公开(公告)号：US06836326B2

公开(公告)日：2004-12-28

申请号：US10331215

申请日：2002-12-30

Applicant: Damian Hajduk ,  Eric Carlson

Inventor： Damian Hajduk ,  Eric Carlson

IPC: G01J400

CPC classification number: G01N21/21 ,  B01J2219/00286 ,  B01J2219/00315 ,  B01J2219/00585 ,  B01J2219/00659 ,  B01J2219/00707 ,  B01J2219/0072 ,  B01J2219/00745 ,  C40B40/18 ,  C40B60/14 ,  G01J4/04 ,  G01N2201/0813

Abstract: A method and apparatus for characterizing and screening an array of material samples is disclosed. The apparatus includes a sample block having a plurality of regions for containing the material samples, a polarized light source to illuminate the materials, an analyzer having a polarization direction different than the polarization direction of the polarized light source, and a detector for analyzing changes in the intensity of the light beams. The light source, together with a polarizer, may include a plurality of light beams to simultaneously illuminate the entire array of materials with linearly polarized light so that characterization and screening can be performed in parallel. In addition, the materials in the sample block maybe subjected to different environmental conditions or mechanical stresses, and the detector analyzes the array as a function of the different environmental conditions or mechanical stresses.

Abstract translation: 公开了一种表征和筛选材料样品阵列的方法和装置。 该装置包括具有用于容纳材料样本的多个区域的样本块，用于照射材料的偏振光源，具有与偏振光源的偏振方向不同的偏振方向的分析器，以及用于分析变化的检测器 光束的强度。 光源与偏振器一起可以包括多个光束，以同时以线性偏振光照射整个材料阵列，从而可以并行执行表征和筛选。 此外，样品块中的材料可能经受不同的环境条件或机械应力，并且检测器根据不同的环境条件或机械应力来分析阵列。

公开(公告)号：US06833920B2

公开(公告)日：2004-12-21

申请号：US10046620

申请日：2002-01-12

Applicant: William Rassman ,  David Ralin ,  Robert A. Lieberman ,  Lothar U. Kempen

Inventor： William Rassman ,  David Ralin ,  Robert A. Lieberman ,  Lothar U. Kempen

IPC: G01J400

CPC classification number: G01N21/211 ,  G01N21/253 ,  G01N21/552 ,  G01N2021/212 ,  Y10S436/805

Abstract: Apparatus for acquiring an image of a specimen comprising a cassette having an optical portion holding a specimen array on a TIR surface and being removably matable to a processing portion having a polarized light beam source and a processing polarization-sensitive portion to image the spatially distributed charges in polarization of the specimen array. In one form the array optical portion comprises a transparent slide having a bottom surface with first and second gratings located to direct polarized light to the TIR surface and to direct light reflected by that (TIR) surface to an imager, respectively. The apparatus may include a flow cell integral with the optical portion as well as means for selecting the direction and wavelength of the polarized light.

公开(公告)号：US06806956B2

公开(公告)日：2004-10-19

申请号：US10151992

申请日：2002-05-21

Applicant: Werner Späth ,  Ulrich Steegmüller

Inventor： Werner Späth ,  Ulrich Steegmüller

IPC: G01J400

CPC classification number: G02B27/28 ,  G01J4/00

Abstract: A polarization detector is described which contains a beam splitter, which disperses an incident light beam into partial beam paths. The partial beams pass though &lgr;/4 wafers and a cholesterol layer and impinge upon detectors. The polarization direction of the incident light beam can be measured by the polarization detector with the aid of the signal level of the detectors.

Abstract translation: 描述了一种偏振检测器，其包含分束器，其将入射光束分散到部分光束路径中。 部分光束通过λ/ 4晶片和胆固醇层并撞击探测器。 借助于检测器的信号电平，偏振检测器可以测量入射光束的偏振方向。

公开(公告)号：US06804003B1

公开(公告)日：2004-10-12

申请号：US09405716

申请日：1999-09-24

Applicant: Haiming Wang ,  Patrick M. Maxton ,  Kenneth C. Johnson ,  Mehrdad Nikoonahad

Inventor： Haiming Wang ,  Patrick M. Maxton ,  Kenneth C. Johnson ,  Mehrdad Nikoonahad

IPC: G01J400

CPC classification number: G01J3/447 ,  G01B11/0641 ,  G01J4/02 ,  G01N21/21 ,  G01N21/211

Abstract: Two phase modulators or polarizing elements are employed to modulate the polarization of an interrogating radiation beam before and after the beam has been modified by a sample to be measured. Radiation so modulated and modified by the sample is detected and up to 25 harmonics may be derived from the detected signal. The up to 25 harmonics may be used to derive ellipsometric and system parameters, such as parameters related to the angles of fixed polarizing elements, circular deattenuation, depolarization of the polarizing elements and retardances of phase modulators. A portion of the radiation may be diverted for detecting sample tilt or a change in sample height. A cylindrical objective may be used for focusing the beam onto the sample to illuminate a circular spot on the sample. The above-described self-calibrating ellipsometer may be combined with another optical measurement instrument such as a polarimeter, a spectroreflectometer or another ellipsometer to improve the accuracy of measurement and/or to provide calibration standards for the optical measurement instrument. The self-calibrating ellipsometer as well as the combined system may be used for measuring sample characteristics such as film thickness and depolarization of radiation caused by the sample.

