公开(公告)号：US08063458B2

公开(公告)日：2011-11-22

申请号：US11918189

申请日：2006-03-28

Applicant: Bernhard Loeffler ,  Franz Schrank

Inventor： Bernhard Loeffler ,  Franz Schrank

IPC: H01L29/84

CPC classification number: B81B3/0072 ,  B81B7/0012 ,  B81B2201/018 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2203/0109

Abstract: A micromechanical component that can be produced in an integrated thin-film method is disclosed, which component can be produced and patterned on the surface of a substrate as multilayer construction. At least two metal layers that are separated from the substrate and with respect to one another by interlayers are provided for the multilayer construction. Electrically conductive connecting structures provide for an electrical contact of the metal layers among one another and with a circuit arrangement arranged in the substrate. The freely vibrating membrane that can be used for an inertia sensor, a microphone or an electrostatic switch can be provided with matching and passivation layers on all surfaces in order to improve its mechanical properties, said layers being concomitantly deposited and patterned during the layer producing process or during the construction of the multilayer construction. Titanium nitride layers are advantageously used for this.

Abstract translation: 公开了可以以集成薄膜方法制造的微机械部件，该组件可以在基板的表面上制造和图案化为多层结构。 为了多层结构，提供了至少两个从衬底分离并通过夹层彼此分开的金属层。 导电连接结构提供了彼此之间的金属层的电接触以及布置在基板中的电路装置。 可以用于惯性传感器，麦克风或静电开关的自由振动膜可以在所有表​​面上设置匹配和钝化层，以改善其机械性能，所述层在层生产过程中伴随沉积和图案化 或在多层结构的施工期间。 氮化钛层有利地用于此。

公开(公告)号：US20110155548A1

公开(公告)日：2011-06-30

申请号：US12929259

申请日：2011-01-11

Applicant: John S. Foster ,  Alok Paranjpye ,  Paul J. Rubel

Inventor： John S. Foster ,  Alok Paranjpye ,  Paul J. Rubel

IPC: H01H59/00 ,  H01L21/50

CPC classification number: H01H59/0009 ,  B81B2201/018 ,  B81B2207/093 ,  B81B2207/095 ,  B81C1/00333 ,  B81C2203/0118 ,  B81C2203/035 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48464 ,  H01L2224/73265 ,  H01L2924/16152 ,  H01L2924/00014 ,  H01L2924/00

Abstract: Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have at least one shunt bar located at a nodal line of a vibrational mode of the deformable plate, so that the shunt bar remains relatively stationary when the plate is vibrating in that vibrational mode. A hermetic seal may be made around the device with a larger, secondary enclosure. Electrical access to the deformable plate may be accomplished by an electrical path which is independent of the seal. The electrical path may include a via through the first substrate or the second substrate, or a flash deposited on an external region of the switch.

Abstract translation: 用于形成静电MEMS板开关的系统和方法包括在第一衬底上形成可变形板，在第二衬底上形成电触点，并使用气密密封来连接两个衬底。 可变形板可以具有位于可变形板的振动模式的节点线处的至少一个分流杆，使得当板在该振动模式下振动时，分流棒保持相对静止。 可以在具有较大二次外壳的装置周围制造气密密封。 可以通过独立于密封件的电气路径来实现对可变形板的电气接入。 电路可以包括通过第一衬底或第二衬底的通孔，或者沉积在开关的外部区域上的闪光。

公开(公告)号：US07960804B1

公开(公告)日：2011-06-14

申请号：US12152129

申请日：2008-05-08

Applicant: John L. Ebel ,  Rebecca Cortez ,  Kevin D. Leedy ,  Richard E. Strawser ,  Donald E. Strawser, legal representative

Inventor： John L. Ebel ,  Rebecca Cortez ,  Kevin D. Leedy ,  Richard E. Strawser

IPC: H01L21/00

CPC classification number: H01H59/0009 ,  B81B2201/018 ,  B81C1/00333 ,  B81C2203/0154 ,  H01H2059/0045

Abstract: A latching zip-mode actuated mono wafer MEMS switch especially suited to capacitance coupled signal switching of microwave radio frequency signals is disclosed. The single wafer fabrication process used for the switch employs sacrificial layers and liquid removal of these layers in order to also provide needed permanent physical protection for an ultra fragile switch moving arm member. Latched operation of the achieved MEMS switch without use of conventional holding electrodes or magnetic fields is also achieved. Fabrication of a single MEMS switch is disclosed however large or small arrays may be achieved.

