开(公告)日:2010-06-29

    申请号:US10581044

    申请日:2004-09-29

    Abstract: A compact, inexpensive, large-capacity ozone generator with increased ease of apparatus maintenance. An ozone power supply includes an n-phase inverter for obtaining an AC voltage having a predetermined frequency and outputting an n-phase AC voltage waveform; n reactors and an n-phase transformer for converting an n-phase AC voltage to a high AC voltage; n high-voltage terminals for outputting the n-phase high AC voltage; and a low-voltage terminal having a common potential. Ozone generator units are electrically divided into n pieces within a discharge chamber. Each ozone generator unit includes n high-voltage electrode terminals and one low-voltage electrode terminal, common to all ozone generator units. Each ozone generator unit supports an n-phase AC discharge to generate ozone.

    Abstract translation: 一种紧凑,便宜,大容量的臭氧发生器,提高了设备​​维护的便利性。 臭氧电源包括用于获得具有预定频率的AC电压并输出n相交流电压波形的n相逆变器; n个电抗器和用于将n相交流电压转换成高交流电压的n相变压器; n个高压端子,用于输出n相高交流电压; 以及具有共同电位的低电压端子。 臭氧发生器单元在放电室内电分为n个片。 每个臭氧发生器单元包括n个高压电极端子和一个低压电极端子,它们与所有臭氧发生器单元共用。 每个臭氧发生器单元支持n相AC放电以产生臭氧。

    Ozone generating apparatus
    97.
    发明授权
    Ozone generating apparatus 有权
    臭氧发生装置

    公开(公告)号:US07713495B2

    公开(公告)日:2010-05-11

    申请号:US11097336

    申请日:2005-04-04

    Abstract: An ozone generating apparatus is provided which includes a pair of electrodes for producing a discharge by the application of an ac voltage therebetween, and at least one dielectric provided between the pair of electrodes. A source gas containing oxygen is provided into a discharge space in which the discharge is produced to generate ozone by the action of the discharge. A surface lying between at least one of the pair of electrodes and the discharge space and in contact with the discharge has a surface resistivity of 104 Ω to 1011 Ω. The source gas provided into the discharge space includes ultrapure oxygen having a purity of not less than 99.9%.

    Abstract translation: 提供一种臭氧发生装置,其包括一对用于通过施加交流电压产生放电的电极和设置在所述一对电极之间的至少一个电介质。 含有氧的源气体被提供到放电空间中,在放电空间中产生放电,以通过放电的作用产生臭氧。 位于一对电极中的至少一个与放电空间之间并与放电接触的表面具有104和OHgr的表面电阻率; 至1011&OHgr。 设置在放电空间中的源气体包括纯度不低于99.9%的超纯氧。

    OPERATION METHOD OF OZONIZER AND OZONIZER APPARATUS USED THEREFOR
    98.
    发明申请
    OPERATION METHOD OF OZONIZER AND OZONIZER APPARATUS USED THEREFOR 审中-公开
    其使用的臭氧和臭氧设备的操作方法

    公开(公告)号:US20100084259A1

    公开(公告)日:2010-04-08

    申请号:US12573156

    申请日:2009-10-05

    Abstract: The present invention offers an operation method of an ozonizer and an ozonizer apparatus to improve ozone gas purity and to achieve long and safety electrolysis operation in such manner that, during normal operation of the ozonizer, ozone gas is generated at the anode in the anode compartment and hydrogen gas is generated at the cathode in the cathode compartment; and only when the ozonizer is stopped and operation is switched to protective current operation during which minute electric current is supplied to protect said anode, oxygen-containing gas is supplied to said cathode compartment after electrolyte and hydrogen gas in said cathode compartment are all drained out, so that said cathode is made function as a gas electrode for oxygen reduction reaction, using said cathode as a reversible electrode with two functions as a gas generation electrode and a gas electrode, thereby during normal operation, ozone is generated efficiently, and during the protective current operation, when safety is a key issue, hydrogen gas is not generated at the cathode and mingling of hydrogen gas into ozone gas generated at the anode is prevented.

    Abstract translation: 本发明提供一种臭氧发生器和臭氧发生装置的操作方法,以改善臭氧气体的纯度并实现长时间和安全的电解操作,使得在臭氧发生器的正常操作期间,在阳极室的阳极处产生臭氧气体 在阴极室的阴极产生氢气; 并且只有当臭氧发生器停止并且操作切换到保护电流操作时,在该保护电流操作期间供应微小的电流以保护所述阳极,则在所述阴极室中的电解液和氢气全部被排出之后,含氧气体被供应到所述阴极室 使得所述阴极被用作用于氧还原反应的气体电极,使用所述阴极作为具有两个功能的可逆电极作为气体发生电极和气体电极,从而在正常操作期间有效地产生臭氧,并且在 保护电流操作,当安全是关键问题时,在阴极处不产生氢气,并且防止氢气混入阳极产生的臭氧气体中。

    Treatment apparatus operable to adjust output based on variations in incoming voltage
    100.
    发明授权
    Treatment apparatus operable to adjust output based on variations in incoming voltage 失效
    处理装置可操作以基于输入电压的变化来调整输出

    公开(公告)号:US07371354B2

    公开(公告)日:2008-05-13

    申请号:US10662591

    申请日:2003-09-15

    Applicant: Shek Fai Lau

    Inventor: Shek Fai Lau

    Abstract: Systems and methods are provided for compensating for variations in line voltages the power an electro-kinetic air transporter and conditioner device. The electro-kinetic air transporter and conditioner device includes a high voltage generator that provides a potential difference between at least one emitter electrode and at least one collector electrode. The high voltage generator is driven by both a DC voltage obtained from an AC voltage source, and a low voltage pulse signal. The DC voltage is stepped down to produce a voltage sense signal indicative of a level of AC voltage source. The voltage sense signal is monitored. At least one of a pulse width, duty cycle and frequency of the low voltage pulse signal is adjusted, based on the monitored voltage sense signal, in order to substantially maintain the potential difference at a desired level.

    Abstract translation: 提供了系统和方法来补偿电动空气输送器和调节器装置的功率的线路电压的变化。 电动空气输送器和调节装置包括在至少一个发射电极和至少一个集电极之间提供电位差的高压发生器。 高电压发生器由从AC电压源获得的直流电压和低电压脉冲信号两者驱动。 降低直流电压以产生表示交流电压源电平的电压检测信号。 监视电压检测信号。 基于监视的电压检测信号来调整低电压脉冲信号的脉冲宽度,占空比和频率中的至少一个,以便将电位差基本保持在期望的水平。

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