Abstract translation: 采用两相调制器或偏振元件来调制光束已被待测样品修改之前和之后的询问辐射束的极化。 检测由样本调制和修改的辐射，并且可以从检测到的信号导出多达25个谐波。 可以使用多达25个谐波来导出椭偏和系统参数，例如与固定偏振元件的角度相关的参数，圆形去衰减，偏振元件的去极化和相位调制器的延迟。 可以转移一部分辐射以检测样品倾斜或样品高度的变化。 可以使用圆柱形物镜将光束聚焦到样品上以照亮样品上的圆形斑点。 上述自校准椭偏仪可以与另一种光学测量仪器如偏振计，分光光度计或其他椭偏仪组合，以提高测量精度和/或为光学测量仪器提供校准标准。 自校准椭偏仪以及组合系统可用于测量样品特性，如样品的膜厚度和辐射的去极化。

公开(公告)号：US06795184B1

公开(公告)日：2004-09-21

申请号：US09963573

申请日：2001-09-26

Applicant: Craig M. Herzinger ,  Steven E. Green ,  Blaine D. Johs

Inventor： Craig M. Herzinger ,  Steven E. Green ,  Blaine D. Johs

IPC: G01J400

CPC classification number: G02B27/286 ,  G01J4/00 ,  G01N21/211

Abstract: Disclosed is an odd bounce image rotating system with a sequence of an odd number of reflecting elements, such that a polarized electromagnetic beam caused to enter, reflectively interacts with the odd number of reflecting elements and exits along an essentially non-deviated, non-displaced locus, but with an azimuthally rotated polarization state. Application to, and methodology of application to set azimuthal angles of polarization in spectroscopic ellipsometer, polarimeter and the like systems is also disclosed.

Abstract translation: 公开了一种具有奇数个反射元件的序列的奇数反弹图像旋转系统，使得偏振电磁束进入，反射地与奇数个反射元件相互作用并沿着基本上非偏离的非位移 但是具有方位角旋转的偏振状态。 还公开了在分光椭圆偏振仪，偏振计等系统中应用于设置偏振方位角的应用和方法。

公开(公告)号：US06784993B2

公开(公告)日：2004-08-31

申请号：US10428387

申请日：2003-05-02

Applicant: Jon Opsal ,  Youxian Wen

Inventor： Jon Opsal ,  Youxian Wen

IPC: G01J400

CPC classification number: G01N21/211 ,  G01N21/8422 ,  G01N25/72

Abstract: A system is disclosed for evaluating nitrogen levels in thin gate dielectric layers formed on semiconductor samples. In one embodiment, a tool is disclosed which includes both a narrow band ellipsometer and a broadband spectrometer for measuring the sample. The narrowband ellipsometer provides very accurate information about the thickness of the thin film layer while the broadband spectrometer contains information about the nitrogen levels. In another aspect of the subject invention, a thermal and/or plasma wave detection system is used to provide information about the nitrogen levels and nitration processes.

Abstract translation: 公开了一种用于评估在半导体样品上形成的薄栅极电介质层中的氮含量的系统。 在一个实施例中，公开了一种工具，其包括窄带椭偏仪和用于测量样品的宽带光谱仪。 窄带椭偏仪提供关于薄膜层的厚度的非常准确的信息，而宽带光谱仪包含关于氮水平的信息。 在本发明的另一方面，使用热和/或等离子体波检测系统来提供关于氮水平和硝化过程的信息。

公开(公告)号：US06750968B2

公开(公告)日：2004-06-15

申请号：US09969939

申请日：2001-10-02

Applicant: John V. Sandusky

Inventor： John V. Sandusky

IPC: G01J400

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01N21/47 ,  G01N2021/214

Abstract: Devices and methods for differential numerical aperture analysis of samples, utilizing angle-of-incidence measurements resulting from variable illumination or observation numerical apertures, or both. Metrology applications are provided, and more particularly including scatterometer, ellipsometer and similar analysis methods, including bi-directional reflectance or transmission distribution function measurement. The provided devices and methods enable analysis of critical dimensions of samples utilizing a minimum of moving parts, with the range of striking or scattering angles varied by a variable numerical aperture or apertures.