Abstract translation: 公开了一种特别适用于微波射频信号的电容耦合信号切换的闭锁拉链模式致动单晶片MEMS开关。 用于开关的单个晶片制造工艺采用牺牲层和这些层的液体移除，以便为超脆弱的开关移动臂构件提供所需的永久物理保护。 还实现了不使用常规保持电极或磁场的实现的MEMS开关的锁定操作。 公开了单个MEMS开关的制造，但是可以实现大的或小的阵列。

公开(公告)号：US07834722B2

公开(公告)日：2010-11-16

申请号：US11886684

申请日：2006-03-07

Applicant: Olivier Millet

Inventor： Olivier Millet

IPC: H01H51/22

CPC classification number: H01H1/0036 ,  B81B5/00 ,  B81B2201/018 ,  H01H59/0009 ,  H01H2001/0063

Abstract: The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/FIG. 1) and a second position (on-state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3), which is bendable under the action of the actuation means (7), and which can freely slide relatively to the support means (3) during its bending movement.

Abstract translation: RF MEMS开关包括微机械切换装置，其由基板（1）承载并且可以在两个位置之间被致动：第一位置（关闭状态/图1）和第二位置（导通状态），以及致动 用于致动切换装置的位置的装置。 微机械切换装置包括柔性膜（6），其由支撑装置（3）自由地支撑，支撑装置（3）可在致动装置（7）的作用下弯曲，并且可在相对于支撑装置（3） 它的弯曲运动。

公开(公告)号：US07719111B2

公开(公告)日：2010-05-18

申请号：US11408054

申请日：2006-04-21

Applicant: Jae-Eun Jang ,  Seung-Nam Cha ,  Yong-Wan Jin ,  Byong-Gwon Song

Inventor： Jae-Eun Jang ,  Seung-Nam Cha ,  Yong-Wan Jin ,  Byong-Gwon Song

IPC: H01L21/28

CPC classification number: B81C1/00111 ,  B81B3/0086 ,  B81B2201/018 ,  H01H1/0094 ,  Y10S977/762 ,  Y10T29/49105

Abstract: A nanowire electronmechanical device with an improved structure and a method of fabricating the same prevent burning of two nanowires which are switched due to contact with each other while providing stable on-off switching characteristics. The nanowire electromechanical device comprises: an insulating substrate; first and third electrodes spaced apart from each other on the insulating substrate, wherein a negative voltage and a positive voltage, varying within a predetermined range, are applied to the first and third electrodes, respectively; a second electrode interposed between the first and third electrodes, a constant positive voltage, lower than the voltage applied to the third electrode, being applied to the second electrode; a first nanowire vertically grown on the first electrode and charged with a negative charge; a second nanowire vertically grown on the second electrode and charged with a positive charge; and a third nanowire vertically grown on the third electrode and charged with an amount of positive charge corresponding to the magnitude of the varying voltage applied to the third electrode.

Abstract translation: 具有改进结构的纳米线电子机械装置及其制造方法防止由于彼此接触而切换的两个纳米线的燃烧，同时提供稳定的开 - 关开关特性。 纳米线机电装置包括：绝缘基板; 在绝缘基板上彼此间隔开的第一和第三电极，其中在预定范围内变化的负电压和正电压分别施加到第一和第三电极; 插入在第一和第三电极之间的第二电极，施加到第二电极的恒定的正电压低于施加到第三电极的电压; 在第一电极上垂直生长并带有负电荷的第一纳米线; 在第二电极上垂直生长并带有正电荷的第二纳米线; 以及在第三电极上垂直生长的第三纳米线，并充有与施加到第三电极的变化电压的幅度相对应的一定量的正电荷。

公开(公告)号：US20090277762A1

公开(公告)日：2009-11-12

申请号：US12297334

申请日：2007-04-25

Applicant: Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Keiji Onishi

Inventor： Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Keiji Onishi

IPC: H01H19/00

CPC classification number: B81B5/00 ,  B81B2201/018 ,  B81B2201/034 ,  H01H1/0036 ,  H01P1/127

