公开(公告)号：US07141798B2

公开(公告)日：2006-11-28

申请号：US10923574

申请日：2004-08-20

Applicant: Jun Ito ,  Hajime Kanazawa

Inventor： Jun Ito ,  Hajime Kanazawa

IPC: G01J1/42 ,  G01J3/51 ,  G21K1/02 ,  H05G2/00

CPC classification number: G03F7/70575 ,  G01J1/429 ,  G01J3/51

Abstract: A spectrum measuring apparatus that includes an extinction member for decreasing a light intensity from an EUV light source, a spectrum member for extracting light with a desired wavelength band from the decreased intensity light and a detector for detecting a light intensity of the light with a desired wavelength band is disclosed. Then, a spectrum intensity distribution (spectrum) is obtained by (a) a plural opening is located in the extinction member, and the light from the EUV light source passes through the plural opening at the same time, or (b) the detector detects the light volume of the light with a desired wavelength band as thermal energy.

Abstract translation: 一种光谱测量装置，包括用于降低来自EUV光源的光强度的消光部件，用于从降低的强度光中提取具有期望波长带的光的光谱部件和用于检测具有期望的光的光强度的检测器 公开了波长带。 然后，通过（a）多个开口位于消光部件中，并且来自EUV光源的光同时穿过多个开口获得光谱强度分布（光谱），或者（b）检测器检测 具有期望波长带的光的光体积作为热能。

公开(公告)号：US07122814B2

公开(公告)日：2006-10-17

申请号：US10788609

申请日：2004-02-27

Applicant: Guido Hergenhan ,  Christian Ziener ,  Kai Gaebel

Inventor： Guido Hergenhan ,  Christian Ziener ,  Kai Gaebel

IPC: G01N21/73 ,  G01L21/30

CPC classification number: H05G2/003 ,  G01J1/429 ,  H05G2/008

Abstract: A short-wavelength radiation is generated which is stable over time from a plasma generated by energy input into a target jet, in which intensity variations due to altered coupling of excitation radiation into the target jet are minimized. Measuring devices are provided for successive detection over time of deviations of at least one of the directions of the target jet or the energy beam from an intersection point of the two directions that is provided as an interaction point. The measuring devices have output signals which are suitable as regulating variables for the orientation of the directions on the interaction point, and actuating elements are provided for adjusting and tracking at least one of the directions of either the target jet or the energy beam depending on the output signal of the measuring devices in the manner of a control loop.

Abstract translation: 产生短波长辐射，其随着时间的推移从由能量输入到目标射流中的能量输入而稳定，其中由于激发辐射耦合到目标射流而引起的强度变化最小化。 提供测量装置，用于随着作为相互作用点提供的两个方向的交点的目标射流或能量束的至少一个方向的偏差随时间的连续检测。 测量装置具有适于作为相互作用点上的方向的取向的调节变量的输出信号，并且提供致动元件用于根据目标射流​​或能量束的至少一个方向调整和跟踪 以控制回路的方式输出测量装置的输出信号。

公开(公告)号：US20060222576A1

公开(公告)日：2006-10-05

申请号：US10567835

申请日：2004-06-29

Applicant: Jan Rudkowski ,  Ludwig Dinkloh ,  Dieter Neitemeier

Inventor： Jan Rudkowski ,  Ludwig Dinkloh ,  Dieter Neitemeier

IPC: B01J19/12

CPC classification number: C02F1/325 ,  B01J19/123 ,  B01J2219/002 ,  B01J2219/00234 ,  B01J2219/0024 ,  B01J2219/0877 ,  C02F2201/3227 ,  C02F2201/326 ,  G01J1/02 ,  G01J1/0271 ,  G01J1/429 ,  H05B3/0052

Abstract: A device for the UV treatment of fluids flowing in a flow channel, including a plurality of cylindrical low-pressure mercury UV emitters arranged in groups in the flow channel. The longitudinal axes of the UV emitters are disposed substantially parallel to one another such that the emitters of a given group are disposed in a plane. At least one elongated sensor arrangement monitors the operating state of the emitters, and is spaced from and parallel to one of the groups of the emitters. The sensor arrangement extends essentially transverse to the longitudinal axes of the emitters of the adjacent group, and is provided with a separate UV sensor for each emitter. At least one unit connected with the sensor arrangement controls and/or regulates the emitters.

