APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS

    公开(公告)号:US20240248282A1

    公开(公告)日:2024-07-25

    申请号:US18159214

    申请日:2023-01-25

    CPC classification number: G02B7/28 G01J5/10 G02B26/02 H01L21/67115 G02B26/004

    Abstract: Embodiments herein are generally directed to electronic device manufacturing and, more particularly, to systems and methods for lamp heating in thermal processing chambers. In one embodiment, a substrate processing chamber includes a lid, a floor, and a processing volume between the lid and the floor. An upper window is disposed between the lid and the processing volume, a lower window is disposed between the floor and the processing volume. A lamp head is disposed between the lower window and the floor or between the upper window and the lid. At least one lamp is disposed within the lamp head, and a lens is disposed between the lamp head and the processing volume. In another embodiment, a plurality of lamps is disposed within the lamp head including at least one first lamp operating at a first wavelength and at least one second lamp operating at a second wavelength.

    LIGHT FIXTURE HAVING MULTI-TARGET TEMPERATURE DETECTION CIRCUIT

    公开(公告)号:US20240175755A1

    公开(公告)日:2024-05-30

    申请号:US18325456

    申请日:2023-05-30

    CPC classification number: G01J5/10

    Abstract: A light fixture having a multi-target temperature detection circuit includes a light source assembly for generating a light path, a light outgoing lens, a plurality of temperature-controlled elements inside the light head of the light fixture, and at least one heat dissipation assembly for dissipating heat from the temperature-controlled elements. A single-chip microcomputer and a plurality of temperature sensors located at various positions inside the light head are included. The single-chip microcomputer is connected to, via an integrated communication serial port, the plurality of temperature sensors connected in parallel and send corresponding address signals and temperature detection signals to the single-chip microcomputer via the integrated communication serial port, and the single-chip microcomputer receives and processes the plurality of temperature detection signals.

    CURVED PRISM ARRAY APPLIED TO AN INFRARED SENSOR

    公开(公告)号:US20240094059A1

    公开(公告)日:2024-03-21

    申请号:US17945377

    申请日:2022-09-15

    CPC classification number: G01J5/0879 G01J5/10

    Abstract: A curved prism array applied to an infrared sensor wherein: the infrared sensor comprises at least an infrared sensing element which is used in detecting infrared signals within a solid-angled FOV and installed inside the curved prism array; the curved prism array has an incident focal plane and a plurality of emergent focal planes, both of which are not parallel with each other, such that infrared signals beyond the solid-angled FOV are received by the incident focal plane, refracted through one of the emergent focal planes and guided toward the infrared sensing element for expansion of the solid-angled FOV of the infrared sensing element.

    HEAD UP DISPLAY DEVICE
    9.
    发明公开

    公开(公告)号:US20230375821A1

    公开(公告)日:2023-11-23

    申请号:US18319461

    申请日:2023-05-17

    Abstract: A head up display device includes an image generation unit, an imaging unit, an infrared light splitting element, and at least one infrared light detecting element. The infrared light splitting element is located on a transmission path of at least one ambient light beam, and configured to split an infrared light beam from the at least one ambient light beam. The at least one infrared light detecting element is located on a transmission path of the infrared light beam of the at least one ambient light beam, and configured to detect light intensity of the infrared light beam. When the at least one infrared light detecting element detects that the light intensity of the infrared light beam exceeds a predetermined threshold, the head up display device reduces light intensity of a portion of the at least one ambient light beam transmitted to the image generation unit.

    Passive infrared detector with a blind channel

    公开(公告)号:US11821909B2

    公开(公告)日:2023-11-21

    申请号:US17023935

    申请日:2020-09-17

    CPC classification number: G01P13/00 G01J5/0025 G01J5/10 G08B21/18

    Abstract: A method for verifying a detection of a motion of a body using a passive infrared sensor (100) includes generating motion data based on a first signal received at a primary detection channel (103a, 103c), the first signal indicates a possible motion of a body; generating verification data based on a second signal, or absence of second signal, received at a secondary detection channel (103b); and verifying that the first signal is a motion of a body based on a comparison of the motion data with the verification data; the primary detection channel (103a, 103c) is configured to receive a first predetermined range of signals, including at least some infrared signals, and the secondary detection channel (103b) is configured to receive a second predetermined range of signals, excluding at least some infrared signals via an infrared blocker (104).

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