Abstract:
Oxygen gas having a high purity is supplied to an electric discharge type ozonizer to generate ozone. An ozone density is prevented from decreasing without the use of nitrogen gas by adding moisture to the high-purity oxygen gas via a humidifier when the high-purity oxygen gas is supplied to an ozonizer from an oxygen gas source. Through the addition, the moisture volume in the high-purity oxygen gas supplied to the ozonizer is adjusted to be within the range of 0.05-40 ppm.
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
In an electric discharge type ozonizer using highly pure oxygen gas having a purity of not lower than 99.99% as a raw material gas, the pressure of a gas in the discharge space of a discharger is raised to a level higher than atmospheric pressure by at least 1.1 kgf/cm.sup.2, and/or in which a liquid-cooled discharger is used, and the temperature of the cooling liquid is set at a level not lower than 15.degree. C., whereby the ozonizer is capable of stably producing ozone gas at a high ozone concentration without causing lowering of the ozone concentration with time.
Abstract:
The invention relates to an air-cooled ozone generator of tubular type which has a tubular outer electrode, a tubular dielectric, for instance of glass, arranged inside the outer electrode, and an inner electrode in the form of a metal coating on the inner side of the dielectric. The outer electrode and the dielectric are spaced apart and the resulting intermediate annular gap forms a discharge space in which oxygen is converted to ozone. The ozone generator is operated by means of a low-voltage, high-frequency AC source connected to the electrodes. The outer electrode has cooling flanges, and inside the inner electrode there is provided at least one heat dissipating metal body insertable in the inner electrode and expandable to abutment against the inner electrode. Preferably, the metal body also serves as an electric connection for connecting the inner electrode to the voltage source. The metal body preferably consists of a sheet formed into a cylinder with two inwardly directed flanges.
Abstract:
The invention provides a process for the mass production of ozone in a liquid form from liquid oxygen, by the utilization of ozonizing radiations or electric discharge occurring in the oxygen gasified by being warmed to a temperature not higher than the boiling point of ozone.
Abstract:
The disclosed system functions to generate ozone with improved efficiency. Oxygen gas is passed through an electric field, and while in the field is irradiated with brief bursts of high energy electrons. This produces a large number of secondary electrons in the gas and these electrons taken energy from the electric field. The secondary electrons efficiently dissociate oxygen molecules from the gas, thereby producing oxygen atoms which immediately combine with oxygen to form ozone. The electric field is pulsed on during the electron beam irradiation, and thereafter pulsed off in order to maximize energy deposition by electrons and minimize energy deposition by ions. The disclosed system may also be used to generate other substances in gas phase ionic or free-radical reactions in which a suitable gas or mixture of gases is passed through the discharge and made to react in it. For example, the system can be used to produce hydrogen peroxide or hydrazine from suitable gas mixtures of H2O + O2 and NH3 + N2, respectively.
Abstract:
A SILENT OZONIZER IS DISCLOSED WHICH INCLUDES A CYLINDRICAL DIELECTRIC TUBE CARRYING A FIRST ELECTRODE ON ITS INTERIOR BETWEEN ITS ENDS. A HOUSING MEANS INCLUDING A SECOND ELECTRODE IS LOCATED AROUND THE DIELECTRIC TUBE SO AS TO DEFINE A TUBULAR CHANNEL EXTENDING BETWEEN THE TWO ELECTRODES. MEANS ARE PROVIDED FOR INTRODUCING AND REMOVING THE GAS TANGENTIALLY FROM THE OPPOSITE ENDS OF THE CHANNEL. PREFERABLY THE DIELECTRIC TUBE IS A TRANSPARENT TUBE WHICH IS DIRECTLY CONTACTED BY THE FIRST ELECTRODE AND THE SECOND ELECTRODE IS OF A METAL WHICH ACTS AS AND/OR WHICH CARRIES A CATALYST FOR THE PRODUCTION OF OZONE. SUCH A CATALYST MAY BE USED IN A DIFFERENTLY CONSTRUCTED OZONIZER; SIMILARLY SUCH A TRANSPARENT DIELECTRIC TUBE MAY BE UTILIZED BETWEEN ELECTRODES IN OTHER DIFFERENTLY CONSTRUCTED SILENT OZONIZERS.
Abstract:
An ozone generator of a gas blow-through type, especially to produce a gas mixture of ozone/air or ozone/oxygen. An ozone producing structural unit in the path of the blown air or oxygen is used as ozone source. The ozone producing structural unit is operated on the principle of alternating current auxiliary electrode cold arc discharge with its capacity increased by limited arc discharge, with an alternating voltage voltage source. This solution does not result in high-temperature arc discharges, thus the fire hazard may be eliminated, and at the same time the device is capable of producing extremely large quantities of ozone. The ozone producing structural unit of the ozone generator is placed in one or more insulating housings/air ducts, placed in a direction parallel to or coaxial to the air blowing direction. Further details of the apparatus are disclosed herein.
Abstract:
A system for performing ozone water treatment comprises a voltage supply circuit and a plasma eductor reactor. The voltage supply circuit includes an H-bridge controller and driver, a transformer, and an output port. The H-bridge controller and driver are configured to switch the electrical polarity of a pair of terminals. A primary of the transformer is connected to the H-bridge driver and controller. A secondary of the transformer connects in parallel with a first capacitor and in series with an inductor and a second capacitor. The output port connects in parallel with the second capacitor. The plasma eductor reactor includes an electric field generator, a flow spreader, and a diffuser. The electric field generator includes a pair of electrodes that generate an electric field. The flow spreader supplies a stream of oxygen. The diffuser supplies a stream of water. The streams of water and oxygen pass through the electric field.