Abstract translation: 用于在流动通道中流动的流体的紫外线处理的装置，包括在流动通道中分组布置的多个圆柱形低压汞紫外线发射器。 UV发射器的纵轴基本上彼此平行地设置，使得给定组的发射器设置在平面中。 至少一个细长的传感器装置监视发射器的操作状态，并且与发射器的组中的一个间隔开并平行。 传感器装置基本上横向于相邻组的发射器的纵向轴线延伸，并且为每个发射器设置有单独的UV传感器。 与传感器装置连接的至少一个单元控制和/或调节发射器。

公开(公告)号：US07095089B2

公开(公告)日：2006-08-22

申请号：US10817939

申请日：2004-04-06

Applicant: Shigeru Yagi ,  Hiroshi Kojima ,  Shigeru Kurita

Inventor： Shigeru Yagi ,  Hiroshi Kojima ,  Shigeru Kurita

IPC: H01L31/0203

CPC classification number: G01J1/42 ,  G01J1/429

Abstract: A light detecting device is fabricated to have the following structure: a light receiving element having a protective layer, in which a transparent conductive electrode, a semiconductor layer, an electrode and the protective layer are successively formed on a transparent substrate, is arranged on a first face of an insulating substrate having a terminal electrode formed to be exposed to first and second faces of the insulating substrate in such a manner that the protective layer is opposed to the first face of the insulating substrate; and further the transparent conductive electrode and the electrode are connected electrically to the terminal electrode exposed to the first face of the insulating substrate. The light detecting device having this structure is surface-mounted on a circuit board to connect the terminal electrode exposed to the second face of the insulating substrate to an external terminal of the circuit board.

Abstract translation: 制造光检测装置具有以下结构：具有保护层的受光元件设置在透明基板上，其中透明导电电极，半导体层，电极和保护层依次形成在透明基板上 绝缘基板的第一面，其具有形成为暴露于绝缘基板的第一和第二面的端子电极，使得保护层与绝缘基板的第一面相对; 此外，透明导电电极和电极电连接到暴露于绝缘基板的第一面的端子电极。 具有这种结构的光检测装置被表面安装在电路板上以将暴露于绝缘基板的第二面的端子电极连接到电路板的外部端子。

公开(公告)号：US20060147339A1

公开(公告)日：2006-07-06

申请号：US11286856

申请日：2005-11-26

Applicant: Charles Hunter ,  Drew Narayan ,  Laurie McNeil ,  John Hebrank

Inventor： Charles Hunter ,  Drew Narayan ,  Laurie McNeil ,  John Hebrank

IPC: A61L2/10

CPC classification number: A61L2/10 ,  A61C19/002 ,  G01J1/429

Abstract: Methods and apparatus for ultraviolet sterilization are provided. The apparatus can include a housing having an opening through which objects can be inserted for sterilization, a killing chamber having an inner surface that is substantially reflective at ultraviolet wavelengths; and at least one ultraviolet radiation source inside the housing. The methods and apparatus are well suited for medical tools, dental tools, body art tools, and baby feeding related objects.

Abstract translation: 提供紫外线灭菌的方法和装置。 该设备可以包括具有开口的壳体，通过该开口物体可被插入以进行灭菌;杀死室具有基本上以紫外线波长反射的内表面; 以及在壳体内的至少一个紫外线辐射源。 该方法和装置非常适用于医疗工具，牙科工具，人体工学工具和与婴儿喂养有关的物体。

公开(公告)号：US20060138311A1

公开(公告)日：2006-06-29

申请号：US10530964

申请日：2003-10-08

Applicant: Wolf-Dieter Domke ,  Larissa Juschkin ,  Karl Kragler ,  Rainer Lebert ,  Manfred Meisen

Inventor： Wolf-Dieter Domke ,  Larissa Juschkin ,  Karl Kragler ,  Rainer Lebert ,  Manfred Meisen

IPC: H01J40/14 ,  G01J3/50

CPC classification number: G21K5/04 ,  G01J1/044 ,  G01J1/429 ,  G03F7/70558 ,  G21K1/10

