Abstract:
Integrated circuit capacitor lower electrodes are fabricated by forming a plurality of spaced-apart contact pads on an integrated circuit substrate. A first insulating layer is formed on the integrated circuit substrate including on the contact pads. A plurality of spaced-apart conductive lines is formed on the first insulating layer that are laterally offset from the plurality of spaced-apart contact pads. A second insulating layer is formed on the first insulating layer including on the conductive lines. A buffer layer comprising material that is different from the second insulating layer, is formed on the second insulating layer. Openings are formed that extend through the buffer layer, through the second insulating layer and into the first insulating layer between the conductive lines to expose the contact pads. A conductive layer is formed in the openings and on the buffer layer. The conductive layer is etched between the openings to form the capacitor lower electrodes. The buffer layer preferably comprises material that has lower reflectivity than that of the second insulating layer and also preferably comprises material that has an etch rate for a predetermined etchant, that is intermediate that of the second insulating layer and the conductive layer. The first and second insulating layers preferably comprise silicon dioxide, the buffer layer preferably comprises at least one of silicon nitride and silicon oxynitride and the conductive layer preferably comprises polysilicon. During etching, a polymer preferably is formed on the capacitor lower electrode sidewalls adjacent the buffer layer. The etchant preferably is a plasma etchant including sulfur hexafluoride, chlorine and/or nitrogen gases.
Abstract:
A process is disclosed for preparing N,N'-disubstituted urea by reacting an amine and CO/O.sub.2 mixture gas in the presence of a catalyst system comprising at least one selenium compound selected from SeO.sub.2, (CH.sub.3 O)Se(O)(OH) and (CH.sub.3 CH.sub.2 O)Se(O)(OH), and M.sub.2 CO.sub.3 (M=alkali metal) as a co-catalyst. The process enables less active aromatic amine with a low reactivity as well as an aliphatic amine to be easily transformed into disubstituted urea avoiding the use of expensive precious metal catalysts.
Abstract:
A method of preparing carbamates by reacting amine with alcohol and mixed gas of CO/O.sub.2 in the presence of one or more catalyst selected from the group consisting of monovalent copper halide having the structural formula of Cu�NCMe.sub.4 !X, K�CuX.sub.2 !, �CuX(S)! (wherein X=Cl, Br, or I; S=solvent) or monovalent copper compound having carbonyl group having the structural formula of �Cu(CO)X.sub.a L.sub.b !.sub.m Y.sub.n (wherein, X=CF.sub.3 CO.sub.2, Cl, HB(pz).sub.3 (wherein, pz=pyrazoyl,C.sub.3 H.sub.3 N.sub.2), LBF.sub.2, {LBF.sub.2 =difluoro-3,3'-(trimethylenedinitrilo)bis(2-butanone oximato)borate}; L=en, diene; Y=BPh.sub.4, AsF.sub.6 ; a,b=0,1; m=1-4; n=0,1).
Abstract translation:在一种或多种催化剂存在下,通过使胺与醇和CO 2 O 2的混合气体反应制备氨基甲酸酯的方法,所述催化剂选自具有结构式为Cu [NCMe4] X,K [CuX2], [CuX(S)](其中X = Cl,Br或I; S =溶剂)或具有结构式为[Cu(CO)XaLb] mYn的羰基的一价铜化合物(其中,X = CF 3 CO 2, HB(pz)3(其中,pz =吡唑基,C3H3N2),LBF2,{LBF2 =二氟-3,3' - (三亚甲基二亚硝基)双(2-丁酮肟基)硼酸酯}; L =烯,二烯; Y = BPh4, AsF6; a,b = 0,1; m = 1-4; n = 0,1)。
Abstract:
A medium access control protocol for wireless ATM network in communication protocol for controlling an access between a plurality of mobile terminals and an access control station in the wireless ATM system is provided, including: an up-stream frame for controlling a medium access by enabling the plurality of mobile terminals to transmit connection control data and status data of the terminal; and a down-stream frame for controlling the medium access by enabling the access control station receiving the up-stream frame to transmit the slot allocation data and the connection control data to the mobile terminals.
Abstract:
A dust neutralizing and flocculating system used in an air cleaning system for removing contaminants contained in indoor air including a radio frequency generating electrode and an ion generating electrode. Fine particles passing through a moderately efficient filter equipped in the air cleaning system sequentially pass through the radio frequency generating electrode and ion generating electrode. The fine particles are dipolarly magnetized while passing through the radio frequency generating electrode, thereby exhibiting an increased inter-particles attraction. The ion generating electrode adds cations and anions to the fine particles, thereby promoting the flocculation of the fine particles circulating in the room installed with the air cleaning system. By virtue of the promoted flocculations, the particle size of the particles circulating in the room increases. The particles with an increased size are secondarily removed by the filter.
Abstract:
The present invention relates to a method for measuring radical species distribution in plasma by determining the intensity of the light emitted from the radical species and plasma parameters in plasma with the aid of optical and electrostatic probes, and an apparatus for measuring the radical species distribution. The method of the invention comprises the steps of: (i) measuring integral light intensity in a vacuum container by an optical probe inserted to the vacuum container; (ii) determining light intensity at each point of the vacuum container by differentiating the integral light intensity; (iii) measuring current and voltage applied to the electrostatic probe in the vacuum container; (iv) determining plasma parameters from the measured current and voltage; and, (v) measuring distribution of radical species from the light intensity and plasma parameters.
Abstract:
A multifunctional control device and method is used to determine a head channel selecting signal for playback heads of a video tape recorder and for controlling a phase shift direction of a video signal according to a desired reproduction mode. The video tape recorder has four heads, a first pair for use during standard play and a second pair for use during super long play. The heads read out recorded video signals and a first switch is connected to the first pair of heads and a second switch is connected to the second pair of heads for selectively providing outputs to corresponding amplifiers, under control of a servo controller. A third switch is connected to the outputs of the amplifiers for providing outputs under control of a microcomputer. The microcomputer controls the servo controller which in turn controls the speed of a drum motor and a capstan motor. The microcomputer also provides a phase shift direction controlling signal. An output of the servo controller is provided to the microcomputer along with an output of a comparator comparing the outputs of the amplifiers.
Abstract:
The present invention discloses an application sharing service method and a device applied to the service method. That is, a company service device can be enabled to provide service content by sharing an application by selecting, among the applications which are installed on a terminal device, a target application to be shared which can be shared with the company service device, and enabling the terminal device to access the service content which is provided by the company service device through the selected target application to be shared.
Abstract:
The present invention relates to a method for sharing data of a device in M2M communication and a system therefor. The invention comprises: a step of allowing a resource user terminal to request access authority of protected resource data to a resource owner terminal, in order to prevent a security threat; a verification step of allowing the resource owner terminal to verify the resource user terminal to request the setting of the access authority to an M2M server, and to transmit a verification key issued from the M2M server to the resource user terminal; an access authority setting step of allowing the M2M server to generate an access authentication key based on the verification key, and to transmit the access authentication key to the resource user terminal; and a using step of allowing the resource user terminal to inquire about the protected resource data from the M2M server based on the access authentication key, and to use the protected resource data.
Abstract:
A method of forming a pattern includes forming a mask pattern on a substrate; etching the substrate by deep reactive ion etching (DRIE) and by using the mask pattern as an etch mask; partially removing the mask pattern to expose a portion of an upper surface of the substrate; and etching the exposed portion of the upper surface of the substrate. In the method, when a pattern is formed by DRIE, an upper portion of the pattern does not protrude or scarcely protrudes, and scallops of a sidewall of the pattern are smooth, and thus a conformal material layer may be easily formed on a surface of the pattern.