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公开(公告)号：US09103800B2
公开(公告)日：2015-08-11
申请号：US13953644
申请日：2013-07-29
Applicant: KLA-Tencor Corporation
Inventor： Richard E. Bills , Neil Judell , Timothy R. Tiemeyer , James P. McNiven
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A method for inspecting a surface of a workpiece for asymmetric defects, by scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light extending along a light channel axis in a front quartersphere and scattered light, the incident beam and the light channel axis defining an incident plane, collecting the scattered light at a plurality of collectors disposed above the surface at defined locations such that scatter from asymmetric defects is collectable by at least one collector, detecting collector output and generating signals in response, and processing the signals associated with each collector individually to obtain information about asymmetric defects.
Abstract translation: 一种用于通过扫描工件表面上的入射光束以撞击在其上以产生沿着前四分之一圆周和散射光中的光通道轴延伸的反射光来检查工件的表面的非对称缺陷的方法，入射光束和 光通道轴限定入射平面，在设置在表面上的多个收集器处收集散射光，所述收集器在限定的位置处，使得来自不对称缺陷的散射可由至少一个收集器收集，检测收集器输出并响应于产生信号，并且处理 分别与每个收集器相关联的信号以获得关于非对称缺陷的信息。
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92.发明申请METHOD AND APPARATUS FOR DETECTING A TRENCH CREATED IN A THIN FILM SOLAR CELL 有权用于检测在薄膜太阳能电池中产生的TRENCH的方法和装置公开(公告)号：US20150185162A1
公开(公告)日：2015-07-02
申请号：US14555190
申请日：2014-11-26
Applicant: MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD.
Inventor： Ryogo HORII
CPC classification number: G01N21/8422 , G01N21/9505 , G01N2201/105 , H01L31/0463 , Y02E10/50 , Y02E10/541
Abstract: A method and an apparatus for precisely detecting a trench S in a product W to become a thin film solar cell are provided. In the product W, a lower electrode layer 12, in which the trench S is created, and light absorbing layers 13 and 14 are layered on a substrate 11 in this order. The method includes the steps of: detecting infrared rays for imaging, of which the wavelengths are in such a range that can transmit through the light absorbing layers 13 and 14 and which are irradiated from the product W, by means of an infrared ray imaging apparatus 16 that is provided above the light absorbing layers 13 and 14 so that image data for radiation intensity distribution can be taken; and detecting the trench S in the lower electrode layer 12 on the basis of this image data for radiation intensity distribution.
Abstract translation: 提供了一种用于精确检测产品W中的沟槽S以成为薄膜太阳能电池的方法和装置。 在产品W中，产生沟槽S的下电极层12和光吸收层13和14依次层叠在基板11上。 该方法包括以下步骤：通过红外线成像装置检测波长处于可透过光吸收层13和14并从产品W照射的范围内的成像用红外线 16，其设置在光吸收层13和14的上方，使得可以拍摄用于辐射强度分布的图像数据; 并且根据该用于辐射强度分布的图像数据检测下电极层12中的沟槽S.
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公开(公告)号：US20150070696A1
公开(公告)日：2015-03-12
申请号：US14490129
申请日：2014-09-18
Applicant: University of Notre Dame du Lac
Inventor： Steven Ruggiero , Carol Tanner
CPC classification number: G01N15/0205 , G01N21/00 , G01N21/31 , G01N21/39 , G01N21/4785 , G01N21/51 , G01N21/59 , G01N2015/0294 , G01N2021/4707 , G01N2201/06113 , G01N2201/105 , G02B21/0096 , G02B21/18
Abstract: An apparatus for obtaining suspended particle information includes an optical array to divide light to a first path and a second path, a platform to orient a first and second container with either the first or second path, and a first and second photodetector to receive at least a direct illuminating component of the light of the first and second path after said light penetrates through the first and second container. A detector interface receives transmission signals from the first and second photodetectors of the direct illuminating component of the light after penetrating through the first and second container and a calculation engine computes the particle information based on a ratio of the received transmission signals.
