公开(公告)号：US20050034767A1

公开(公告)日：2005-02-17

申请号：US10945727

申请日：2004-09-21

Applicant: Peter Reimer ,  Pedram Sabouri ,  Dennis Smith

Inventor： Peter Reimer ,  Pedram Sabouri ,  Dennis Smith

IPC: F17C13/00 ,  B01J3/02 ,  F04B37/16 ,  F04C25/02 ,  F04C28/08 ,  H01L21/00 ,  H01L21/02 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  C23C16/00 ,  F04F3/00

CPC classification number: H01L21/6719 ,  F04D17/168 ,  F04D19/04 ,  F04D27/0261 ,  F04D29/4213 ,  F04D29/601 ,  H01L21/67017 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/67196 ,  Y10T137/86035 ,  Y10T137/86083 ,  Y10T137/86139 ,  Y10T137/86163

Abstract: An apparatus 115 for processing a substrate 20, comprises an integrated pumping system 155 having a high operating efficiency, small size, and low vibrational and noise levels. The apparatus 115 comprises a chamber, such as a load-lock chamber 110, transfer chamber 115, or process chamber 120. An integrated pump 165 is abutting or adjacent to one of the chambers 110, 115, 120 for evacuating gas from the chambers. In operation, the pump is located within the actual envelope or footprint of the apparatus and has an inlet 170 connected to a chamber 110, 115, 120, and an outlet 175 that exhausts the gas to atmospheric pressure. Preferably, the integrated pump 165 comprises a pre-vacuum pump or a low vacuum pump and is housed in a noise reducing enclosure having means for moving the pump between locations and means for stacking pumps vertically in use.

Abstract translation: 用于处理衬底20的设备115包括具有高操作效率，小尺寸和低振动和噪声水平的集成泵送系统155。 设备115包括诸如加载锁定室110，传送室115或处理室120的室。集成泵165邻接或邻近其中一个室110,115,120，用于从室抽空气体。 在操作中，泵位于设备的实际封壳或占地面积内，并且具有连接到室110,115,120的入口170和将气体排出到大气压的出口175。 优选地，集成泵165包括预真空泵或低真空泵，并且容纳在具有用于在位置之间移动泵的装置的降噪外壳和用于在使用中垂直堆叠的装置的装置。

公开(公告)号：US6122921A

公开(公告)日：2000-09-26

申请号：US233393

申请日：1999-01-19

Applicant: Thomas Brezoczky ,  Murali Narasimhan

Inventor： Thomas Brezoczky ,  Murali Narasimhan

IPC: B01J3/02 ,  B01J20/20 ,  C23C14/00 ,  F04B37/08 ,  B01D8/00

CPC classification number: F04B37/085

Abstract: The present invention provides a regeneration shield 22 for a vacuum system, typically used in the processing of integrated circuits. The regeneration shield protects fragile arrays 13, having a dislocatable material 16, such as charcoal, in a high vacuum pump 4 from volatile regeneration gases, which impinge the fragile material on the array and dislocate that material to cause pumping inefficiencies and scrap. The shield may be planar, concave, or convex and may have sides. The shield may also have inwardly and outwardly extending flanges.

Abstract translation: 本发明提供一种用于真空系统的再生屏蔽22，其通常用于集成电路的处理。 再生屏蔽保护脆性阵列13，其具有位于高真空泵4中的易挥发物质16（例如木炭）的易挥发的再生气体，其将脆性材料撞击在阵列上并使该材料脱位以引起泵低效率和废料。 屏蔽可以是平面的，凹的或凸的，并且可以具有侧面。 护罩还可具有向内和向外延伸的凸缘。

公开(公告)号：US6010041A

公开(公告)日：2000-01-04

申请号：US6818

申请日：1998-01-14

Applicant: Emile Lonardi ,  Romain Frieden ,  Jorg Brinckmann ,  Patrick Hutmacher

Inventor： Emile Lonardi ,  Romain Frieden ,  Jorg Brinckmann ,  Patrick Hutmacher

IPC: B01D33/21 ,  B01J3/02 ,  B65G53/46 ,  G01F11/28

CPC classification number: B65G53/4691 ,  B01D33/21 ,  B01J3/02

Abstract: A device for the discharge of bulk material (96) from a pressure vessel (2) is proposed, which comprises at least one sluice bin (24, 26) with a bottom (42, 44) and a top (40) sluice gate. The sluice bin (24, 26) is arranged under a plate (76, 76'), into which it forms an orifice (28, 30) for the bulk material (96). The top sluice gate (40) has a sealing plate (66), which is arranged above this plate (76, 76') in such a way that it can be positioned above the orifice (28, 30) of the sluice bin (24, 26) and, after a sealing connection to the edge of the orifice (28, 30) has been made, can be forced against this edge by overpressure in the pressure vessel (2).