Abstract: The invention concerns an irradiation device for testing objects coated with light-sensitive paint, comprising a EUV radiation source, an optical system for filtering the radiation of the EUV radiation source a chamber for receiving the object, as well as systems for intersecting the trajectory of the rays on the object. The invention also concerns a method for operating such a device. The invention aims at obtaining as quickly as possible an illumination at least partly simultaneous of several irradiation fields, with different doses, by using an inexpensive laboratory radiation source without resorting to complex optical systems. Therefor, the invention provides a device comprising a simplified and compact optical system, with closable diaphragm apertures located in front of the object to be irradiated and at least one control sensor placed on the trajectory of the rays and enabling the radiation dose to be measured.

Abstract translation: 本发明涉及一种用于测试涂有感光漆的物体的照射装置，包括EUV辐射源，用于过滤EUV辐射源的辐射的光学系统，用于接收物体的室，以及用于与 物体上的光线。 本发明还涉及一种用于操作这种装置的方法。 本发明旨在通过使用廉价的实验室辐射源而不使用复杂的光学系统，尽可能快地获得具有不同剂量的几个照射场的至少部分同时的照明。 因此，本发明提供了一种包括简化和紧凑的光学系统的装置，其中可闭合的隔膜孔位于待照射物体的前方，并且至少一个控制传感器放置在射线的轨迹上并且能够测量辐射剂量。

公开(公告)号：US20060119840A1

公开(公告)日：2006-06-08

申请号：US11007676

申请日：2004-12-08

Applicant: Andrew Garcia ,  Anton Moldovan

Inventor： Andrew Garcia ,  Anton Moldovan

IPC: G01J1/00

CPC classification number: G01J1/429 ,  G01J1/0425 ,  G01J1/32

Abstract: A system is disclosed that is using a high energy point like source illuminator comprising an ultraviolet source, where the source is being energized by a variable power supply that is controlled by a UV sensor and microprocessor. The energy from the illuminator is focused in the proximal end of a fiber optic light guide, a feed back branch coupling reflected light to the UV sensor. The light travels inside the guide and exits through its distal end first exposing a standard substrate. The standard substrate and a working substrate are positioned adjacent to each other and the UV light is first directed toward the standard substrate, the reflected light being incident on the sensor. The sensor output signal is then coupled to the microprocessor, which adjusts the power delivered to the bulb to correspond to the value established for the standard substrate, the microprocessor determining the needed exposure time to affect the cure. Thereafter, the incident light is redirected toward the working substrate, the reflected light therefrom being sensed, the microprocessor then adjusting the power supply such as to keep the bulb light intensity constant in accordance with the parameters established by the standard measurements.

Abstract translation: 公开了一种使用包括紫外线源的高能量点如源照明器的系统，其中源被由UV传感器和微处理器控制的可变电源供电。 来自照明器的能量聚焦在光纤光导的近端，反射分支将反射光耦合到UV传感器。 光在引导件内行进，并通过其远端离开首先暴露标准基底。 标准基板和工作基板彼此相邻定位，并且UV光首先被引向标准基板，反射光入射在传感器上。 然后将传感器输出信号耦合到微处理器，微处理器调节输送到灯泡的功率，以对应于为标准基板建立的值，微处理器确定影响固化所需的曝光时间。 此后，入射光被重定向到工作衬底，从中感测到反射光，微处理器然后调整电源，以便根据由标准测量建立的参数来保持灯泡光强度恒定。

公开(公告)号：US07009185B2

公开(公告)日：2006-03-07

申请号：US10622348

申请日：2003-07-19

Applicant: Gou-Chung Chi ,  Iinn-Kong Sheu ,  Meng-Che Chen ,  Min-Lum Lee

Inventor： Gou-Chung Chi ,  Iinn-Kong Sheu ,  Meng-Che Chen ,  Min-Lum Lee

IPC: G01J1/42

CPC classification number: G01J1/429 ,  H01L31/03529 ,  H01L31/1035 ,  H01L31/184 ,  Y02E10/544 ,  Y02P70/521

