Heterogeneous annealing method and device
    115.
    发明授权
    Heterogeneous annealing method and device 有权
    异相退火方法及装置

    公开(公告)号:US09184125B2

    公开(公告)日:2015-11-10

    申请号:US14064807

    申请日:2013-10-28

    Abstract: A method of integrating a first substrate having a first surface with a first insulating material and a first contact structure with a second substrate having a second surface with a second insulating material and a second contact structure. The first insulating material is directly bonded to the second insulating material. A portion of the first substrate is removed to leave a remaining portion. A third substrate having a coefficient of thermal expansion (CTE) substantially the same as a CTE of the first substrate is bonded to the remaining portion. The bonded substrates are heated to facilitate electrical contact between the first and second contact structures. The third substrate is removed after heating to provided a bonded structure with reliable electrical contacts.

    Abstract translation: 一种将具有第一表面的第一衬底与第一绝缘材料和第一接触结构与具有第二表面的第二衬底与第二绝缘材料和第二接触结构集成的方法。 第一绝缘材料直接接合到第二绝缘材料上。 去除第一衬底的一部分以留下剩余部分。 具有与第一基板的CTE基本相同的热膨胀系数(CTE)的第三基板被结合到剩余部分。 粘合的基底被加热以促进第一和第二接触结构之间的电接触。 在加热之后移除第三衬底以提供具有可靠电接触的接合结构。

    Device for assembling photoelectric element on substrate
    119.
    发明授权
    Device for assembling photoelectric element on substrate 有权
    在基板上组装光电元件的装置

    公开(公告)号:US09132513B2

    公开(公告)日:2015-09-15

    申请号:US13931759

    申请日:2013-06-28

    Inventor: Chih-Chen Lai

    Abstract: A device includes a vacuum nozzle, a driver, a measuring unit, and a controller. The nozzle lifts and holds a photoelectric element having a first electrode and a second electrode. The driver drives the nozzle to press the photoelectric element onto a substrate having a soldering pad and a contact, such that the second electrode is electrically connected to the soldering pad via a layer of conductive glue. The measuring unit measures a resistance across the first electrode and the contact of the substrate when the photoelectric element is pressed onto the substrate. The controller controls the driver to drive the nozzle to keep pressing the photoelectric element harder and harder into the substrate until the resistance stops decreasing, that is, when the layer of conductive glue is at its thinnest.

    Abstract translation: 装置包括真空喷嘴,驱动器,测量单元和控制器。 喷嘴提升并保持具有第一电极和第二电极的光电元件。 驱动器驱动喷嘴将光电元件按压到具有焊盘和触点的基板上,使得第二电极经由一层导电胶电连接到焊盘。 当光电元件被压在基板上时,测量单元测量跨越第一电极的电阻和基板的接触。 控制器控制驱动器驱动喷嘴,使光电元件更坚硬地压入基板,直到电阻停止下降,即当导电胶层处于最薄时。

    METHOD OF JOINING SEMICONDUCTOR SUBSTRATE
    120.
    发明申请
    METHOD OF JOINING SEMICONDUCTOR SUBSTRATE 有权
    接合半导体基板的方法

    公开(公告)号:US20150187704A1

    公开(公告)日:2015-07-02

    申请号:US14445653

    申请日:2014-07-29

    Abstract: A method of joining semiconductor substrates, which may include: forming an alignment key on a first semiconductor substrate; forming an insulating layer on the first semiconductor substrate and the alignment key; forming a first metal layer pattern and a second metal layer pattern on the insulating layer; forming a first protrusion and a second protrusion, and an alignment recess positioned between the first protrusion and the second protrusion on a second semiconductor substrate; forming a third metal layer pattern and a fourth metal layer pattern on the first protrusion and the second protrusion, respectively; and joining the first semiconductor substrate and the second semiconductor substrate, in which the alignment key is positioned at the alignment recess when the first semiconductor substrate and the second semiconductor substrate are joined, is provided.

    Abstract translation: 一种连接半导体衬底的方法,其可以包括:在第一半导体衬底上形成对准键; 在所述第一半导体衬底和所述对准键上形成绝缘层; 在所述绝缘层上形成第一金属层图案和第二金属层图案; 形成第一突起和第二突起,以及位于第二半导体衬底上的第一突起和第二突起之间的对准凹槽; 在所述第一突起和所述第二突起上分别形成第三金属层图案和第四金属层图案; 并且提供在第一半导体衬底和第二半导体衬底接合时将对准键定位在对准凹槽处的第一半导体衬底和第二半导体衬底。

Patent Agency Ranking