Abstract translation: 提出了一种用于从压力容器（2）排放散装材料（96）的装置，其包括至少一个具有底部（42,44）和顶部（40）闸门的闸门仓（24,26）。 闸门箱（24,26）布置在板（76,76'）的下方，其形成用于散装材料（96）的孔口（28,30）。 顶部闸门（40）具有密封板（66），该密封板（66）设置在该板（76,76'）的上方，使得其可以位于闸箱（24）的孔口（28,30）上方 ，26），并且在已经制造了与孔口（28,30）的边缘的密封连接之后，可以通过压力容器（2）中的超压而被迫靠在该边缘上。

公开(公告)号：US5763541A

公开(公告)日：1998-06-09

申请号：US760187

申请日：1996-12-04

Applicant: Duan-Fan Wang ,  Robert Lorenz Boysen ,  Leonard Sebastian Scarola ,  Gary Harry Williams

Inventor： Duan-Fan Wang ,  Robert Lorenz Boysen ,  Leonard Sebastian Scarola ,  Gary Harry Williams

IPC: B01J3/02 ,  B01J8/00 ,  B01J8/24 ,  C08F2/00 ,  C08F2/34 ,  C08F10/00

CPC classification number: C08F10/00 ,  B01J3/02 ,  B01J8/0015 ,  B01J8/24 ,  Y10S526/901

Abstract: The present invention provides a process and apparatus for feeding powders such as fine, cohesive, or powdery particulate materials from a low pressure system to a high pressure system. There is provided in a preferred embodiment a process and apparatus of pressurizing and feeding carbon black fluff to a polymerization reactor, particularly a gas phase fluidized polymerization reactor to provide for a close-coupling of a carbon black reactor to a polymerization reactor.

Abstract translation: 本发明提供了一种从低压系统向高压系统将粉末，例如细小的，内聚的或粉末状的颗粒材料进料的方法和装置。 在优选实施方案中提供了将炭黑绒毛加压和供给到聚合反应器，特别是气相流化聚合反应器以提供碳黑反应器与聚合反应器的紧密耦合的方法和装置。

公开(公告)号：US5476635A

公开(公告)日：1995-12-19

申请号：US271143

申请日：1994-07-06

Applicant: Pieter W. Stoker

Inventor： Pieter W. Stoker

IPC: A61L2/07 ,  A61L2/24 ,  B01J3/02 ,  B01J3/04 ,  A61L2/06

CPC classification number: A61L2/07 ,  A61L2/24 ,  B01J3/02 ,  B01J3/04

Abstract: An autoclave 10 has a first vessel 12 in which objects are heated, and a second vessel 14 in which the objects are cooled down. A container 24 containing the objects is introduced via a preheating chamber 30 into a chamber 20, and thence into the cavity 16 of the vessel 12. Similarly, at the downstream end of the second vessel 14, a container is removed from a cavity 18 via a chamber 22. Transfer of containers is effected in a manner similar to operation of a lock to limit loss of pressure. When a container is thus removed and a fresh container is loaded, containers in the cavity 16 are advanced upwardly and containers in the cavity 18 are advanced downwardly. A container at the top of the cavity 16 is laterally displaced to the top of the cavity 18, via a chamber 19. The autoclave is thus operated continuously, stepwise. Pressures and temperatures are monitored via an interface 32 and a computer 34. Sterilization values for the objects are computed and advance of the containers are dependant on appropriate sterilization values being obtained.

Abstract translation: 高压釜10具有第一容器12，其中物体被加热，以及第二容器14，其中物体被冷却。 容纳物体的容器24通过预热室30被引入到腔室20内，然后进入容器12的空腔16中。类似地，在第二容器14的下游端，容器从空腔18通过 容器22的转移以类似于锁的操作的方式进行以限制压力损失。 当容器因此被移除并且装满新鲜的容器时，空腔16中的容器向上推进并且空腔18中的容器向下推进。 空腔16顶部的容器通过腔室19横向移动到空腔18的顶部。因此，高压釜逐步地连续地操作。 通过接口32和计算机34监测压力和温度。计算对象的灭菌值，并且容器的推进取决于获得的适当灭菌值。