Abstract translation: 一种用于获得悬浮粒子信息的装置包括：将光分成第一路径和第二路径的光学阵列，用于使具有第一或第二路径的第一和第二容器定向的平台，以及第一和第二光电检测器，以至少接收 在所述光穿过第一和第二容器之后第一和第二路径的光的直接照明分量。 检测器接口在穿透第一和第二容器之后接收来自光的直接照明部件的第一和第二光电检测器的传输信号，并且计算引擎基于所接收的传输信号的比率来计算粒子信息。
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公开(公告)号：US20140362382A1
公开(公告)日：2014-12-11
申请号：US14373928
申请日：2013-01-24
Applicant: TOMRA SORTING AS
Inventor： Dirk Balthasar , Ole Onsrud
CPC classification number: G01N21/55 , G01N21/84 , G01N2021/845 , G01N2201/105 , G02B26/105
Abstract: An apparatus for detecting matter, the apparatus including: a first light source adapted to emit a first light beam; a second light source adapted to emit a second light beam, wherein the apparatus is arranged such that the first and second light beams converge towards a scanning element; the scanning element adapted to redirect the converging first and second light beams towards the matter to be detected; and a detector adapted to receive light reflected by the matter via the scanning element. Also, a system and method of detecting matter.
Abstract translation: 一种用于检测物质的装置，所述装置包括：适于发射第一光束的第一光源; 适于发射第二光束的第二光源，其中所述设备被布置成使得所述第一和第二光束朝向扫描元件会聚; 所述扫描元件适于将所述会聚的第一和第二光束朝向待检测的物体重定向; 以及检测器，适于接收经由扫描元件反射的光。 另外，检测物质的系统和方法。
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公开(公告)号：US08848199B2
公开(公告)日：2014-09-30
申请号：US12218029
申请日：2008-07-10
Applicant: Wonshik Choi , Ramachandra Rao Dasari , Christopher M. Fang-Yen , Michael S. Feld
Inventor： Wonshik Choi , Ramachandra Rao Dasari , Christopher M. Fang-Yen , Michael S. Feld
CPC classification number: G01N21/45 , G01N21/51 , G01N21/6458 , G01N21/6486 , G01N2021/458 , G01N2201/061 , G01N2201/105 , G01N2201/12
Abstract: The present invention relates to systems and methods for quantitative three-dimensional mapping of refractive index in living or non-living cells, tissues, or organisms using a phase-shifting laser interferometric microscope with variable illumination angle. A preferred embodiment provides tomographic imaging of cells and multicellular organisms, and time-dependent changes in cell structure and the quantitative characterization of specimen-induced aberrations in high-resolution microscopy with multiple applications in tissue light scattering.
Abstract translation: 本发明涉及使用具有可变照明角度的移相激光干涉显微镜在生活或非活细胞，组织或生物体中定量三维映射折射率的系统和方法。 优选的实施方案提供细胞和多细胞生物的层析成像，以及在组织光散射中具有多种应用的高分辨率显微镜中细胞结构的时间依赖性变化和样品诱导的像差的定量表征。
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Patent Agency Ranking
公开(公告)号：US20130335733A1
公开(公告)日：2013-12-19
申请号：US13953644
申请日：2013-07-29
Applicant: KLA-Tencor Corporation
Inventor： Richard E. Bills , Neil Judell , Timothy R. Tiemeyer , James P. McNiven
IPC: G01N21/956
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A method for inspecting a surface of a workpiece for asymmetric defects, by scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light extending along a light channel axis in a front quartersphere and scattered light, the incident beam and the light channel axis defining an incident plane, collecting the scattered light at a plurality of collectors disposed above the surface at defined locations such that scatter from asymmetric defects is collectable by at least one collector, detecting collector output and generating signals in response, and processing the signals associated with each collector individually to obtain information about asymmetric defects.
