Structure and fabrication procedure for a stable post
    139.
    发明授权
    Structure and fabrication procedure for a stable post 失效
    稳定桩的结构和制造程序

    公开(公告)号:US5930890A

    公开(公告)日:1999-08-03

    申请号:US858192

    申请日:1997-04-21

    Abstract: An interconnecting post for mounting a microelectronic device such as an integral circuit chip is fabricated with generally uniform cross-section, by forming a first layer of positive photoresist on a substrate, soft-baking that first layer and exposing it for a short time with a wide-apertured mask or simply a UV blank flood exposure. Without developing the first layer, a second layer of positive resist is then applied over the first layer, soft-baked, and then exposed with a narrow-apertured mask. During the soft-baking of the second layer, some of its activator in the photoresist compound diffuses into the exposed portion of the first layer and modifies its solubility in such a way that, when the layers are subsequently developed, the developer partially undercuts the unexposed portion of the first layer to form in the photoresist an opening of generally uniform cross-section. This opening can then be filled by plating to produce a strong, integral interconnect post.

    Abstract translation: 通过在基板上形成第一层正性光致抗蚀剂,通过在第一层上软化烘烤该第一层并将其暴露在短时间内,用一个整体电路芯片来形成用于安装诸如集成电路芯片的微电子器件的互连柱, 宽孔径面罩或简单的UV空白洪水曝光。 在不显影第一层的情况下,将第二层正性抗蚀剂涂覆在第一层上,软化,然后用窄孔径掩模曝光。 在第二层的软烘烤期间,光致抗蚀剂化合物中的一些活化剂扩散到第一层的暴露部分,并以这样的方式改变其溶解度,使得当这些层随后显影时,显影剂部分地削弱未曝光 第一层的部分以在光致抗蚀剂中形成具有大致均匀横截面的开口。 然后可以通过电镀填充该开口以产生强大的整体互连柱。

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