公开(公告)号：US20160216216A1

公开(公告)日：2016-07-28

申请号：US14917701

申请日：2014-09-11

Applicant: HITACHI HIGH-TECH FINE SYSTEMS CORPORATION

Inventor： Shigeru SERIKAWA ,  Takayuki ISHIGURO

IPC: G01N21/95 ,  G01N21/88

CPC classification number: G01N21/95 ,  G01N21/8806 ,  G01N21/8851 ,  G01N2201/06113 ,  G01N2201/103 ,  G11B5/84

Abstract: To increase horizontal resolution while preventing the depth of focus, a magnetic disk inspection device is configured: a table part which has a spindle shaft and a stage; a lighting system which irradiates a magnetic disk; a specularly reflected light detection optical system; a scattered light detection optical system; and a signal processing unit which processes outputs from the specularly reflected light detection optical system and the scattered light detection optical system and detects a defect, in which the scattered light detection optical system is provided with a lens system and a photoelectric converter having a plurality of photoelectric conversion elements arranged in an array, and using the lens system, forms an image of the scattered light on the photoelectric converter, which is long in one direction and thinner than the width of the photoelectric conversion element in a direction perpendicular to the direction of the arrangement in an array.

Abstract translation: 为了在防止焦深的同时提高水平分辨率，磁盘检查装置被构造成：具有主轴和台的台部; 照射系统，照射磁盘; 镜面反射光检测光学系统; 散射光检测光学系统; 以及信号处理单元，其处理来自镜面反射光检测光学系统和散射光检测光学系统的输出，并且检测散射光检测光学系统设置有透镜系统的缺陷和具有多个 以阵列布置的光电转换元件，并且使用透镜系统，在与光电转换元件的方向垂直的方向上在一个方向上长并且比光电转换元件的宽度更薄的光电转换器上形成散射光的图像 阵列中的排列。

公开(公告)号：US20160216214A1

公开(公告)日：2016-07-28

申请号：US15006976

申请日：2016-01-26

Applicant: CHENG MEI INSTRUMENT TECHNOLOGY CO., LTD.

Inventor： Chao-Yi YEH ,  Pin-Chuan SU ,  Shang-Iun YANG ,  Chih Yuan LIU

IPC: G01N21/89 ,  G01N21/88

CPC classification number: G01N21/8914 ,  G01N21/8806 ,  G01N2021/8841 ,  G01N2021/9513 ,  G01N2201/103

Abstract: A panel inspection apparatus is provided. The panel inspection apparatus has a support platform, a delivery platform and a panel inspection assembly. The delivery platform is disposed on the support platform, and the delivery platform has a push module for delivering the panel. The panel inspection assembly includes a plurality of light source modules and a plurality of image-taking modules corresponding to the light source modules. The light source modules include a front light source, a first horizontal light source, and a back light source. The image-taking modules include a front light image-taking module, a first horizontal light image-taking module, and a back light image-taking module. The push module delivers the panel across the support platform so that a plurality of light beams emitted from the light source modules can scan the panel to finish the panel inspection process.

Abstract translation: 提供面板检查装置。 面板检查装置具有支撑平台，输送平台和面板检查组件。 输送平台设置在支撑平台上，并且输送平台具有用于输送面板的推动模块。 面板检查组件包括多个光源模块和对应于光源模块的多个摄像模块。 光源模块包括前光源，第一水平光源和背光源。 摄像模块包括前光摄像模块，第一水平光摄像模块和背光摄像模块。 推模块将面板传递到支撑平台上，使得从光源模块发射的多个光束可以扫描面板以完成面板检查过程。

公开(公告)号：US20160178520A1

公开(公告)日：2016-06-23

申请号：US14973306

申请日：2015-12-17

Applicant: Singulex, Inc.