Abstract translation: 一种用于通过扫描工件表面上的入射光束以撞击在其上以产生沿着前四分之一圆周和散射光中的光通道轴延伸的反射光来检查工件的表面的非对称缺陷的方法，入射光束和 光通道轴限定入射平面，在设置在表面上的多个收集器处收集散射光，所述收集器在限定的位置处，使得来自不对称缺陷的散射可由至少一个收集器收集，检测收集器输出并响应于产生信号，并且处理 分别与每个收集器相关联的信号以获得关于非对称缺陷的信息。
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公开(公告)号：US20130229661A1
公开(公告)日：2013-09-05
申请号：US13865104
申请日：2013-04-17
Applicant: KLA-TENCOR CORPORATION
Inventor： Daniel Kandel , Vladimir Levinski , Alexander Svizher , Joel Seligson , Andrew Hill , Ohad Bachar , Amnon Manassen , Yung-Ho Alex Chuang , Ilan Sela , Moshe Markowitz , Daria Negri , Efraim Rotem
IPC: G01N21/47
CPC classification number: G01N21/47 , G01B11/02 , G01B11/0641 , G01B2210/56 , G01N21/211 , G01N21/9501 , G01N21/956 , G01N2021/4792 , G01N2201/06113 , G01N2201/105 , G03F7/70625 , G03F7/70633
Abstract: Various metrology systems and methods are provided. One metrology system includes a light source configured to produce a diffraction-limited light beam, an apodizer configured to shape the light beam in the entrance pupil of illumination optics, and optical elements configured to direct the diffraction-limited light beam from the apodizer to an illumination spot on a grating target on a wafer and to collect scattered light from the grating target. The metrology system further includes a field stop and a detector configured to detect the scattered light that passes through the field stop. In addition, the metrology system includes a computer system configured to determine a characteristic of the grating target using output of the detector.
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98.发明授权System and method for inspection of a workpiece surface using multiple scattered light collectors 有权使用多个散射光收集器检测工件表面的系统和方法公开(公告)号：US08497984B2
公开(公告)日：2013-07-30
申请号：US11311943
申请日：2005-12-17
Applicant: Richard Earl Bills , Neil Judell , Timothy R. Tiemeyer , James Peter McNiven
Inventor： Richard Earl Bills , Neil Judell , Timothy R. Tiemeyer , James Peter McNiven
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. Certain of these components, most notably the beam source subsystem, the beam scanning subsystem and the optical collection and detection subsystem are modular for ready field replacement and/or maintenance. The optical collection and detection system features wing collectors in the front quartersphere and back collectors in the back quartersphere for collected light scattered from the surface of the workpiece. This can greatly improve the measurement capabilities of the system. Also included is a method for detecting asymmetric defects using the wing collectors and back collectors.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 这些部件中的一些，最明显的是光束源子系统，光束扫描子系统和光学收集和检测子系统是模块化的，用于现场更换和/或维护。 光学收集和检测系统在后四分之一的四分之一区域中具有翼收集器和后收集器，用于从工件表面散射的收集的光。 这可以大大提高系统的测量能力。 还包括使用翼收集器和后收集器检测不对称缺陷的方法。
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公开(公告)号：US08330947B2
公开(公告)日：2012-12-11
申请号：US12570465
申请日：2009-09-30
Applicant: Richard Earl Bills , Neil Judell , Klaus Reinhard Freischlad , James Peter McNiven
Inventor： Richard Earl Bills , Neil Judell , Klaus Reinhard Freischlad , James Peter McNiven
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.
Abstract translation: 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统的特征在于后置收集器，其设置在入射平面外侧的后四分之一圈中，用于收集从工件表面散射的光。 后收集器相对于归因于缺陷散射部分的散射光部分的雾度部分的散射光部分相对最小设置，或者在瑞利散射中相对最小。
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公开(公告)号：US20120013898A1
公开(公告)日：2012-01-19
申请号：US13242065
申请日：2011-09-23
Applicant: Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
Inventor： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. The system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 系统还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化而改变输出狭缝的宽度。
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