公开(公告)号：US20160268102A1

公开(公告)日：2016-09-15

申请号：US14645234

申请日：2015-03-11

Applicant: ASM IP Holding B.V.

Inventor： Carl Louis White ,  Eric James Shero ,  Mohith Verghese

IPC: H01J37/32 ,  B08B7/00 ,  C23C16/455

CPC classification number: H01J37/32449 ,  B08B7/00 ,  C23C16/45544 ,  C23C16/45557 ,  C23C16/4583 ,  H01J37/32458 ,  H01J37/32816

Abstract: Gas-phase reactors and systems are disclosed. Exemplary reactors include a reaction chamber having a tapered height. Tapering the height of the reactor is thought to reduce a pressure drop along the flow of gasses through the reactor. Exemplary reactors can also include a spacer within a gap to control a flow of gas between a region and a reaction chamber.

Abstract translation: 公开了气相反应器和系统。 示例性反应器包括具有锥形高度的反应室。 据认为，将反应器的高度缩小以减少沿着气体通过反应器的气流的压降。 示例性反应器还可以包括在间隙内的间隔物，以控制区域和反应室之间的气体流。