中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

201 records (took 0.052 seconds)

    Systems and methods for dual-mode optical sensing
    131.
    发明授权
    Systems and methods for dual-mode optical sensing 有权
    双模光学感测的系统和方法

    公开(公告)号：US09194751B1

    公开(公告)日：2015-11-24

    申请号：US14030670

    申请日：2013-09-18

    Applicant: The Boeing Company

    Inventor： Daniel Yap ,  Oleg M. Efimov

    IPC: G01J1/00 ,  G01J5/08 ,  F41G7/22 ,  G02B13/14 ,  G01J3/36 ,  F41G7/00

    CPC classification number: G01J1/00 ,  F41G7/008 ,  F41G7/2253 ,  F41G7/226 ,  F41G7/2293 ,  G01J3/36 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0853 ,  G01J5/0862 ,  G01J5/0878 ,  G01J5/10 ,  G01J5/602 ,  G01J2005/0077 ,  G01S3/781 ,  G01S3/784 ,  G02B13/14 ,  G02B13/146

    Abstract: Systems and methods for dual-mode optical sensing are provided. One system includes a focal-plane array (FPA) imaging detector configured to detect light of a first wavelength range and an illuminated-spot locating detector (ISLD) including an array of light-detecting elements configured to detect light of a second wavelength range, wherein the ISLD has a transparency to light of the first wavelength range. The system further includes a wavelength-selective optical diffuser configured to diffuse light of the second wavelength range, wherein the shortest wavelength of the first range is larger than the longest wavelength of the second range, the ISLD is positioned such that the light to be detected by the FPA imaging detector first passes through the ISLD, and the FPA imaging detector, the ISLD and the wavelength-selective diffuser share a common optical axis.

    Abstract translation: 提供了双模光学感测的系统和方法。 一个系统包括被配置为检测第一波长范围的光的焦平面阵列（FPA）成像检测器和包括被配置为检测第二波长范围的光的光检测元件阵列的照明点定位检测器（ISLD） 其中所述ISLD具有对所述第一波长范围的光的透明度。 该系统还包括配置成漫射第二波长范围的波长选择性光漫射器，其中第一范围的最短波长大于第二范围的最长波长，ISLD被定位成使得被检测的光 FPA成像检测器首先通过ISLD，并且FPA成像检测器，ISLD和波长选择扩散器共享共同的光轴。

    HEATING DEVICE USING PHOTODETECTOR TO DETECT TEMPERATURE AND METHOD FOR PROTECTING THE SAME
    132.
    发明申请
    HEATING DEVICE USING PHOTODETECTOR TO DETECT TEMPERATURE AND METHOD FOR PROTECTING THE SAME 有权
    使用光电检测器检测温度的加热装置及其保护方法

    公开(公告)号：US20150204581A1

    公开(公告)日：2015-07-23

    申请号：US14159595

    申请日：2014-01-21

    Applicant: MPI Corporation

    Inventor： Helge Jacob KRYSTAD ,  Yueh-Ying LEE ,  Ying-Chiao CHANG

    IPC: F24H9/20

    CPC classification number: F24H9/2071 ,  F24H3/002 ,  F24H2250/14 ,  G01J1/00 ,  G01J5/0014 ,  G01J5/20 ,  G05D23/27

    Abstract: A heating device includes a housing having a flow channel, a heater disposed in the flow channel, an optical rod, a light guider and a photodetector. The optical rod has a transparent body, a first end portion, and a second end portion located inside the housing. The light guider is provided at the second end portion for guiding lights emitted by the heater toward the first end portion. The photodetector is located around the first end portion and faces the second end portion for indirectly receiving the lights emitted by the heater to the light guider through the transparent body. The temperature of the heater can be measured efficiently and timely by using the photodetector having a high responding speed, such that an overheat or damage of the heater can be prevented by controlling the heater based on the measured temperature.

    Abstract translation: 加热装置包括具有流动通道的壳体，设置在流动通道中的加热器，光学棒，光导体和光电检测器。 光学棒具有透明体，第一端部和位于壳体内部的第二端部。 光导体设置在第二端部处，用于将由加热器发射的光引向第一端部。 光电检测器位于第一端部周围并面对第二端部，用于通过透明体间接地将由加热器发射的光接收到光导体。 可以通过使用具有高响应速度的光电检测器来有效且及时地测量加热器的温度，从而可以通过基于测量的温度控制加热器来防止加热器的过热或损坏。

    MEASURING INSTRUMENT FOR DETECTION OF ELECTRICAL PROPERTIES IN A LIQUID
    133.
    发明申请
    MEASURING INSTRUMENT FOR DETECTION OF ELECTRICAL PROPERTIES IN A LIQUID 有权
    用于检测液体中电气特性的测量仪器