Abstract: A micromachine switch of the present invention is a micromachine switch for switching an electrical connection between signal electrodes in accordance with control signals from outside which include: a first control signal for electrically connecting the signal electrodes between which a signal is to be passed; and a second control signal for disconnecting the electrical connection between the signal electrodes. The micromachine switch comprises: a substrate; a rotating body provided on the substrate, which is rotatable on the substrate; a movable electrode provided on the rotating body; a first signal electrode, one end of which is electrically connected to one end of the movable electrode, and another end of which is provided on the substrate; a second signal electrode which is provided near the rotating body so as to be positioned such that a rotation of the rotating body causes the second signal electrode to be electrically connected to another end of the movable electrode; and a drive section for causing, in accordance with the first control signal, the rotating body to rotate until the rotating body is in such a position as to allow said another end of the movable electrode and the second signal electrode to be electrically connected, and for causing, in accordance with the second control signal, the rotating body to rotate until the rotating body is in such a position as to disconnect an electrical connection between said another end of the movable electrode and the second signal electrode.

Abstract translation: 本发明的微加工开关是根据来自外部的控制信号切换信号电极之间的电连接的微型机械开关，其包括：用于电连接信号电极之间的信号的第一控制信号; 以及用于断开信号电极之间的电连接的第二控制信号。 微机械开关包括：基板; 旋转体，其设置在所述基板上，所述旋转体可在所述基板上旋转; 设置在所述旋转体上的可动电极; 第一信号电极，其一端电连接到可动电极的一端，另一端设置在基板上; 第二信号电极，设置在旋转体附近，以便使得旋转体的旋转使第二信号电极电连接到可动电极的另一端; 以及驱动部分，用于根据第一控制信号使旋转体旋转直到旋转体处于允许可动电极和第二信号电极的另一端电连接的位置，以及 用于根据第二控制信号使旋转体旋转直到旋转体处于断开可动电极的另一端和第二信号电极之间的电连接的位置。

公开(公告)号：US20090201119A1

公开(公告)日：2009-08-13

申请号：US12318634

申请日：2009-01-05

Applicant: Paul J. Rubel

Inventor： Paul J. Rubel

IPC: H01H71/18 ,  H02N10/00 ,  H01H11/00

CPC classification number: F03G7/06 ,  B81B3/0059 ,  B81B2201/018 ,  B81B2201/032 ,  B81B2201/054 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008 ,  H02N10/00 ,  Y10T29/49105

Abstract: A MEMS hysteretic thermal actuator may have a plurality of beams disposed over a heating element formed on the surface of the substrate. The plurality of beams may be coupled to a passive beam which is not disposed over the heating element. One of the plurality of beams may be formed in a first plane parallel to the substrate, whereas another of the plurality of beams may be formed in a second plane closer to the surface of the substrate. When the heating element is activated, it heats the plurality of beams such that they move the passive beam in a trajectory that is neither parallel to nor perpendicular to the surface of the substrate. When the beams are cooled, they may move in a different trajectory, approaching the substrate before moving laterally across it to their initial positions. By providing one electrical contact on the distal end of the passive beam and another stationary electrical contact on the substrate surface, the MEMS hysteretic actuator may form a reliable electrical switch that is relatively simple to manufacture and operate.

Abstract translation: MEMS迟滞热致动器可以具有设置在形成在基板的表面上的加热元件上的多个光束。 多个光束可以耦合到未设置在加热元件上方的无源光束。 多个光束中的一个可以形成在平行于衬底的第一平面中，而多个光束中的另一个可以形成在靠近衬底表面的第二平面中。 当加热元件被激活时，它加热多个光束，使得它们以不平行于或垂直于衬底表面的轨迹移动被动束。 当梁被冷却时，它们可以以不同的轨迹移动，在横向移动到其初始位置之前接近基板。 通过在被动束的远端上提供一个电接触，并在衬底表面上提供另一个固定的电触点，MEMS滞后致动器可形成可靠的电开关，其制造和操作相对简单。