Inventor： Richard Livingston ,  Michele Gilbert ,  Jacqueline Felberg ,  Jeffrey Bishop

IPC: G01N21/64 ,  G01N33/536 ,  G01N33/68 ,  G01N33/53

CPC classification number: G01N21/6428 ,  G01J3/4406 ,  G01N21/645 ,  G01N21/6452 ,  G01N33/5302 ,  G01N33/536 ,  G01N33/58 ,  G01N33/6845 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2021/6441 ,  G01N2201/0612 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/105

Abstract: Analyzers and analyzer systems that include an analyzer for determining multiple label species, methods of using the analyzer and analyzer systems to analyze samples, are disclosed herein. The analyzer includes one or more sources of electromagnetic radiation to provide electromagnetic radiation at wavelengths within the excitation bands of one or more fluorophore species to an interrogation space that is translated through the sample to detect the presence or absence of molecules of different target analytes. The analyzer may also include one or more detectors configured to detect electromagnetic radiation emitted from the one or more fluorophore species. The analyzer for determining multiple target molecule species provided herein is useful for diagnostics because the concentration of multiple species of target molecules may be determined in a single sample and with a single system.

Abstract translation: 本文公开了包括用于确定多个标签种类的分析器，使用分析仪和分析仪系统分析样品的方法的分析仪和分析仪系统。 分析仪包括一个或多个电磁辐射源，以将一个或多个荧光团物质的激发带内的波长处的电磁辐射提供给通过样品翻译的询问空间，以检测不同目标分析物的分子的存在或不存在。 分析器还可以包括被配置为检测从一个或多个荧光团物种发射的电磁辐射的一个或多个检测器。 用于确定本文提供的多种靶分子物质的分析仪可用于诊断，因为可以在单个样品中和单个系统中确定多种目标分子的浓度。

公开(公告)号：US09372160B2

公开(公告)日：2016-06-21

申请号：US14876192

申请日：2015-10-06

Applicant: GII ACQUISITION, LLC

Inventor： Michael G. Nygaard

IPC: G01B11/24 ,  G01N21/952

CPC classification number: G01N21/952 ,  B07C5/342 ,  F42B35/00 ,  G01B11/2425 ,  G01B11/2433 ,  G01N21/909 ,  G01N21/9515 ,  G01N2201/02 ,  G01N2201/0621 ,  G01N2201/0638 ,  G01N2201/103 ,  G01N2201/12

Abstract: A method and system for optically inspecting the ends of a manufactured part at a single inspection station having a measurement axis are provided. The system includes a fixture assembly having a rotatable first fixturing component and a rotatable second fixturing component mating with and removably connected to the first fixturing component to transmit torque from the first fixturing component to the second fixturing component. The second fixturing component has a device for holding the part in a generally horizontal orientation and permit rotation of the horizontally held part between first and second angular positions about the measurement axis. The system also includes an actuator assembly, an illumination device, a lens and detector assembly and at least one processor to process electrical signals generated by the lens and detector assembly to determine at least one geometric dimension or any visual defects at the ends of the part.

Abstract translation: 提供了一种用于在具有测量轴的单个检查站上光学地检查制造部件的端部的方法和系统。 该系统包括具有可旋转的第一夹紧部件和可旋转的第二夹紧部件的夹具组件，该可旋转的第二夹紧部件配合并可拆卸地连接到第一夹持部件，以将力矩从第一夹持部件传递到第二夹持部件。 第二固定部件具有用于将部件保持在大致水平取向并允许水平保持部分围绕测量轴线在第一和第二角度位置之间旋转的装置。 该系统还包括致动器组件，照明装置，透镜和检测器组件以及至少一个处理器，用于处理由透镜和检测器组件产生的电信号，以确定部件端部处的至少一个几何尺寸或任何视觉缺陷 。

公开(公告)号：US09239296B2

公开(公告)日：2016-01-19

申请号：US14217848

申请日：2014-03-18

Applicant: Corning Incorporated

Inventor： Joseph Henry Citriniti ,  Parasuram Padmanabhan Harihara

IPC: G01N21/00 ,  G01N21/89 ,  G01N21/95 ,  B28B17/00 ,  B28B19/00 ,  G01N21/952

CPC classification number: B28B19/0023 ,  B01D46/2418 ,  B01D2279/30 ,  B28B17/0072 ,  B28B19/0038 ,  C04B38/0006 ,  C04B41/009 ,  C04B41/5076 ,  C04B41/85 ,  G01N21/8422 ,  G01N21/8914 ,  G01N21/95 ,  G01N21/952 ,  G01N21/95692 ,  G01N2201/06113 ,  G01N2201/103