Abstract translation: 使用样品的微分数值孔径分析的装置和方法，利用由可变照明或观察数值孔径引起的入射角度测量，或两者。 提供了测量应用，更具体地包括散射仪，椭偏仪和类似的分析方法，包括双向反射或传输分布函数测量。 所提供的装置和方法能够利用最小的运动部件分析样品的临界尺寸，其中冲击或散射角度的范围由可变的数值孔径或孔径变化。

公开(公告)号：US06744510B2

公开(公告)日：2004-06-01

申请号：US10040372

申请日：2002-01-09

Applicant: Dae Gab Gweon ,  Sung Lim Park ,  Jae Wha Jeong

Inventor： Dae Gab Gweon ,  Sung Lim Park ,  Jae Wha Jeong

IPC: G01J400

CPC classification number: G01N21/211 ,  G01N2021/0339 ,  G01N2021/214

Abstract: An ellipsometer for aligning incident angle comprising: a main frame shaping half circle and flat surface on which a plurality of grooves are radial and circumferential directionally carved; a specimen stage, which is installed at the groove-caved surface of the main frame, for tilting a specimen on a upper surface of the specimen stage with respect to horizontal direction and translating the specimen upward and downward; a polarizing unit, which is capable of fixing and moving on the groove-carved surface of the main frame, for polarizing a light from a light source and outputting the polarized light to the specimen, and moving on the groove-carved surface; and a light detecting unit, which is capable of fixing and moving on the groove-carved surface, for a reflection light from the specimen.

Abstract translation: 一种用于对准入射角的椭圆光度计，包括：成形半圆形的主框架和平坦表面，多个凹槽在其上沿径向和周向定向雕刻; 安装在主框架的凹槽凹部的表面上的试样台，用于使试样台的上表面相对于水平方向倾斜试样并使试样上下移动; 偏光单元，其能够固定和移动在主框架的凹槽表面上，用于使来自光源的光偏振并将偏振光输出到样本，并且在凹槽表面上移动; 以及光检测单元，其能够在凹槽表面上固定和移动来自样本的反射光。

公开(公告)号：US06734969B2

公开(公告)日：2004-05-11

申请号：US09940407

申请日：2001-08-27

Applicant: Michael Abraham ,  Matthias Hampel

Inventor： Michael Abraham ,  Matthias Hampel

IPC: G01J400

CPC classification number: H01L21/67253 ,  G01B11/0616

Abstract: To carry out measurements in the vacuum, for example for quality control in the production of semiconductors, conventional stand alone measuring machines are installed. They are very cost, space and time intensive. To enable a process oriented measurement under optimal conditions, a device with a two part case is proposed that can be moved in a vacuum chamber, whereby one part of the case projects into the vacuum chamber and the other part of the case is located outside the vacuum chamber. The case can receive a measurement system. In addition, an adjusting device, engaging with the case, and a counterpull device, engaging with the second part of the case, are provided.

Abstract translation: 为了在真空中进行测量，例如用于生产半导体的质量控制，安装常规的独立测量机。 他们是非常成本，空间和时间密集。 为了在最佳条件下进行面向过程的测量，提出了具有两部分壳体的装置，其可以在真空室中移动，由此壳体的一部分突出到真空室中，并且壳体的另一部分位于 真空室。 该情况可以接收测量系统。 此外，提供了与壳体接合的调节装置和与壳体的第二部分接合的对接装置。

公开(公告)号：US06721051B2

公开(公告)日：2004-04-13

申请号：US09956388

申请日：2001-09-19

Applicant: M. Pinar Mengüç ,  Sivakumar Manickavasagam

Inventor： M. Pinar Mengüç ,  Sivakumar Manickavasagam

IPC: G01J400

CPC classification number: G01N21/47 ,  G01N15/0211 ,  G01N21/21

Abstract: A non-intrusive method of characterizing particles through inverse analysis of experimental data based on measurements using elliptically polarized radiation is provided. A database of theoretical absorption and scattering data sets for particles is compiled. Optimum settings for an experimental test to gather an experimental absorption and scattering data set are determined and the experimental test is conducted. The experimental absorption and scattering data set is then compared to the theoretical absorption and scattering data sets of the database of theoretical absorption and scattering data sets in order to determine an absorption and scattering data set which differs the least from the experimental absorption and scattering data set in order to characterize the particles.

Abstract translation: 提供了一种基于使用椭圆偏振辐射测量的实验数据的反分析来表征粒子的非侵入性方法。 编制了一个理论吸收和散射数据集的数据库。 确定用于采集实验吸收和散射数据集的实验测试的最佳设置，并进行实验测试。 然后将实验吸收和散射数据集与理论吸收和散射数据集的数据库的理论吸收和散射数据集进行比较，以确定与实验吸收和散射数据集最不同的吸收和散射数据集 以表征颗粒。