Abstract: The present invention relates to an ultraviolet detector and manufacture method thereof, in which a buffer layer is formed on a baseplate and a P-type GaN layer is formed on the baseplate by using epitaxial method. By availing ion-distribution-and-vegetation technology, a first N-type GaN layer is vegetated and invested in the P-type GaN layer by distributing and vegetating Si+ ions in that layer, and a second N-type GaN layer having a thicker ion concentration is invested in the N-type GaN layer. Finally, an annular and a circular metallic layer are formed between the P-type GaN layer and the first N-type GaN layer as well as inside the second N-type GaN layer, respectively, to serve for respective ohmic contact layers. The present invention is characterized in that an incident light can project upon a depletion layer of the GaN planar structure to have the detection efficiency significantly improved.

Abstract translation: 紫外检测器及其制造方法技术领域本发明涉及一种紫外线检测器及其制造方法，其中缓冲层形成在基板上，并且通过外延法在基板上形成P型GaN层。 通过利用离子分布和植被技术，通过在该层中分布和植被Si + +离子，将第一N型GaN层植被并投入P型GaN层，并且第二 具有较高离子浓度的N型GaN层被投入到N型GaN层中。 最后，在P型GaN层和第一N型GaN层之间以及第二N型GaN层内分别形成环状和圆形的金属层，以用于各自的欧姆接触层。 本发明的特征在于入射光可以突出在GaN平面结构的耗尽层上，从而显着提高检测效率。

公开(公告)号：US20060038929A1

公开(公告)日：2006-02-23

申请号：US10920533

申请日：2004-08-18

Applicant: Chenhui Wang

Inventor： Chenhui Wang

IPC: G02F1/1335

CPC classification number: G02B5/283 ,  G01J1/0488 ,  G01J1/429 ,  G01J3/0224 ,  G01J3/26 ,  G01J2003/1213 ,  G02B5/287 ,  G02F1/13 ,  G02F1/1395 ,  G02F2201/16 ,  G02F2202/40 ,  G02F2203/055

Abstract: A wavelength bandpass filter for chemical imaging and similar uses is configured to minimize absorption in ultraviolet wavelengths and arranged in a Solc, Lyot or similar arrangement of stacked controllable birefringent cells. A number of tunable liquid crystal cells are placed successively in a stack along an optical path, each of the cells having an electrically tunable birefringent element, wherein the cells are dimensioned and arranged at respective angular orientations for passing a tuned bandpass wavelength. A polarizer is arranged at least at an output end for controlling a polarization orientation of light. The liquid crystal cells each comprise at least one supporting plate, an alignment layer and birefringent layer, and wherein the liquid crystal cells are at least 90% transmissive over a UV wavelength tuning range between 280 and 400 ηm or larger.

Abstract translation: 用于化学成像和类似用途的波长带通滤波器被配置为使紫外线波长中的吸收最小化并且以Solc，Lyot或类似布置的可堆叠的可控双折射单元布置。 多个可调谐液晶单元依次沿着光路放置在堆叠中，每个单元具有电可调双折射元件，其中单元的尺寸和尺寸设置成各自的角度取向以通过调谐的带通波长。 偏振器至少布置在输出端，用于控制光的偏振取向。 液晶单元各自包括至少一个支撑板，对准层和双折射层，并且其中液晶单元在280和400埃等或更大的UV波长调谐范围之间具有至少90％的透射率。

公开(公告)号：US06998620B2

公开(公告)日：2006-02-14

申请号：US10218690

申请日：2002-08-12

Applicant: Guido Schriever

Inventor： Guido Schriever

IPC: G21K1/00 ,  G01J1/42

CPC classification number: B82Y10/00 ,  G01J1/429 ,  G03F7/70033 ,  G03F7/70558 ,  H01L31/02161 ,  H01L31/02162 ,  H01L31/02325 ,  H01L31/1037 ,  H01L31/108

Abstract: A detector for use with an EUV photon source emitting around 11-15 nm includes at least one multilayer mirror for reflecting the beam along an optical path include a detector element, a filter for reducing the bandwidth of the beam, and the detector element. The detector element preferably comprises a Si pn diodes with doped dead region and zero surface recombination or PtSi-nSi barrier for increasing the long term stability of the detector.