公开(公告)号：US06570162B2

公开(公告)日：2003-05-27

申请号：US09926744

申请日：2001-12-11

Applicant: Masahiro Kiga ,  Atsushi Nakamura

Inventor： Masahiro Kiga ,  Atsushi Nakamura

IPC: H01J3710

CPC classification number: H01J33/00 ,  H01J33/02

Abstract: A method and apparatus (11) for irradiating an electron beam, wherein a triangular wave generator (22) provides a triangular wave current to a scanning coil (17) to move the electron beam in a first scanning direction (Y), while a square wave generator (21) provides a square wave current to a deflecting coil (16) to move the electron beam in a second scanning direction (X) orthogonal to the first scanning direction (Y). The triangular wave current provided from the triangular wave generator is modulated to cancel the effects of hysteresis in the scanning coil. Further, the rise of the square wave current is synchronized and shifted a prescribed interval in relation to the peak values of the triangular wave current in order to distribute the reversing points on the electron beam path along the second scanning direction.

公开(公告)号：US20030062488A1

公开(公告)日：2003-04-03

申请号：US10262997

申请日：2002-10-02

Inventor： Richard Lee Fink ,  Leif H. Thuesen

IPC: H01J033/00

CPC classification number: H01J33/00 ,  H01J2201/304

Abstract: By using a large area cathode, an electron source can be made that can irradiate a large area more uniformly and more efficiently than currently available devices. The electron emitter can be a carbon film cold cathode, a microtip or some other emitter. It can be patterned. The cathode can be assembled with electrodes for scanning the electron source.

Abstract translation: 通过使用大面积阴极，可以制造能够比现有的装置更均匀，更有效地照射大面积的电子源。 电子发射体可以是碳膜冷阴极，微尖端或其他一些发射极。 它可以被图案化。 阴极可以与用于扫描电子源的电极组装。

公开(公告)号：US20020134946A1

公开(公告)日：2002-09-26

申请号：US09926744

申请日：2001-12-11

Inventor： Masahiro Kiga ,  Atsushi Nakamura

IPC: H01J003/14

CPC classification number: H01J33/00 ,  H01J33/02

Abstract: A method and apparatus (11) for irradiating an electron beam, wherein a triangular wave generator (22) provides a triangular wave current to a scanning coil (17) to move the electron beam in a first scanning direction (Y), while a square wave generator (21) provides a square wave current to a deflecting coil (16) to move the electron beam in a second scanning direction (X) orthogonal to the first scanning direction (Y). The triangular wave current provided from the triangular wave generator is modulated to cancel the effects of hysteresis in the scanning coil. Further, the rise of the square wave current is synchronized and shifted a prescribed interval in relation to the peak values of the triangular wave current in order to distribute the reversing points on the electron beam path along the second scanning direction.

Abstract translation: 一种用于照射电子束的方法和装置（11），其中三角波发生器（22）向扫描线圈（17）提供三角波电流以沿第一扫描方向（Y）移动电子束，而方波 波发生器（21）向偏转线圈（16）提供方波电流，以沿与第一扫描方向（Y）正交的第二扫描方向（X）移动电子束。 由三角波发生器提供的三角波电流被调制以消除扫描线圈中的滞后效应。 此外，方波电流的上升相对于三角波电流的峰值被同步并移位规定的间隔，以便沿着第二扫描方向将反转点分布在电子束路径上。

公开(公告)号：US06327339B1

公开(公告)日：2001-12-04

申请号：US09450477

申请日：1999-11-29

Applicant: Kie Hyung Chung ,  Kang Ok Lee ,  Hyeok Jung Kwon ,  Sang Ho Kim

Inventor： Kie Hyung Chung ,  Kang Ok Lee ,  Hyeok Jung Kwon ,  Sang Ho Kim

IPC: H05H1310

CPC classification number: G21K5/04 ,  H01J33/00 ,  H01J35/14 ,  H01J2235/083 ,  H01J2235/1006 ,  H05H7/18

Abstract: An industrial X-ray/electron beam source includes an accelerator having a) a coaxial cavity b) an electron gun for emitting an electron beam to be accelerated, c) at least one deflection magnet positioned outside of the cavity, and d) a radio frequency power supply means for supplying power of a radio frequency to the cavity to induce TM010 mode as an accelerating mode in the cavity; and a beam irradiator having a two-dimensional scanning magnet which deflects accelerated beam by the accelerator, an extracting window for extracting the deflected electron beam to be irradiated to an object, and means for guiding the deflected beam toward a center of the extracting window in a radial direction. The source is advantageous in that the electron beams do not intersect inside the cavity, which can reduce beam loss, and that beams or X-rays are irradiated to the object spatially uniformly.