公开(公告)号：US5470540A

公开(公告)日：1995-11-28

申请号：US459286

申请日：1995-06-02

Applicant: Robert Pes

Inventor： Robert Pes

IPC: C08F2/00 ,  B01J3/02 ,  B01J8/00 ,  C08F2/34 ,  C08F4/60 ,  C08F4/654 ,  C08F10/00 ,  G01F11/28 ,  B01J8/08

CPC classification number: G01F11/28 ,  B01J3/02 ,  B01J8/0035 ,  C08F10/00 ,  C08F2/34 ,  Y02P20/582 ,  Y10T137/3127 ,  Y10T137/86196

Abstract: An apparatus and method for introducing a predetermined volume of suspension into a reactor from a storage vessel. According to the invention the storage vessel is connected via a first conduit to an intermediate vessel which is in turn connected to a feed vessel via a second conduit, the feed vessel is connected via a third conduit to the reactor, each of the first, second and third conduits, is provided with a shut-off valve, the vessels, conduits and valves being so arranged that the suspension can be transferred by gravity from the storage vessel to the intermediate vessel and from the intermediate vessel to the feed vessel and can be transferred from the feed vessel to the reactor by gravity and/or the effect of pressure difference between the feed vessel and the reactor. The present invention also relates to a process for introducing a predetermined volume of suspension into a reactor using the apparatus.

Abstract translation: 一种用于将预定体积的悬浮液从储存容器引入反应器的装置和方法。 根据本发明，储存容器经由第一导管连接到中间容器，中间容器又通过第二导管连接到进料容器，进料容器经由第三导管连接到反应器，第一，第二 和第三导管设置有截止阀，容器，导管和阀被布置成使悬浮液可以通过重力从储存容器转移到中间容器，并且从中间容器转移到进料容器，并且可以是 从进料容器通过重力和/或进料容器和反应器之间的压差的影响从进料容器转移到反应器。 本发明还涉及使用该装置将预定体积的悬浮液引入反应器的方法。

公开(公告)号：US5441376A

公开(公告)日：1995-08-15

申请号：US868912

申请日：1992-04-15

Applicant: Susan M. Napierkowski ,  Arthur T. Nagare

Inventor： Susan M. Napierkowski ,  Arthur T. Nagare

IPC: B01J3/00 ,  B01J3/02 ,  B65G69/00

CPC classification number: B01J3/02 ,  B01J3/002

Abstract: An apparatus for transferring a loading car to a sterilizer chamber having a frame defining an opening, the apparatus comprises a chamber track adapted for supporting the loading car and wherein the chamber track is positioned within the chamber; a carriage track adapted for supporting the loading car and wherein the carriage track is configured to extend parallel to and in axial alignment with the chamber track; connecting devices mounted on an end of the carriage track; and a bridge having a top surface and a bottom surface, the bridge pivotally mounted adjacent the opening of the chamber wherein the bridge may pivot between an open and a closed position, the top surface adapted for supporting the loading car, and the bridge having receiving devices adapted for receiving the connecting devices when the bridge is in the open position.

Abstract translation: 一种用于将装载车辆转移到具有限定开口的框架的灭菌室的装置，该装置包括适于支撑装载车的室轨道，并且其中室轨道定位在室内; 支架轨道，其适于支撑所述装载车，并且其中所述滑架轨道被构造为平行于所述腔室轨道并与所述腔室轨道轴向对准; 安装在所述滑架轨道的端部上的连接装置; 以及桥，其具有顶表面和底表面，所述桥枢转地安装在所述室的开口附近，其中所述桥可在打开和关闭位置之间枢转，所述顶表面适于支撑所述装载车，并且所述桥具有接收 适用于在桥梁处于打开位置时接收连接装置的装置。

公开(公告)号：US5400725A

公开(公告)日：1995-03-28

申请号：US26691

申请日：1993-03-04

Applicant: Roine Brannstrom

Inventor： Roine Brannstrom

IPC: F23C10/16 ,  B01J3/02 ,  F23C10/22 ,  F23K3/02 ,  F23G5/00

CPC classification number: B01J3/02 ,  F23C10/22 ,  F23K3/02

Abstract: A method of feeding particulate material into a pressurized fluidized bed combustor including the steps of: feeding the particulate material from a source which is at a substantially lower pressure than that existing in the pressurized fluidized bed combustor into the upper end of an elongate, generally vertical gravity feed conduit constructed to have an inner bore which is substantially smaller at its lower end than at its upper end, and selecting the vertical height of the feed conduit and the extent of reduction in its bore over its length to ensure that the particulate material will move by gravity between the open input end of the conduit and the pressurized fluidized bed combustor notwithstanding the difference in pressure between the pressurized combustor and at the input end of the conduit.