Abstract: An in situ inspection system and method to inspect a honeycomb body skin in a skinning system. The inspection system includes a line illuminator to generate a line illumination on the skin perpendicular to an axial direction of the honeycomb body travel, and a detector to detect the line illumination scattered from the skin and generate a signal based on the detected line illumination. A controller is configured to receive the signal generated by the detector, compare the received signal to a previously stored defect free signal in real-time, and control at least one skinning process parameter based on the comparison. The method includes in situ inspecting the skin and controlling at least one skinning process parameter based on the inspection. In the method, the in situ inspection includes illuminating a line of the skin perpendicular to the axial direction and detecting the illuminated line scattered from the skin.

Abstract translation: 一种在皮肤系统中检测蜂窝体皮肤的原位检查系统和方法。 该检查系统包括：垂直于蜂窝体行进轴向的皮肤上产生线照明的线照明器;检测器，用于检测从皮肤散射的线照明，并根据所检测的线照明产生信号。 控制器被配置为接收由检测器产生的信号，将接收到的信号与先前存储的无缺陷信号进行实时比较，并且基于该比较来控制至少一个剥皮处理参数。 该方法包括基于检查原位检查皮肤并控制至少一个剥皮过程参数。 在该方法中，原位检查包括照射垂直于轴向的皮肤线并检测从皮肤散射的照明线。

公开(公告)号：US20150276605A1

公开(公告)日：2015-10-01

申请号：US14438255

申请日：2013-11-06

Applicant: SHARP KABUSHIKI KAISHA

Inventor： Ryohhei Kawamuki

IPC: G01N21/64

CPC classification number: G01N21/6486 ,  G01N21/6454 ,  G01N21/6456 ,  G01N27/44721 ,  G01N27/44778 ,  G01N2021/6463 ,  G01N2201/061 ,  G01N2201/10 ,  G01N2201/103 ,  G01N2201/105

Abstract: A fluorescence detection device includes: a light source that emits excitation light in a first direction; a base unit (30) to which the light source is attached; an opening (30a) that is provided on a side in the first direction of the base unit (30) with respect to the light source; a cantilever (31) that is cantilevered to the base unit (30) to extend from an inner edge of the opening (30a) toward a center side of the opening (30a); an optical path conversion unit (20) that is fixed to a free end of the cantilever (31), converts a traveling direction of the excitation light emitted from the light source into a second direction different from the first direction, and irradiates a measurement object with the excitation light turned in the second direction; and a photodetection element that is disposed on a side of the opening (30a) opposite to the measurement object and detects fluorescence passing through the opening (30a) in fluorescence emitted from the measurement object irradiated with the excitation light. Accordingly, a loss in the fluorescence guided to the photodetection element can be reduced, and thus fluorescence detection efficiency can be improved.

Abstract translation: 荧光检测装置包括：在第一方向上发射激发光的光源; 安装光源的基座单元（30）; 相对于所述光源设置在所述基座单元（30）的所述第一方向的一侧的开口（30a） 悬臂（31），其悬臂连接到所述基座单元（30），以从所述开口（30a）的内边缘朝向所述开口（30a）的中心侧延伸; 固定到悬臂（31）的自由端的光路转换单元（20）将从光源发射的激发光的行进方向转换成与第一方向不同的第二方向，并且照射测量对象 激发光在第二个方向转动; 以及光检测元件，其设置在与所述测量对象相对的所述开口（30a）的一侧，并且检测从所述激发光照射的所述测量对象发出的荧光中穿过所述开口（30a）的荧光。 因此，可以降低引导到光检测元件的荧光的损失，从而可以提高荧光检测效率。