Abstract translation: 工业X射线/电子束源包括加速器，该加速器具有a）同轴腔体b）用于发射加速电子束的电子枪，c）位于空腔外部的至少一个偏转磁体，以及d）无线电 高频电源装置，用于向空腔提供射频的功率，以引导TM010模式作为腔中的加速模式; 以及具有二维扫描磁体的光束照射器，其使由加速器偏转加速光束，用于提取被照射到物体的偏转电子束的提取窗口，以及用于将偏转光束朝向提取窗口的中心引导的装置 径向。 该源的优点在于电子束在空腔内不相交，这可以减少光束损耗，并且将光束或X射线在空间上均匀地照射到物体上。

公开(公告)号：US5909032A

公开(公告)日：1999-06-01

申请号：US845513

申请日：1997-04-24

Applicant: George Wakalopulos

Inventor： George Wakalopulos

IPC: H01J37/06 ,  B29C35/08 ,  B29C71/04 ,  G21K5/04 ,  H01J5/18 ,  H01J33/00 ,  H01J33/04 ,  H01J37/065 ,  H01J37/30

CPC classification number: B29C71/04 ,  H01J33/00 ,  H01J33/04 ,  H01J37/06 ,  H01J5/18 ,  B29C2035/0877 ,  B29L2007/008 ,  B29L2031/3462 ,  H01J2237/164

Abstract: A modular electron beam device is disclosed, the device being housed in a modular enclosure containing a power supply subsystem coupled to provide power to an electron beam tube. The enclosure is shaped to permit stacking of plural such modular units in a way that the stripe-shaped beam emitted from each of the units completely irradiates a surface to be treated. Beams may lie on different lines but the combined beams sweep out a width on a surface which is a continuous span. In an alternate embodiment of the invention, the modular unit comprises a plurality of electron beam units, each comprising an electron tube and a filament and bias supply to power the tube. A single high voltage stack is common to the plural tube/filament/bias sub-units. A daisy-chain arrangement allows for the single high voltage stack to power all of the tube units. In yet another embodiment, the modular unit comprises a plurality of electron tubes powered by a single power supply.

Abstract translation: 公开了一种模块化电子束装置，该装置被容纳在一个模块化外壳中，该模块化外壳包含耦合以向电子束管提供电力的电源子系统。 外壳被成形为允许多个这样的模块化单元的堆叠，使得从每个单元发射的条形波束完全照射待处理的表面。 光束可能位于不同的线上，但是组合的光束扫过表面上的连续跨度的宽度。 在本发明的替代实施例中，模块化单元包括多个电子束单元，每个电子束单元包括电子管和灯丝以及用于给管供电的偏压电源。 单个高电压堆叠对于多个管/灯丝/偏压子单元是共同的。 菊花链布置允许单个高压堆叠为所有管单元供电。 在另一个实施例中，模块化单元包括由单个电源供电的多个电子管。

公开(公告)号：US5612588A

公开(公告)日：1997-03-18

申请号：US369127

申请日：1995-01-05

Applicant: George Wakalopulos

Inventor： George Wakalopulos

IPC: H01J37/06 ,  B29C35/08 ,  B29C71/04 ,  G21K5/04 ,  H01J5/18 ,  H01J33/00 ,  H01J33/04 ,  H01J37/30

CPC classification number: B29C71/04 ,  H01J33/00 ,  H01J33/04 ,  H01J37/06 ,  H01J5/18 ,  B29C2035/0877 ,  B29L2007/008 ,  B29L2031/3462 ,  H01J2237/164

Abstract: A vacuum tube electron beam device having a thin, single crystal, electron permeable, gas impermeable membrane for electron transmission and methods for making such a device. Single crystal membranes can have small thickness due to high strength, are highly transmissive to free electrons due to that small thickness. The ordered crystalline structure of such membranes provides minimal obstructions to electron beams, and yet is highly impermeable to penetration by gas and liquid molecules. Single crystals are anisotropically etched to precise membrane dimensions, and can also be etched to provide microchannel structures for flowing cooling fluid across the membrane during use. A doped silicon anode can provide support for the membrane with matching thermal expansion characteristics, and a crystalline anode can be integral with the membrane. A double membrane embodiment confines the cooling fluid so that it passes close to both membranes. A double membrane structure can also have a pressure between the membranes that is between the pressure within the vacuum tube and ambient pressure outside the vacuum tube, allowing the membranes to be thinner. The membrane can also be compressed for increased strength. A number of cooling methods are used to maintain the integrity of the membrane.