公开(公告)号：US07498911B2

公开(公告)日：2009-03-03

申请号：US10785205

申请日：2004-02-24

Applicant: David Forehand

Inventor： David Forehand

IPC: H01H51/22

CPC classification number: B81B3/0081 ,  B81B3/001 ,  B81B2201/018 ,  H01H59/0009

Abstract: The present invention provides a method and apparatus for reducing temperature dependency within Microelectromechanical System (MEMS) switches. The two typical designs for such MEMS switches are fixed-fixed and fixed-free designs. Springs are used in the fixed-fixed design to account for dimensional changes as a result of thermal expansion. The fixed-free designs utilize a tether to prevent a cantilever arm from deforming as a result of thermal expansions, as well as reducing tight controls in the manufacture of fixed-free MEMS switches. Additionally, to prevent stiction in MEMS switches, a variegated electrode design is provided to utilize internal stresses of a suspended beam to increase the restoring force while not increasing the actuation force.

Abstract translation: 本发明提供了一种用于降低微机电系统（MEMS）开关内的温度依赖性的方法和装置。 这种MEMS开关的两个典型设计是固定和固定设计。 弹簧用于固定固定设计，以解释由于热膨胀导致的尺寸变化。 无固定设计利用系绳防止悬臂由于热膨胀而变形，以及减少制造无固定MEMS开关的严格控制。 另外，为了防止MEMS开关中的静电，提供了多样化的电极设计，以利用悬挂梁的内部应力来增加恢复力而不增加致动力。

公开(公告)号：US20090014819A1

公开(公告)日：2009-01-15

申请号：US11918189

申请日：2006-03-28

Applicant: Bernhard Loeffler ,  Franz Schrank

Inventor： Bernhard Loeffler ,  Franz Schrank

IPC: H01L29/84 ,  H01L21/00

CPC classification number: B81B3/0072 ,  B81B7/0012 ,  B81B2201/018 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2203/0109

Abstract: A micromechanical component that can be produced in an integrated thin-film method is disclosed, which component can be produced and patterned on the surface of a substrate as multilayer construction. At least two metal layers that are separated from the substrate and with respect to one another by interlayers are provided for the multilayer construction. Electrically conductive connecting structures provide for an electrical contact of the metal layers among one another and with a circuit arrangement arranged in the substrate. The freely vibrating membrane that can be used for an inertia sensor, a microphone or an electrostatic switch can be provided with matching and passivation layers on all surfaces in order to improve its mechanical properties, said layers being concomitantly deposited and patterned during the layer producing process or during the construction of the multilayer construction. Titanium nitride layers are advantageously used for this.

Abstract translation: 公开了可以以集成薄膜方法制造的微机械部件，该组件可以在基板的表面上制造和图案化为多层结构。 为了多层结构，提供了至少两个从衬底分离并通过夹层彼此分开的金属层。 导电连接结构提供了彼此之间的金属层的电接触以及布置在基板中的电路装置。 可以用于惯性传感器，麦克风或静电开关的自由振动膜可以在所有表​​面上设置匹配和钝化层，以改善其机械性能，所述层在层生产过程中伴随沉积和图案化 或在多层结构的施工期间。 氮化钛层有利地用于此。

公开(公告)号：US20080237024A1

公开(公告)日：2008-10-02

申请号：US11886684

申请日：2006-03-07

Applicant: Olivier Millet

Inventor： Olivier Millet

IPC: H03K17/975 ,  H01H59/00

CPC classification number: H01H1/0036 ,  B81B5/00 ,  B81B2201/018 ,  H01H59/0009 ,  H01H2001/0063

Abstract: The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/FIG. 1) and a second position (on-state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3), which is bendable under the action of the actuation means (7), and which can freely slide relatively to the support means (3) during its bending movement.

Abstract translation: RF MEMS开关包括微机械切换装置，其由基板（1）承载并且可以在两个位置之间被致动：第一位置（关闭状态/图1）和第二位置（导通状态），以及致动 用于致动切换装置的位置的装置。 微机械切换装置包括柔性膜（6），其由支撑装置（3）自由地支撑，支撑装置（3）可在致动装置（7）的作用下弯曲，并且可在相对于支撑装置（3） 它的弯曲运动。