公开(公告)号：US20150226682A1

公开(公告)日：2015-08-13

申请号：US14422081

申请日：2013-08-23

Applicant: LUOYANG LANDGLASS TECHNOLOGY CO., LTD

Inventor： Yanbing Li ,  Bin Liu

IPC: G01N21/958 ,  G01B11/16 ,  G01B11/06 ,  C03B35/00 ,  G01B11/25

CPC classification number: G01N21/958 ,  C03B35/00 ,  G01B11/0691 ,  G01B11/167 ,  G01B11/2518 ,  G01B11/2522 ,  G01N21/49 ,  G01N21/8806 ,  G01N21/896 ,  G01N2201/06113 ,  G01N2201/103 ,  H04N7/00

Abstract: A detection system based on modulation of line structured laser image of glass comprises processing section (2), control system, and roller conveying mechanisms (5). Detection mechanism (6) provided over entrance of the processing section (201) comprises shell and camera (602) with laser (601) which emits beam on the surface of the glass in the gap between sliding rollers. Focal plane of the camera (602) corresponds to the beam irradiation surface, and signal output terminal of the camera (602) is connected with the control system in such a way that when glass passes the detection area, laser irradiates the glass surface and the line structured laser is modulated based on the glass to form laser modulation image with distribution of light and shade, staggered movement direction, or distorted laser lines. The camera (602) will transmit the captured glass information and parameters to the control system. In the system, the detection mechanism (6), with integral design and compact structure, can be easily fitted over the entrance of the processing section (201), has strong adaptation to other processing means, has no special requirements on incident angle of light and angle of detection surface during detection, and obtains highly accurate data through measurement.

Abstract translation: 基于玻璃线结构激光图像调制的检测系统包括处理部分（2），控制系统和辊子输送机构（5）。 设置在处理部分201的入口处的检测机构（6）包括具有激光器（601）的外壳和照相机（602），其在滑动辊之间的间隙中在玻璃表面上发射光束。 照相机（602）的焦平面对应于光束照射面，照相机（602）的信号输出端子与控制系统连接，使得当玻璃通过检测区域时，激光照射玻璃表面和 基于玻璃调制线结构化激光，形成具有光阴分布，移动方向错位或激光线失真的激光调制图像。 相机（602）将捕获的玻璃信息和参数传送到控制系统。 在系统中，具有一体化设计和结构紧凑的检测机构（6）可以很容易地安装在加工部分（201）的入口处，具有很强的适应其他加工手段，对光入射角没有特殊要求 检测时的检测面角度，通过测量获得高精度的数据。

公开(公告)号：US20150028226A1

公开(公告)日：2015-01-29

申请号：US14378674

申请日：2013-02-20

Applicant: Sharp Kabushiki Kaisha

Inventor： Yukio Watanabe

IPC: G01N21/64 ,  G02B21/00

CPC classification number: G01N21/645 ,  G01N21/6456 ,  G01N21/6486 ,  G01N2021/6471 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/10 ,  G01N2201/103 ,  G01N2201/105 ,  G02B19/0028 ,  G02B19/0076 ,  G02B19/008 ,  G02B19/0085 ,  G02B21/0076 ,  G02B2207/113

Abstract: Even when the distance from an objective lens to a sample differs, the distribution of light from the sample can be detected accurately.A first lens 23 for converting light from the objective lens into parallel light is composed of a concave lens part 32 having a concave curved face 32c in a center portion of a flat face 32a, and a convex lens part 33 having a convex curved face 33c around a flat face 33b. Further, the first lens 23 includes first and second regions for diverging light through the flat face 33b and the concave curved face 32c and a third region for collecting light through the convex curved face 33c and the concave curved face 32c. When the sample is placed on a sample table while being sealed in a two-dimensional electrophoresis substrate, light totally reflected by a side surface of the objective lens is caused to enter the second region. In contrast, when the sample is directly placed on the sample table, the light is caused to enter the third region. As a result, in any of the cases, the rays of light d emitted from the first lens 23 are nearly parallel to one another, and are nearly parallel to the optical axis.