Abstract translation: 一种真空管电子束装置，其具有用于电子传输的薄的单晶，电子可透过的不透气膜以及用于制造这种装置的方法。 单晶膜由于高强度而具有较小的厚度，由于厚度小而对自由电子具有高透射性。 这种膜的有序晶体结构为电子束提供了最小的障碍，并且对于气体和液体分子的渗透是高度不可渗透的。 单晶被各向异性蚀刻到精确的膜尺寸，并且也可以被蚀刻以提供用于在使用期间使冷却流体流过膜的微通道结构。 掺杂的硅阳极可以为具有匹配热膨胀特性的膜提供支撑，并且结晶阳极可以与膜成一体。 双层膜实施例限制了冷却流体，使得其接近两个膜。 双膜结构还可以在真空管内的压力和真空管外部的环境压力之间的膜之间具有压力，允许膜更薄。 膜也可以被压缩以增加强度。 使用许多冷却方法来维持膜的完整性。

公开(公告)号：US5523577A

公开(公告)日：1996-06-04

申请号：US360372

申请日：1994-12-21

Applicant: Peter R. Schonberg ,  Russell G. Schonberg ,  David R. Fadness

Inventor： Peter R. Schonberg ,  Russell G. Schonberg ,  David R. Fadness

IPC: A62D3/00 ,  A62D3/15 ,  A62D3/34 ,  A62D3/38 ,  A62D101/20 ,  A62D101/22 ,  B01D53/00 ,  B01D53/32 ,  B01D53/34 ,  B01D53/75 ,  B01J19/08 ,  B01J19/12 ,  B01J19/24 ,  B09C1/00 ,  B09C1/06 ,  B09C1/08 ,  C02F1/00 ,  C02F1/30 ,  C02F1/72 ,  C02F1/76 ,  C02F1/78 ,  H01J33/00 ,  H01J33/02

CPC classification number: B01D53/007 ,  A62D3/15 ,  B01D53/323 ,  B01D53/75 ,  B01J19/085 ,  B01J19/2415 ,  B01J19/2425 ,  B09C1/00 ,  B09C1/06 ,  B09C1/08 ,  C02F1/30 ,  C02F1/722 ,  C02F1/76 ,  C02F1/766 ,  C02F1/78 ,  H01J33/00 ,  H01J33/02 ,  A62D2101/20 ,  A62D2203/10 ,  B01D2257/708 ,  B01D2259/812 ,  B01J2219/00076 ,  B01J2219/00103 ,  B01J2219/00132 ,  B01J2219/00153 ,  B01J2219/00159 ,  B01J2219/00162 ,  C02F1/008 ,  C02F1/305

Abstract: An electron beam source or generator is described for the treatment of toxic materials in a treatment system in which electron beams are reacted with a flowing influent in a reaction chamber. The system is modular allowing different configurations as demanded by the site and by the clean-up job. It is also portable in that it can be easily moved from place to place. If mounted on a movable base it can be taken from place to place for use.

公开(公告)号：US5134641A

公开(公告)日：1992-07-28

申请号：US594733

申请日：1990-10-09

Applicant: Dirk Friede ,  Volker Bruckner ,  Rudolf Baumgartl ,  Hans-Jurgen Cirkel

Inventor： Dirk Friede ,  Volker Bruckner ,  Rudolf Baumgartl ,  Hans-Jurgen Cirkel

IPC: H01J35/22 ,  H01J3/02 ,  H01J17/40 ,  H01J33/00 ,  H01J37/075 ,  H01J37/077 ,  H01S3/09 ,  H01S3/0971 ,  H05G2/00

CPC classification number: H05G2/003 ,  H01J17/40 ,  H01J3/025 ,  H01J33/00 ,  H01S3/09716

Abstract: A plasma X-ray tube, which can be referred to as a one-chamber ionizing tube for pre-ionizing TE lasers, in particular excimer lasers, includes an extended, box-like housing with a U-shaped hollow cathode which is disposed in the interior of the housing and is also elongated. The open side of the hollow electrode faces an X-ray target which is in the form of a gas-tight foil. Between the X-ray target and the hollow cathode is a long wire-shaped igniting electrode. When a positive voltage or a voltage pulse is applied to the igniting electrode, an electrical field is formed around it. Electrons that are present are forced onto a long, spiral path and gas atoms are ionized under the influence of the electrical field and because of ambient radiation. Electron avalanches form and lead to initiation of a wire discharge. When the accelerator voltage, which is typically at most between 60 kV and 120 kV, is applied to the hollow cathode low-pressure plasma, ions are extracted and accelerated against the hollow cathode. When the ions impact, secondary electrons are emitted from the hollow cathode and are accelerated in the opposite direction, so that an electron beam forms and strikes the X-ray target to generate X-ray retarding radiation. The plasma X-ray tube is fundamentally suitable as an electron gun, with a suitable electron-beam permeable configuration of a foil that covers the window opening in the target retaining wall and serves as an electron window.