    公开(公告)号：US20150198548A1

    公开(公告)日：2015-07-16

    申请号：US14419094

    申请日：2013-02-03

    Applicant: 2351161 ONTARIO LIMITED

    Inventor： Derrick P. Fournier ,  Henry A. Palma ,  Cameron Smyth

    IPC: G01N27/00 ,  G01R19/00 ,  G01R1/073

    CPC classification number: G01N27/00 ,  B01J20/00 ,  G01J1/00 ,  G01R1/06 ,  G01R1/073 ,  G01R19/00 ,  G01R19/0084 ,  G01R19/0092 ,  G01R19/28 ,  G05B1/00

    Abstract: A measuring instrument for detection of electrical properties in a liquid includes a main body configured to hold a tester, a first pole extending from the main body, and a second pole extending from the main body that is spaced apart from the first pole. The first pole carries a positive probe for attachment to the tester, and the second pole carries a negative probe for attachment to the tester. When the probes are placed in the liquid, electrical properties in the liquid are detected by the tester.

    Abstract translation: 用于检测液体中的电气特性的测量仪器包括构造成保持测试器的主体，从主体延伸的第一极和从主体延伸的与第一极间隔开的第二极。 第一极带有用于连接到测试仪的正极探针，而第二极带有用于连接到测试仪的负极探头。 当探针放置在液体中时，液体中的电学特性由测试仪检测。

    Measuring Device for Measuring an Illumination Property
    135.
    发明申请
    Measuring Device for Measuring an Illumination Property 有权
    用于测量照明属性的测量装置

    公开(公告)号：US20150015875A1

    公开(公告)日：2015-01-15

    申请号：US14501220

    申请日：2014-09-30

    Applicant: Carl Zeiss SMT GmbH

    Inventor： Michael Arnz ,  Markus Deguenther

    IPC: G01N21/95 ,  G01J1/00

    CPC classification number: G01N21/95 ,  G01J1/00 ,  G01J1/4257 ,  G01J1/429 ,  G01N21/8806 ,  G01N21/9501 ,  G03F1/84

    Abstract: A measuring device (40) for measuring an illumination property of an illumination system (12), which is configured for two-dimensional irradiation of a substrate (24) arranged in an illumination plane (21) with illumination radiation (20). Two differing measurement beam paths (52, 54) are formed in the measuring device, each arranged to guide the illumination radiation emitted by the illumination system onto a spatially resolving intensity detector (42) of the measuring device. A first (52) of the measurement beam paths is arranged to measure an intensity distribution in the illumination plane and the second (54) of the measurement beam paths is arranged to measure an intensity distribution in a pupil of the illumination system. The measuring device also includes an imaging optical unit (44) arranged in the first measurement beam path (52) such that the illumination radiation guided in the first measurement beam path passes through the imaging optical unit.

    Abstract translation: 一种用于测量照明系统（12）的照明特性的测量装置（40），其被配置为用照射辐射（20）布置在照明平面（21）中的基板（24）的二维照射。 两个不同的测量光束路径（52,54）形成在测量装置中，每个测量光束路径被布置成将照明系统发射的照射辐射引导到测量装置的空间分辨强度检测器（42）上。 测量光束路径的第一（52）布置成测量照明平面中的强度分布，并且第二测量光束路径（54）被布置成测量照明系统的光瞳中的强度分布。 测量装置还包括配置在第一测量光束路径（52）中的成像光学单元（44），使得在第一测量光束路径中引导的照明辐射通过成像光学单元。

    Method of measuring uniformity of exposing light and exposure system for performing the same
    136.
    发明授权
    Method of measuring uniformity of exposing light and exposure system for performing the same 有权
    测量曝光光的均匀性和进行曝光系统的方法

    公开(公告)号：US08902414B2

    公开(公告)日：2014-12-02

    申请号：US13669751

    申请日：2012-11-06

    Applicant: Samsung Display Co., Ltd.

    Inventor： Jung-In Park ,  Cha-Dong Kim ,  Su-Yeon Sim ,  Sang-Hyun Yun ,  Hi-Kuk Lee

    IPC: G01J1/00 ,  G03F7/20

    CPC classification number: G01J1/00 ,  G03F7/20 ,  G03F7/70133

    Abstract: An exposure system includes an exposure apparatus, a mask, a test pattern portion and a uniformity measuring part. The exposure apparatus includes a first module and a second module. The first and second modules each emit light and are overlapped in an overlapping area. The mask includes a plurality of transmission portions which are spaced apart from each other. Each of the transmission portions has a width less than a width of the overlapping area. The test pattern portion includes a plurality of test patterns which are patterned by using the light transmitted through the transmission portions of the mask. The uniformity measuring part measures a uniformity of the test patterns.

    Abstract translation: 曝光系统包括曝光装置，掩模，测试图案部分和均匀度测量部分。 曝光装置包括第一模块和第二模块。 第一和第二模块各自发光并且在重叠区域中重叠。 掩模包括彼此间隔开的多个传输部分。 每个传输部分具有小于重叠区域的宽度的宽度。 测试图形部分包括通过使用透过掩模的透射部分的光而构图的多个测试图案。 均匀度测量部件测量测试图案的均匀性。

Patent Agency Ranking