Abstract translation: 即使当从物镜到样品的距离不同时，可以准确地检测来自样品的光的分布。 用于将来自物镜的光转换成平行光的第一透镜23由在平面32a的中心部分具有凹曲面32c的凹透镜部32和具有凸曲面33c的凸透镜部33 围绕平面33b。 此外，第一透镜23包括用于使光通过平面33b和凹曲面32c发散的第一和第二区域，以及用于通过凸曲面33c和凹曲面32c收集光的第三区域。 当样品被放置在样品台上同时密封在二维电泳基片中时，由物镜的侧面全反射的光进入第二区域。 相反，当将样品直接放置在样品台上时，使光进入第三区域。 结果，在任何情况下，从第一透镜23发射的光线d几乎彼此平行，并且几乎平行于光轴。

公开(公告)号：US08755044B2

公开(公告)日：2014-06-17

申请号：US13565702

申请日：2012-08-02

Applicant: Juergen Reich ,  Charles Amsden ,  Jiayao Zhang ,  Christian Wolters

Inventor： Juergen Reich ,  Charles Amsden ,  Jiayao Zhang ,  Christian Wolters

IPC: G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2021/555 ,  G01N2021/8835 ,  G01N2021/8845 ,  G01N2201/103 ,  H01L22/12

Abstract: The illumination power density of a multi-spot inspection system is adjusted in response to detecting a large particle in the inspection path of an array of primary illumination spots. At least one low power, secondary illumination spot is located in the inspection path of an array of relatively high power primary illumination spots. Light scattered from the secondary illumination spot is collected and imaged onto one or more detectors without overheating the particle and damaging the wafer. Various embodiments and methods are presented to distinguish light scattered from secondary illumination spots. In response to determining the presence of a large particle in the inspection path of a primary illumination spot, a command is transmitted to an illumination power density attenuator to reduce the illumination power density of the primary illumination spot to a safe level before the primary illumination spot reaches the large particle.

Abstract translation: 响应于检测主照明点阵列的检查路径中的大颗粒，调整多点检查系统的照明功率密度。 至少一个低功率次级照明点位于相对较高功率的初级照明点的阵列的检查路径中。 从二次照明点散射的光被收集并成像到一个或多个检测器上，而不会使颗粒过热并损坏晶片。 呈现各种实施例和方法来区分从二次照明点散射的光。 响应于确定主照明点的检查路径中的大颗粒的存在，将命令发送到照明功率密度衰减器，以将主照明点的照明功率密度降低到初级照明点之前的安全水平 到达大颗粒。

公开(公告)号：US20140009756A1

公开(公告)日：2014-01-09

申请号：US13929030

申请日：2013-06-27

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shigeru MATSUI

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N2201/103

Abstract: A surface inspecting apparatus rotates a semiconductor wafer 100 (inspection object) as a main scan while translating the semiconductor wafer 100 as an auxiliary scan, illuminates the surface of the semiconductor wafer 100 with illuminating light 21, thereby forms an illumination spot 3 as the illumination area of the illuminating light 21, detects scattered or diffracted or reflected light from the illumination spot, and detects a foreign object existing on the surface of the semiconductor wafer 100 or in a part of the semiconductor wafer 100 in the vicinity of the surface based on the result of the detection. In the surface inspecting apparatus, the translation speed of the auxiliary scan is controlled according to the distance from the rotation center of the semiconductor wafer 100 in the main scan to the illumination spot. With this control, the inspection time can be shortened while the deterioration in the detection sensitivity and the increase in the thermal damage during the surface inspection are suppressed.

Abstract translation: 表面检查装置将作为辅助扫描的半导体晶片100作为主扫描旋转半导体晶片100（检查对象），用照明光21照射半导体晶片100的表面，从而形成照明点3作为照明 照射光21的区域，检测来自照明光点的散射或衍射或反射的光，并且基于以下方式检测存在于半导体晶片100的表面上的异物或半导体晶片100的表面附近的异物 检测结果。 在表面检查装置中，根据从主扫描中的半导体晶片100的旋转中心到照明点的距离来控制辅助扫描的平移速度。 通过该控制，可以在检测灵敏度的劣化和表面检查时的热损伤的增加被抑制的同时缩短检查时间。