Abstract translation: 等离子体X射线管，其可以被称为用于预电离TE激光器的单室电离管，特别是准分子激光器，包括具有U形中空阴极的延伸的盒状壳体，其设置在 外壳的内部也是细长的。 中空电极的开放面面对呈气密箔形式的X射线靶。 在X射线靶和空心阴极之间是长线形点火电极。 当向点火电极施加正电压或电压脉冲时，在其周围形成电场。 存在的电子被强制到长的螺旋路径上，并且气体原子在电场的影响下以及由于环境辐射而被电离。 形成电子雪崩并导致引线放电。 当通常在60kV和120kV之间的加速器电压被施加到空心阴极低压等离子体时，离子被提取并抵抗空心阴极加速。 当离子撞击时，二次电子从空心阴极发射并沿相反方向加速，使得电子束形成并撞击X射线靶以产生X射线延迟辐射。 等离子体X射线管基本上适合作为电子枪，具有覆盖目标挡土墙中的窗口开口并用作电子窗口的箔的合适的电子束可透过构型。

公开(公告)号：US5126633A

公开(公告)日：1992-06-30

申请号：US737240

申请日：1991-07-29

Applicant: Tzvi Avnery ,  Arthur W. Sommerstein ,  Rolfe W. Graham

Inventor： Tzvi Avnery ,  Arthur W. Sommerstein ,  Rolfe W. Graham

IPC: H01J3/02 ,  H01J33/00 ,  H01J37/06

CPC classification number: H01J3/029 ,  H01J33/00 ,  H01J37/06

Abstract: A novel electron beam apparatus and technique wherein a plurality of longitudinally extending heated filaments is employed, each similarly offset laterally of a central longitudinal axis, but with successive filaments alternately disposed on opposite sides of said axis and cooperating with a first low velocity accelerating stage comprising staggered grid slots and openings, and a high velocity second accelerating stage to provide long uniform longitudinal electron beams.

Abstract translation: 一种新颖的电子束装置和技术，其中使用多个纵向延伸的加热细丝，各自类似地偏离中心纵向轴线横向，但是连续的细丝交替地设置在所述轴线的相对侧上并且与第一低速加速台配合，包括 交错网格槽和开口，以及高速第二加速级，以提供长均匀的纵向电子束。

公开(公告)号：US4931700A

公开(公告)日：1990-06-05

申请号：US239681

申请日：1988-09-02

Applicant: Jay L. Reed

Inventor： Jay L. Reed

IPC: H01J3/02 ,  H01J33/00

CPC classification number: H01J3/021 ,  H01J33/00 ,  H01J2237/006 ,  H01J2237/06325 ,  H01J2237/31

Abstract: A cold cathode electron gun utilizes a metallic torus for electrostatic focusing of an electron beam. A nonconductive tube is disposed within and along the axis of the torus. A conductive aerodynamic body electrically connected to the torus forms an annular venturi in the tube and includes a face which serves as a high field emitting surface. High molecular weight gas is introduced into a proximal end of the tube at a stagnation pressure sufficient to produce supersonic flow thereby causing a vacuous gas region adjacent the emitting surface. The torus and emitting surface are driven to a very high negative potential by a Tesla transformer or the like, producing high field emission into the vacuous region. The electric field of the torus produces, from the emitted electrons, an electron beam which issues from the tube into the atmosphere.

Abstract translation: 冷阴极电子枪利用金属圆环进行电子束的静电聚焦。 非导电管设置在环形轴线内并沿着环形轴的轴线。 电连接到环面的导电空气动力体在管中形成环形文氏管并且包括用作高场发射表面的面。 将高分子量气体以足以产生超音速流的停滞压力引入管的近端，从而导致邻近发射表面的真空气体区域。 环面和发射表面被特斯拉变压器等驱动到非常高的负电位，从而产生高空间发射到真空区域。 环面的电场从发射的电子产生从管发射到大气中的电子束。