Abstract translation: 将颗粒材料进料到加压流化床燃烧器中的方法，包括以下步骤：将颗粒材料从处于基本上比在加压流化床燃烧器中存在的压力低得多的源进料到细长的，大致垂直的 重力进料管道被构造成具有在其下端处比其上端基本上更小的内孔，并且选择进料管道的垂直高度以及其孔中其长度上的减小程度，以确保颗粒材料将 尽管压力燃烧器和管道的输入端之间的压力差异，管道的开放输入端与加压流化床燃烧器之间的重力也移动。

公开(公告)号：US5391260A

公开(公告)日：1995-02-21

申请号：US37459

申请日：1993-03-26

Applicant: Akitaka Makino ,  Naoyuki Tamura ,  Tetsunori Kaji

Inventor： Akitaka Makino ,  Naoyuki Tamura ,  Tetsunori Kaji

IPC: B01J3/02 ,  B01J19/08 ,  H01L21/00 ,  H01L21/205 ,  C23C16/00

CPC classification number: H01L21/67069 ,  Y10S438/935

Abstract: To improve an actual exhaust speed, in a vacuum processing device for processing a work located in a vacuum processing chamber by using a processing gas introduced into the vacuum processing chamber, the vacuum processing device having means for introducing the processing gas into the vacuum processing chamber, means for controlling a gas flow of the processing gas, and means for exhausting the processing gas after the work is processed by the processing gas; the exhausting means comprises an exhaust pump, a buffer space extended in a direction substantially perpendicular to a center of the work with an extended area larger than a size of a suction port of the exhaust pump, and a gas outlet formed on a back side of a surface of the work to be processed, the gas outlet having a size substantially equal to or larger than the size of the suction port of the exhaust pump.

Abstract translation: 为了提高实际的排气速度，在真空处理装置中，通过使用引入到真空处理室中的处理气体来处理位于真空处理室中的工件的真空处理装置，该真空处理装置具有将处理气体引入真空处理室 用于控制处理气体的气体流动的装置，以及在处理气体处理了工件之后排出处理气体的装置; 排气装置包括排气泵，在大致垂直于工件中心的方向延伸的缓冲空间，其延伸面积大于排气泵的吸入口的尺寸;以及气体出口，形成在排气泵的背面 要处理的工件的表面，气体出口的尺寸基本上等于或大于排气泵的吸入口的尺寸。

公开(公告)号：US5286276A

公开(公告)日：1994-02-15

申请号：US940993

申请日：1992-09-04

Applicant: Paul Holmes ,  Stephen M. Jones

Inventor： Paul Holmes ,  Stephen M. Jones

IPC: B01F13/04 ,  B01F15/00 ,  B01J3/02 ,  B01J3/04 ,  B01J19/00 ,  C01G23/04 ,  C21D11/00

CPC classification number: B01J19/002 ,  B01F15/00123 ,  B01J2219/00272

Abstract: A quench system which can be used to quench a continuous reaction such as the continuous digestion of titaniferous ores with sulphuric acid is provided. The quench system comprises a pressure vessel (1) equipped with a full bore outlet valve (5) connected to a reaction vessel (7) which may require quenching. The pressure vessel is partly filled with a liquid (18) and the ullage is occupied by a gas under pressure, the pressure being sufficient to discharge the liquid through the outlet valve (5) when open. The reaction vessel is equipped with means to detect cessation of stirring therein or power failure and the full bore valve is equipped with means (19) to open when cessation of stirring or power failure is detected.Operation of the quench system enables a reaction to be rapidly cooled and diluted to prevent solidification and the problems associated therewith in the event of the reactants being unstirred.

Abstract translation: 提供了可用于淬火连续反应（例如用硫酸连续消解含钛矿石）的淬火系统。 所述骤冷系统包括装有连接到可能需要淬火的反应容器（7）的全孔出口阀（5）的压力容器（1）。 压力容器部分地填充有液体（18），并且空气被压力下的气体占据，该压力足以在打开时将液体通过出口阀（5）排出。 反应容器装有用于检测其中搅拌停止或断电的装置，并且全孔阀装备有当检测到停止搅拌或断电时打开的装置（19）。 骤冷系统的操作使得反应能够快速冷却和稀释以防止固化，并且在反应物不被搅拌的情况下与其相关的问题。